Vacuum System Peripherals:

PSE531-M5 Pressure Sensor: Series PSE530 Model 0 to 101 kPa Rated pressure range 500 kPa Proof pressure Air, Non corrosive gas Applicable fluid 12 to 24 VDC (Ripple 10% or less) Power supply voltage 15 mA or less Current consumption Analog output (1 to 5 V, Output impedance: Approx. 1 k) Output specifications For details, refer to Best Pneumatics Vol. 16. 13-14-11 11 Vacuum System Peripherals

HRX-OM-I051

. 5-5 5.3.7 Setting screen . 5-6 5.3.8 Mode Selection screen . 5-7 5.3.9 Initial Setting screen . 5-7 5.3.10 Maintenance screen . 5-9 5.3.11 Option screen . 5-9 5.3.12 Alarm Display screen . 5-10 5.3.13 System Information screen . 5-10 5.4 Examples of System Operation . 5-11 5.4.1 Example 1: Circulating fluid set temperature is changed from 23.0C to 34.1C. . 5-11 HRZ Series TOC-2 HRX-OM-I051

VZ100/300/500

VZ 3 5 2R X20 ( ) VZ 3 5 X1 ( ) Entry is the same as standard products. Entry is the same as standard products.

IDX-OM-V024

OF POWER SUPPLY . 10-2 Chapter 11 Option T .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter 13 Inspection record

CXWM/CXWL

5.

IDX-OM-W014

6-3 6-4 . 6-4 6-5 . 6-4 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 M 10-1 . 10-1 10-2 . 10-2 10-3 . 10-3 10-4 . 10-3 11 R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 2 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Note) Metric size KE Inch size 01 03 05 07 09 11 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 04 06 08 10 12 4 6 8 10 12 AS-FG AS-FG With One-touch fitting AS-FP Stainless steel specifications (SUS303) AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 702.

3

U PF3W 5 1 Remote sensor unit PF3W 7 11 25 A M Integrated display U Made to Order Type Seal material EPDM X109 5 7 Remote sensor unit Integrated display (Refer to page 17.) Bracket (Option) Nil None Bracket Rated flow range (Flow range) Symbol Rated flow range 11 21 10 to 100 L/min 30 to 250 L/min Note) With bracket is R not available for 250 L/min type.

Fieldbus system PROFINET compatible SI Unit

EX245-EA2-5 specifications Item Description Dimensions (W x L x H) in mm 27.6 x 120 x 61.5 Weight 120 g Housing material Nylon 73 No.EX-OMW0011-B 11.

IDX-OM-W017

. 6-3 6-4 . 6-4 6-5 . 6-5 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 8 C 8-1 . 8-1 8-2 . 8-1 8-3 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 (ADH4000-04) . 10-2 10-4 . 10-2 10-5 . 10-2 11 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 T 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-3 13 V 13-1 . 13-1 13-2 . 13-2

HRX-OM-W058

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection

HRX-OM-X027

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 12 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !

30

Plug: KQB2P Applicable fitting size d A Weight (g) D L L Model A KQB2P-01 KQB2P-03 KQB2P-07 KQB2P-09 KQB2P-11 KQB2P-13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2.8 4.3 9.4 16.3 22.2 40.7 5 6 8 10 11 14 28.9 29.6 30.3 33.7 34.1 36.4 16.9 17 16.8 17.6 17.5 17.9 D d Applicable fitting size d 14 Metal One-touch Fittings Applicable Tube: Metric Size, Connection Thread: G Series KQB2 RoHS Applicable Tube

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

-0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 5 8 31 23f8 5 M8 x 1.25 17 15 M22 x 1.5 1/8 81 9.5 4.5 6.5 138 10 41 25 6 8 34 25f8 5.5 M10 x 1.25 17 15 M24 x 1.5 1/8 81 11 3.5 5.5 143 10 46 32 8 9 40 31f8 7.5 M14 x 1.5 18 15 M30 x 1.5 1/8 87 13 3 4 159 10 53 40 10 11 48 34f8 7.5 M16 x 1.5 22 21 M33 x 2 1/4 108 16 5 0 183 16 54 7 Hydraulic Cylinder: 7MPa Series CHN Rear flange type:

Series KV2 Fittings

(g) Bag/Box Quantity MC D2 D3 D4 L1 L2 Q 5/32 1/4 1/4** 3/8 3/8** 3/8** 3/8** 1/2 1/2** 5/8 5/32 1/4 1/4 3/8 3/8 3/8 3/8 1/2 1/2 5/8 5/32 1/4 3/8 3/8 5/32 1/4 1/2 1/2 3/8 5/8 KV2T03-00 KV2T07-00 KV2T07-11 KV2T11-00 KV2T11-03 KV2T11-07 KV2T11-13 KV2T13-00 KV2T13-11 KV2T15-00 10.4 13.2 17.9 17.9 17.9 17.9 21.7 21.7 21.7 26.5 10.6 13.3 18.1 18.1 18.1 18.1 22.1 22.1 22.1 27.0 10.4 13.2 17.9 17.9

VDW

M5 10 42.5 4 11 15.5 30 15 22 20 8 13.5 M3 M5, 1/8 11 5 15 17 36.5 11 Series VDW Glossary of Terms Pressure Terminology Others 1.

IDX-OM-W011

6-3 6-4 . 6-4 6-5 . 6-7 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 10-4 . 10-2 11 M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14

Modular F.R.L. Unit

Note 5) Separate interfaces are required for modular unit. Note 6) When N is specified in the end of part number of auto drain, applicable tube O.D should be 3/8". 11 F.R.L.

Booster Regulator/Air Tank

Rc 3/8 EXH: Rc 1/4 60 OUT (328) Tank OUT port Rc 1/2 278 180 170 4 x 11 32 32 Drain port Rc 1/4 120 180 312 460 Connected to VBA20A Connected to VBA22A Tank IN port Rc 3/8 Booster regulator IN port Rc 3/8 Booster regulator IN port Rc 3/8 EXH: Rc 3/8 EXH: Rc 3/8 (454) 442 (417) Tank OUT port Rc 1/2 (367) (367) OUT OUT 278 180 180 170 4 x 11 4 x 11 32 32 120 180 180 120 Drain port Rc 1/4 312