Series 10-, 21- AF-A Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size a Mounting Nil Without mounting option B Note 3) With bracket + Option r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Note 7) p: For thread type: M5 and NPT only Note 8) c: Combination available for options: E1, E2, E3, E4. 4 Series ARP20/30/40 Specifications ARP20(K) ARP30(K) ARP40(K) Model Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Fluid Air Proof pressure 1.2 MPa Max. operating pressure 0.7 MPa Ex.) ARP30-02BG For 0.4 MPa setting 0.005 to 0.4 MPa Set pressure range Note 1) Ex.)

Speed Controller with One-touch Fittings Series AS In-line Type 1

M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D. Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10

Pressure Specifications: 0 [-0.1 to 1MPa (for high pressure)], One-touch Fitting Type: 04 (ø4mm, KJH04-M5), Option, Case Holder: B (With PPA-B), Unit Specification: M (Fixed in SI Unit)

Pressure Specifications: 0 [-0.1 to 1MPa (for high pressure)], One-touch Fitting Type: 04 (ø4mm, KJH04-M5), Option, Case Holder: B (With PPA-B)

Pressure Specifications: 1 [-101 to 10kPa (for vacuum)], One-touch Fitting Type: 04 (ø4mm, KJH04-M5)

Pressure Specifications: 1 [-101 to 10kPa (for vacuum)], One-touch Fitting Type: 04 (ø4mm, KJH04-M5), Option, Case Holder: B (With PPA-B)

Pressure Specifications: 2 [-10 to 100kPa (for low pressure)], One-touch Fitting Type: 04 (ø4mm, KJH04-M5)

Pressure Specifications: 2 [-10 to 100kPa (for low pressure)], One-touch Fitting Type: 04 (ø4mm, KJH04-M5), Option, Case Holder: B (With PPA-B)

(mm)Connection threadsModel M5 type R type16R 1/2KGH16-04

10

Bore size [mm] d H B C D (Drill through) Applicable split pin Clevis Knuckle CD-M03Note 1) 32, 40 10 0.040 0.076 44 36 4 3 3 x 18 l CD-M05Note 1) 50, 63 14 0.050 0.093 60 51 4.5 4 4 x 25 l CD-M08Note 1) 80, 100 22 0.065 0.117 82 72 5 4 4 x 35 l IY-12Note 2) 125 25 0.065 0.117 79.5 69.5 5 4 4 x 40 l CJP NT-03 32 M10 x 1.25 6 17 19.6 16.5 NT-04 40 M14 x 1.5 8 22 25.4 21 NT-05 50, 63 M18 x 1.5

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Clamp Cylinder with Lock Series CLK1

switch 12 32 207 (46) 276 (62) 346 (78) 415 (93) IN (691) 1.11 BMA2-032 BMA2-050 BMA2-063 BMA2-040 D-H7A1, H7A2, H7B, H7C D-H7NW, H7PW, H7BW D-H7LF, H7NF 378 (85) 504 (113) 630 (142) 756 (170) OUT (1260) 2.02 Solid state switch 16 40 318 (71) 424 (95) 530 (119) 636 (143) IN (1060) 1.70 588 (132) 784 (176) 980 (220) 1180 (265) OUT (1960) 3.14 Reed switch D-B53, B54, B64, B59W 20 50 BA-32 BA-04

Vacuum Ejector with Solid State Timer, Series ZMA

Ejector stations Port & silencer position 1 station 01 Right side Left side Both sides R L S 10 stations (Max.) 10 Note) Left and right as viewed with the VAC port in front Thread type Common exhaust port size 1/2 3/4 ZZMA dedicated silencer (ZZM-SA) 04 06 S Rc NPTF G Nil T F When placing an order, include the single type ejector models to be manifolded together with the manifold part

ZQ-OM01401

RL a 2 0.54~0.66Nm) 1 Ass'y P.27 1 2 L POM,POM,PET,SUS 3 R POM,POM,PET,SUS 4 () (PET) P.27 2 5 Assy PBT P.27 3 6 Assy () P.27 7 7 NBR P.27 4 8 NBR P.27 5 9 Ass'y P.27 6 26 - No.ZQ-OM01401-B 7.4 1 Ass'y2 ) ZQ1-SR1-04-A (1) 01 1 (1) 02 2 08 8 2 () (2 ) ZQ1-SE2-A 3 Assy (2 ) ZQ1-SC1-A 4 (10 ) ZQ-3-005-10AS 5 (10 ) ZQ-3-009-10AS 6 Assy (4 ) ZQ1-WS3-A (1) 3 M3 () (1) 4 M4 ()

IDX-OM-W011

9 K IDF6E/8E/11E/15E1 9-1 ( ) 9-2 1.6Mpa AD48-8-A-X2112 10 KQ2H10-02AS IDF6E/8E/11E/15E1-*-K N.O. () 0.151.6MPa IDF Series 9-1 9 1 IDX-OM-W011 9 K IDF-S1926 () 1 AD48-8-A-X2112 1 1) 2019 2 SERIAL No.XP AD48-8-X2110 IDF-S0086() SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S0529 1 IDF Series 9-2 9 2 IDX-OM-W011 10 L 10 L IDF4E/6E/8E/11E/15E1 10-1 ( ) 10-2 1.6MPaADH4000-04

IDX-OM-O004C

ILS FM OLR PTC OLR ILS PTC PTC CM PRS TB C11 C11 FM PRS P 6.4 2 6 3 7.A A 7.1 7.2 A (10) 7.3 7.4 IDF15E1-10/20-A m 3/min(ANR) 1) 50Hz 1.2 60Hz 1.3 10 1) ANR 65% 2) 7 1 8.C C 8 8.1 8.2 8.3 1) 2) 81 9.K K 9 9.1 ( ) 9.2 1.6MPa AD48-8-X2110 KQ2H10-02S 10 IDF15E1-10-K IDF15E1-20-K 1) IDF-S0086 N.O. () 1) IDF-S0002 1 9 1 10.L L 10 10.1 ( ) 10.2 1.6MPaADH4000-04

IDX-OM-Y002

Front panel Terminal connection screw: M5 (tightening torque: 2.6Nm) Crimp terminal width: 9.5mm or less) Applicable wire: 1.25mm2 or greater (to be connected to the user's equipment) L01,L02,L03Power supply Leakage display button Test button (gray) Earth leakage breaker with case 4) Connect the ground line.

IDX-OM-W014

2) IDU Series 7-1 71 IDX-OM-W014 8 K 8 K 8-1 ( ) 8-2 1.6Mpa AD48-8-A-X2112 10 KQ2H10-02AS IDU3E/6E/8E-*-K N.O. () 0.151.6MPa IDU Series 8-1 8 1 IDX-OM-W014 8 K IDF-S1926 () 1 AD48-8-A-X2112 1 1) 2019 3 2019 2 SERIAL No.XP AD48-8-X2110 IDF-S0086() SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S0529 1 IDU Series 8-2 8 2 IDX-OM-W014 9 L 9 L 9-1 ( ) 9-2 1.6MPaADH4000-04

IDX-OM-W023

2) IDU Series 7-1 71 IDX-OM-W023 8 K 8 K 8-1 ( ) 8-2 1.6Mpa AD48-8-A-X2112 10 KQ2H10-02AS IDU8E/11E/15E1-*-K N.O. () 0.151.6MPa IDU Series 8-1 8 1 IDX-OM-W023 8 K IDF-S1926 () 1 AD48-8-A-X2112 1 1) 2019 3 2019 2 SERIAL No.XP AD48-8-X2110 IDF-S0086() SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S0529 1 IDU Series 8-2 8 2 IDX-OM-W023 9 L 9 L 9-1 ( ) 9-2 1.6MPaADH4000-04