Nominal Size: 63mm, Stroke: 400mm, Size: S (Small Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 2 (Stop Valve), Voltage: 1 (100VAC), Electrical Entry: C (Conduit)
Nominal Size: 63mm, Stroke: 50mm, Size: S (Small Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 3 (Skip Valve), Voltage: 1 (100VAC), Electrical Entry: C (Conduit)
Nominal Size: 63mm, Stroke: 200mm, Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 1 (Stop Valve/Skip Valve), Voltage: 1 (100VAC), Electrical Entry: C (Conduit)
Nominal Size: 63mm, Stroke: 300mm, Size: S (Small Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 1 (Stop Valve/Skip Valve), Voltage: 1 (100VAC), Electrical Entry: C (Conduit)
Nominal Size: 100mm, Stroke: 200mm, Size: L (High Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 1 (Stop Valve/Skip Valve), Voltage: 1 (100VAC), Electrical Entry: C (Conduit)
Nominal Size: 100mm, Stroke: 200mm, Size: L (High Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 2 (Stop Valve), Voltage: 1 (100VAC), Electrical Entry: C (Conduit)
Nominal Size: 63mm, Stroke: 100mm, Size: S (Small Flow Style), Control Valve: 3 (Speed Controller For Minimal Flow (CCVS Only)), Combination Valve: 3 (Skip Valve), Voltage: 1 (100VAC), Electrical Entry: C (Conduit)
Nominal Size: 100mm, Stroke: 100mm, Size: S (Small Flow Style), Control Valve: 0 (None), Combination Valve: 2 (Stop Valve), Voltage: 1 (100VAC), Electrical Entry: C (Conduit)
Nominal Size: 160mm, Stroke: 200mm, Size: L (High Flow Style), Control Valve: 0 (None), Combination Valve: 2 (Stop Valve), Voltage: 1 (100VAC), Electrical Entry: C (Conduit)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 4 (Cassette Type Full MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)