Vacuum Equipment

If the leakage volume is 30 /min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

Refrigerated Air Dryer

Refer to page 5 and 8. 4 Model determination Refer to page 2. Refer to page 5. 5 Selecting accessories sold separately.

SL5200

Sub-atmospheric (A): 100 mm Hg absolute to 30 psig (-88kPa to 0.2 MPa) Code Bonnet Standard Panel installation 5) 02 FV4 MV4 TW4 FV6 MV6 TW6 No code P 06 10 1 to 60 psig (0.007 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

CU

5 e y !1 Replacement parts: Seal kits Parts list Seal kit no. No. Description Cylinder tube Bore size Material No. of pcs.

MHK2

D 1 F MHKL 2 20 S D 1 F M9N Long stroke type Number of auto switches Number of fingers Nil S 2 pcs. 1 pc.

MHK2

8 Open 34 +1.2 0 5 13.5 16 0.02 70 68 46 30 32 0 0.2 32 Closed 16 4H9 depth 4 +0.030 0 18 44.5 20 27.6 0.05 73.5 Auto Switch Mounting Groove Dimensions 100 4-M4 x 0.7 (Thread for mounting attachment) M5 x 0.8 (Finger closing port) Auto switch mounting groove (2 positions) Adjustment needle for finger speed 3 15 S O 15 4 10 0 0.05 5 9 7.5 Note) For single acting, one port is used as a breather

CXT

CXT 12 16 CXT20 CXT25 CXT 32 40 Model Symbol Specifications -XB13 Shock absorber model Low speed cylinder (5 to 50 mm/s) RB2015 RB1411 RB1007 RB0806 Max. energy absorption (J) 58.8 14.7 5.88 2.94 Stroke absorption (mm) 15 11 7 6 Collision speed 0.05 to 5 m/s Max. operating frequency (cycle/min) 25 45 70 80 10 to 80C Ambient temperature Extended 8.34 6.86 4.22 1.96 Spring force (N) Retracted

COQ2BP

M1 0Xl.5 15 50 131 20 28 22 SO.6 44 B " M l 0)(1.5 M10)(I .S 63 138. 5 18 124 .5 SO.6 44 I. 8 Ml0Xl .5 15 20 30 22 " M12xl .75 M1 2x 1.75 lB 150 27 M1 6X2.0 21 80 168 22 38 28 64 56 18 10 10 0SM:: Series CDQ2BP High Magll8lic Field Resistance ," , [).P70 ' , D-~i4,,;'; ' ; ::~::Y_iidiz!C:::i Auto SWitch No.

LEKF-OMZ0035

GR-S-010 (10g) GR-S-020 (20g) -11- LEKFS Motor : Parallel (AC servo motor) Component Parts Description No. Description Material Note No.

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

) (44) W T R (Y) Z T 25 IN port 2-3/8 l=280 l=300 (V) (X) 2.5 (N) (U) E C D G Q S A C B L1 L2 16 L3 D side U side Stations 1 2 3 4 5 n 21 16 H H P=J (Pitch) OUT port n-1/4 n-1/8 2 5.5 : Thread type L dimensions (mm) n (stations) Model Dimension 4 3 5 9 2 6 10 7 8 138 103.5 172.5 310.5 L1 69 207 345 241.5 276 VV2CW2 150 115.5 184.5 322.5 L2 81 219 357 253.5 288 162 127.5 196.5 334.5 L3 93

MRQ

5 !6 !7 !8 !

3 Port Solenoid Valve Metal Seal Series VZ200 1

1 Sub-plate Assembly Part No.: VZ400-S!2 Mounting bolt and gasket are not attached. Carbon steel Round head combination screw !4 !5 !6 Pilot valve assembly !

180

Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.

Compact

10 0.06 ST 15, 20 0.04 0.04 ST 15, 20 0.04 ST 5, 10 0.02 0.02 0.02 ST 5, 10 0.00 0 5 10 15 0.00 0 5 10 15 0.00 0 5 10 15 Load [N] Load [N] Load [N] MXZ16 MXZ16 MXZ16 0.15 0.15 0.15 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 25, 30 ST 25, 30 ST 25, 30 ST 15, 20 0.10 0.10 0.10 ST 15, 20 ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5, 10 0.00 0 5 10 15 20 25

MLU

5 !6 !7 !8 !

CE

9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

Profile Design ISO/VDMA Air Cylinder Series CP95

accessories C, D, E and CR [mm] Mounting type C Mounting type D Bore E1 EW TG1FL l1 L I2 d1 CD MR d2 R1 E2 UB CB 32 45 26 32.5 22 5 12 5.5 30 10 9.5 6.6 6.5 48 45 26 40 51 28 38 25 5 15 5.5 35 12 12 6.6 6.5 56 52 28 50 64 32 46.5 27 5 15 6.5 40 12 12 9 8.5 64 60 32 63 74 40 56.5 32 5 20 6.5 45 16 16 9 8.5 75 70 40 80 94 50 72 36 5 20 10 45 16 16 11 11 95 90 50 100 113 60 89 41 5 25 10 55

tTV2000/3000

o 6 o o 0 5 -o l 50 75 100 Input signal %F S 0 2 5 5 0 7 5 Input signal %F S Relief flow characteristics suppty pressure:0 TMPa Flow rate characteristics supply pressure:0 TMPa Pressure characteristics set pressure: 0 2MPa 1 0 a $ o s b g 5 0 0 = ^ g u 5 ) 500 1000 1500 0 2 0 4 0 6 0 Flow rate /min (ANR) Supply pressure l\,4Pa Series |TV303I Hysteresis Repeatability Linearity 0 5 @ I ;9