Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: w/o Lead Wire, Option 2: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: M5 (M5 Female Thread)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: D (Panel Mount Adapter + Front Protection Cover)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: w/o Lead Wire, Option 2: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: w/o Lead Wire, Option 2: None, Option 3: Y (w/o Operation Manual, w/o Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A1 (Bracket A, Vertical Mounting), Option 3: T (w/o Operation Manual, Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: w/o Lead Wire, Option 2: B (Panel Mount Adapter)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter), Option 3: K (Operation Manual, Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (M5 Female Thread)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: None, Option 3: T (w/o Operation Manual, Calibration Certificate)

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Low torque Metal seal type Rotary joint

Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male R1/8 Female M5 x 0.8 M5 x 0.8 Flow rate C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure -100kPa Max. operating pressure 1.0MPa

Stainless Steel Regulator Series NSR

45) 01-r,6NPr 02-TNPI 03-Stl.lPI 04_I'NPI N Pon thrEd Fluoro rubber E Fluororesin lining Fluoro rubber Fluoro rubber & Fluoro resin lining Port lhrad N-NPT F-PF _-Rc(Pn' *Special o.der only.

XL-OMY0002

S 1 0.53 28 2.511 48 418 6.531.5 6.531.5 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM 2 MPa G 0.40.7[ ] 46 200 360 660 1350 3000 5150 3 3 cm O.5MPa 2.5 12 15.5 30 42 54 54 M5 Rc1/8 Rc1/4 [kg] 0.5 1.2 1.8 3.4 5.6 11.5 20 1 2 [Y-VAC2] 5 3 1 1mm 32 L/SP=0.1MPa 30 6 P11) 28 XLD-100 XLD-160 L/s () P=0.1MPa 26 24 22 20 XLD-63 XLD-80 18 16 14 XLD-50 12 10

Large Flow Lubricator AL800/900 Series

min (ANR)) Flow rate (L/min (ANR)) AEP HEP Construction i e AL800/900 r y q IN OUT t o !

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

(g) 120 1 1 0 100 90 80 l|AN20002 U1 35 (1.9) .04 (17) NAN3OO-N03 % 60 (3.3) .06 t25) NANtrco+to4 90 (5.0) .08 (35) 60 NAN50(rN0,6 3A 160 (8.8) .36 (165) NAN6OO.NI O 1 27O llsl .46 e25) NAN700+i12 1]4 444 Q4l 1 .87 (4901 Supply pressure: 7l PSI Distance from silencer: NAN200-500-) 31t NAN6O0-7OO+ 6.5fi MN800_900 ,10f1 NANSOO-N,'4 1\h 590 (33) 2.21 (580) NANgOO-N2O 2 960 (53) 3.13 (820) Construction

SY3000-OMH0002

) NL: 3( WA ) 1V () 10 No.SY3000-OMH0002 W WA SY series N) DDIN SY115-D SY115-Y SY114(G, L, M) SY115-D/Y (DIN ) SY300SY3000 DIN DIN SY300, SY3000 DIN 10mmDIN 15.8mm 3.57 F IP65() 90 4 3.5 () JIS C3306 0.5mm2 2 3 Y Y Y Y Y DIN DIN 8mm DIN DDIN 9.4mm Y DDIN N( 11 No.SY3000-OMH0002 SY series (SS5Y(3,5)-45(N)) 23, 43, 45, 45, 60DIN SY(3,5)245-FU DIN 2 A,B DIN T 25 2 610 3 1115

Metering Valve with Silencer Series ASN2 1

ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1 2 Series ASN Construction Component