SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Large blow and

Fluid passage dia.: P R J K 2 x L H I O 4 x Sa Thread depth Sb G M N A D F Vacuum flow Dust bag When dust bag is mounted E T Suction air Suction air Discharge air B C C U Hose band V Note 1) (mm) A 158 B 70 C 50 D 20 E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q R 59 Sa Sb T 500 U 250 V 310 Model ZH30--X185 ZH40--X185 28.5 146.5 M4 x 0.7 10 203 90 64 25 27.2 33.5 196.8

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

Free flow Controlled flow Model Applicable cylinder bore size (mm) Effective area (mm2) Weight (g) Port size Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) AS2000E-01 AS2000E-02 AS3000E-02 AS3000E-03 AS4000E-02 AS4000E-03 AS4000E-04 90 1/8 1/4 1/4 3/8 1/4 3/8 1/2 3.8 250 5.2 340 20, 25, 32, 40 115 12.3 810 12.3 32, 40, 50, 63 810 130 40, 50, 63 80, 100 25.5 1670 25.5

VT317

VQ VKF Surge voltage suppressor mounting part (For G) VQZ VZ VS VFN Surge voltage suppressor Electrical entry G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire C Conduit JIS Symbol T Conduit terminal D DIN terminal Rated voltage 50 60 1 2 3 100 VAC, Hz 200 VAC, Hz 110 VAC, Hz 220 VAC, Hz 50 60 50 60 4 50 60 5 6 24 VDC 12 VDC 7 240 VAC, Hz 50 60 9 Other Option Manifold Accessory

SFOD-OMT0012

Parameter is not registered (0-901) E < Details > An alarm is generated when the step data is executed without step data setting. Download the step data to the controller. Turn off the main control and motor control power supplies. Step data is not registered (0-902) E < Details > System error occurred.

ITVH

factor [% F.S.] 2.0 0.5 Set pressure [MPa] Out 1.5 0.0 1.0 0.5 0.5 Return 1.0 0.0 0 25 50 75 100 0 25 50 75 100 Input signal [% F.S.]

5 Port Air Operated Valve

(No freezing) VZA Not required Lubrication Free Mounting orientation VFA VFA 300/50 Impact/Vibration resistance (m/s2) Note 1) Note 1) Impact resistance: No malfunction to axis and right angle directions of main valve, each one time when pilot signal ON and OFF.

NCRBIBwserbs

P(D Appendix e/How to caculate a rnomenl of ineriia .e@ Difilensions ..,,.,.,.,,.,.,,.,.,., C6 with Auto switch.-. e@ Auto Swilch DiagramgRolatron Into. ..

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 1.5 2 x M4 DIN rail clamp screw 9 e d i s U e d i s D n 8 7 6 5 4 3 2 Stations 1 9 60 37 26 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 8 For top ported 4 4 4 4 4 4 4 4 3 R 7.5 13.1 29.6 (49.4) P 1 2 2 2 2 2 2 2 2 81.5 66.9 P=11.5 One-touch fitting, thread piping

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

P(D Appendix e/How to caculate a rnomenl of ineriia .e@ Difilensions ..,,.,.,.,,.,.,,.,.,., C6 with Auto switch.-. e@ Auto Swilch DiagramgRolatron Into. ..

CEx-OMI0064

NO. 19 NO. , 26 , 41 - 10-2 CEU5 , ROM , , ,SMC RAM , ,SMC 2ROM E ,, , , 2ROM E 2ROM 80 E , , ,SMC , 42 -

Rotary One-touch Fittings Series KS/KX

Model r e b m u N A f o t r o P l e d o M g n i t r o P e z i s t r o P B e z i s t r o P A c i r t e M " 2 3 / 5 " 4 " 4 / 1 " 6 " 6 1 / 5 " 8 t r o P A t r o P B h c n I 1 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 0 1 , 6 6 1 / 5 8 8 / 3 0 1 2 / 1 2 1 2 1 M K h c u o t e n O g n i t t i f d a e r h t T P N 0 1 , 6 4 / 1 T P N ) T P ( c R 4 / 1 d a e r h

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

MHT2

Bore size 32 mm 32 40 mm 40 50 mm 50 63 mm 63 Action Double acting D Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

MHT2

0 Description Main parts Replacement Parts MHT2-32D MHT2-40D MHT2-50D MHT2-63D Finger assembly MH-TA3201 MH-TA4001 MH-TA5001 MH-TA6301 wo Lever assembly MH-TA3202 MH-TA4002 MH-TA5002 MH-TA6302 e <32, 40> weryio Link parts assembly MH-TA3203 MH-TA4003 MH-TA5003 MH-TA6303 <50, 63> werio CDQ2A32-15D CDQ2A40-15D CDQ2A50-20D CDQ2A63-20D Compact cylinder !

VQC

Bore size Series CJ2 Pressure 0.5 MPa Load ratio 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm Series MB, CA Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load ratio 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQC1000

IDX-OM-W029

) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) 6-3 IDU22E75E A B (G) (D) E (F) C (10, (10 1m) 1m) J K L2 N1 M P 13 4x H (911)[] 911)[] mm A B C D E F G H J K L M N P IDU22E R1 325 775 1153 93 445 1235 279 353 600 379 46 85 IDU37E R11/2 360 1258 64 550 1350 290 388 680 414 50 13 IDU55E 855 1345 1440 R2 470

Table of Contents - Tubing

(Example) 10-TFU0425B-2 TFU0425-2-50 (100)-X3 TFU0425-3-50 (100)-X3 TFU0604-2-50 (100)-X3 TFU0604-3-50 (100)-X3 TFU0805-2-50 (100)-X3 TFU0805-3-50 (100)-X3 2 3 2 3 2 3 4 2.5 6 4 8 5 50m or 100m roll B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Transparent), YR (Orange) TUB-12 Clean Tubing: Polyolefin Tubing How to Order Designed to be used for blow-off and washing

Compact Cylinder Series NCQ8

B 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") 0.34 0.20 4-E 0.34 0.25 0.50 0.25 0.50 0.34 0.53 0.34 0.66 0.41 B Rear screw clearance hole / NC(D)Q8M(Z) (Inch) Symbol Bore E B 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") 0.34 0.20 4-E 4-E 0.34 0.25 0.50 0.25 0.50 0.34 0.53 0.34 0.66 0.41 B Through screw clearance hole / NC(D)Q8N(Z) (Inch

Series LQ3 High Purity Fluororesin Fitting

M L K J H E t W1 W2 M 14 20 25 29 37 49 58 69 89 100 117 136 14.5 20.5 24.5 30.5 36.5 48.5 6 7 7 9 9 10 11 16 21 24 32 41 10 17 22.5 24.5 27 30 16 21 26 32 41 50 17 24 28 36 43 55 8 8 8 8 13 13 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3P1A LQ3P2A LQ3P3A LQ3P4A LQ3P5A LQ3P6A 1/4 (E) (E) L Panel Aperture (K) Straight Union : LQ3U (mm) Inch Size H Model Tubing O.D.