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VVZ4000-31A-21 pc. Base mounted 2 position single 2 position double Sub-plate Assembly Part No.: VZA4000-S01 02 Mounting bolt and gasket are not included. Thread type Nil N T F Rc NPT NPTF G Caution 3 position closed center 3 position exhaust center Be sure to read this before handling.

Do not use compressed air that contains chemicals, synthetic oils that include organic solvents, salt, corrosive gases, etc., as it can cause damage or malfunction. 21 XL Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

molybdenum steel Hexagon socket head button bolt Chrome molybdenum steel Hexagon socket head button bolt Steel ball Hard anodized Chrome molybdenum steel Spring steel Carbon steel Carbon steel Nickel plated (16: Hexagon socket head plug) Hexagon socket head taper plug Hard anodized Nickel plated after quenching Nickel plated (16: Hexagon socket head plug) Hexagon socket head taper plug 21

MIW8-8D MIS12-30D MIS25-30D 6 4 3.5 1.5 16.5 27 4.5 20.5 41 8.5 7.5 38 21 MIS8-10D MIW20-20D MIS25-50D 6 4 4 2 16.5 37 4.5 20.5 31 8.5 8.5 41 29 MIS8-20D MIS20-10D MIW32-32D 6 4 4 2 18.5 31 6.5 20.5 51 8.5 8.5 39 29 MIW12-12D MIS20-20D MIS32-30D 3.5 1.5 4 2 18.5 29 6.5 20.5 61 8.5 8.5 59 29 MIS12-10D MIS20-30D MIS32-50D 3.5 1.5 4 2 18.5 39 6.5 7.5 33 21 MIS12-20D

ring Bumper A Bumper B Piston gasket Rod seal Piston seal Rod end nut Mounting nut Stainless steel Magnet Resin Urethane Urethane NBR NBR NBR Carbon steel Carbon steel 1 1 1 1 1 1 1 1 1 1 CA2 (Switch type only) 2A 2B CS1 2C e r t y u i C76 Hard chrome plated Chromate C85 Nickel plating Nickel plating C95 Nickel plating C7632 to 40 Air cushion CP95 13 8 6 7 1 11 3 4 14 5 20 9 12 2 10 15 21

B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16

Q + Stroke (NA) Cylinder form 12 16 d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 x 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 x 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 x 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54 9

Joint 7 9 YB-03 32, 40 11.5 depth 7.5 34 25 12 K ( across flats) H (With locking) 9 11 YB-05 50, 63 42 32 12 14.5 depth 8.5 11 13 YB-08 80 52 38 16 18 depth 12 d2 d1 14 17 YB-10 100 62 50 19 21 depth 14 L UT C UA Bore size (mm) T1 RS Weight (g) T2 V W Part no. Part no.

[Vertical] [Load in the direction of rod extension] [Load in the direction of rod retraction] Cylinder sliding resistance (N) Cam unlocking torque (standard) (Nm) Width across flats (mm) Socket Bore size (mm) W 125 140 160 JIS B 4636 + 2 point angle socket 16 16 18 21 961 1216 1579 68.6 78.4 156.8 SOL.C JIS B 4636 + 2 point angle socket 18 SOL.C JIS B 4636 + 2 point angle socket 21 4.

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Flow diagnosis 0: Within range 1: Out of range (HHH/LLL). 9 Fixed output 0: Normal output 1: Fixed output (for checking output) 15 Error diagnosis 0: Error is not generated 1: Error is generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow

lock 0x0 Refer to "Device access lock parameter" on page 76. 0x000C (16) 0 R Vendor name SMC Corporation 0x0010 (17) 0 R Vendor text www.smcworld.com 0x0011 0x0012 (18) 0 R Product name Example: PF3A703H-xx-Lx-xxx 0x0013 (19) 0 R Product ID Example: PF3A703H-xx-Lx-xxx (20) 0 R Product text FloW sensor 0x0014 Initial value is indicated as 8-digit. 16 octets fixed character string 0x0015 (21

(Remote type monitor unit) MODEL / Series / Product Number PF2A3## PF2W3## PF2D3## Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 11 Definition and terminology 12 Mounting and Installation 14 Installation 14 Wiring 16 Outline of setting 18 List of outputs 19 Initialize mode 20 Default settings 20 Setting procedure of Initialize mode 21

No.PF-OMW0010-D PRODUCT NAME Digital Flow Switch (Integrated display type) ( compatible) MODEL / Series / Product Number PF3W7## Table of Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product parts 14 Definition and terminology 16 Mounting and Installation 18 Installation 19 Piping 21 Wiring 24 Flow Setting 26 Simple Setting Mode 29 Function Setting 30 Default

O 21 5. ( 3-1-2 ) 6. () ( 7-2) 22 11 11-1 OUT1OUT2 (1920) 6 90cm3 07 P36801080 P565010-18 180cm3 1 P36801081 P565010-19 O P5 19 20 (1) O (2) A (P22401123) 11-2 IP8100 IP8100 7 M P368010-24 S P368010-25 21 M 22 S M IP610 SIP610 23 11-3 IP8000 IP8000 8 1085mm P368010-20 35100mm P368010-21 50140mm P368010-22 11-4 (IP8*00-**0)2 9 (A) P368010-26 79 (B) P368010-27 911 G1/2 23 24

21 27 46 46 MXQ20(A) 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 20.9 21.9 21.9 21.9 27.9 36.9 61.9 61.9 61.9 MXQ25(A) 34.4 25.4 25.4 25.4 25.4 25.4 25.4 25.4 25.4 28.7 27.7 27.7 27.7 40.7 40.7 42.7 65.4 65.7 A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6B 18 7.4 7.4 7.4 7.4 7.4 1 11.6 11.6 17.6 34.6 11.6 MXQ8B 29 13.9 13.9 13.9 13.9 13.9 13.9 2 9.1 9.1 17.1 17.1 36.1

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

Inse ection Top SideCross nutsection Adjust bolt Ass'y Fig.20 Seal washer Small hexagon nut Hexagon socket head set screw (Adjust bolt) Fig.21 -34- Shaft Pinion gear It greases it to extent where the ditch of the gear is buried. Fig.22 (2) Set the bearing to the housing of the body, and insert the piston Assy to the body.

Auto switch . 20 5Operating method or operation . 21 5-1Precautions for Design . 21 5-2. Installation . 21 5-3. Wiring example to robot controller (common to NPN/PNP) . 30 5-4.YASKAWA Plug & Play Kit . 31 5-4-1. Installing YASKAWA Plug & Play Kit . 31 5-4-2. Tool Presets . 36 5-4-3. Utility Window . 37 5-4-4. Air Gripper Integration Window . 38 5-5. Air supply . 42 5-6. Piping . 43 5-7.

When a surge-generating load, such as a relay or solenoid valve, is driven directly, use a product that incorporates a surge absorption element. -21- 18. The power supplies should be separated between the controller power and the I/O signal power, and both power supplies must not be of the inrush-current limited type.

Crack on the back of the belt 21 - 4. Troubleshooting Alarms below are abstract of representative examples. For other alarms, see operation manual of controller. No.