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motor power supply input terminal (U, V, W) to the driver power terminal (U, V, W) Connect the motor ground terminal to the driver ground terminal.

CBG1A Air cushion type CBG1N40-PS CBG1A25-PS Locking at both ends CBG1A32-PS CBG1N20-PS-W CBG1A40-PS 20 25 32 40 CBG1N20-PS-W CBG1N25-PS-W CBG1N32-PS-W CBG1N40-PS-W Above no. @5, @6, @7, @8. And a grease pack.

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.

(mm) (mm) Stroke 15 20 30 40 50 75 10 25 5 100 20 30 20 15 15 17.5 25 Y 12.5 15 17.5 20 Q 20 20 30 20 68 70.5 68 68 68 70.5 80.5 83 75.5 E 70.5 MRQFS40SMRQ40, #3 (Flange only) 1.5-15 Series MRQ Made to Order Specifications -X1 to X5 Consult SMC for the detailed specifications, dimensions and delivery.

(5/32) N7T (1/4) M5 (M5 thread) 2 stations: 68 Addition per 1 station: 20 1/8 NPTF Top VQZ2 2 VQZ200 2 to 20 stations VV3QZ22N7T (1/4) N9T 5/16) N11T (3/8) 1/4 NPTF 2 stations: 114 Addtion per 1 station: 37 1/4 NPTF Top VQZ3 2 VQZ300 2 to 20 stations VV3QZ32How to Order / Manifold Assembly (Example) D side U side 1 3 4 5 Stations 2 VQZ212-5M-N7T 4 pcs.

Compact Hydraulic Cylinder Double Acting/Double Rod Series CHQWB 20, 32, 40, 50, 63, 80, 100 3.5MPa How to Order B B 50 30 D CHQ CHDQ 50 30 A72 D W W With Auto Switch With auto switch (built-in magnet) Number of auto switches 2 pcs. 1 pc. "n" pcs.

Refer to "3.5 Pairing" for details on pairing. (2) Click [FCS Setting]. -27No.EX##-OMV0017-D Set using the [Frequency Channel Select Window]. (1) (2) (1) W-LAN Channel indicators The W-LAN indicators make it possible to select frequencies corresponding to W-LAN channels at one time. * In the example above, W-LAN Channel: CH.10 is selected. (2) W-CH indicators The W-CH indicators make it possible

/30 How to Order Valves (Single Type) VD W 2 1 1 G 2 01 For water, air and vacuum Series Option 1 2 3 10 20 30 None Foot type bracket Nil F Note) Foot brackets are packed with valves.

W B D-A9, D-A9V D-M9, D-F9W D-M9V, D-F9WV Bore size (mm) B A W A B W A 10 16 20 25 32 0.5 7.5 2.5 7.5 16.5 3 12.5 16.5 1.5 (1) 0 8 1.5 8 20 4 16 20 2 (0.5) 2 10 0 10 24 6 20 24 4 (1.5) 3.5 11.5 1.5 11.5 26.5 7 22.5 26.5 5.5 (3) 4.5 12.5 2.5 12.5 27.5 8 23.5 27.5 6.5 (4) Note 1) Figures in the table above are used as a reference when mounting the auto switches for stroke end detection.

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

(REFRIGERANT) IDF60-20) W R 0001 (2018 4 ) W R 0001 2018 2019 2020 2021 W X y Z 1 2 3 4 o P Q R o 1 Z 12 A Z IDF60/70/80/90 Series 1-5 IDX-OM-W093 1.3 HFC 1-5 IDF60/70/80/90 Series 1-6 IDX-OM-W093 1.4 / 1 1.5 () IDF60/70/80/90 Series 1-7 IDX-OM-W093 IDF60/70/80/90 Series 1-8 IDX-OM-W093 2 2.1 IN OUT (ONOFF ) 6-4 6-4 IDF60,70,80,90-20 IDF60,70,80,90-30 AC200V AC200V L1 L2

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

NVFR2l00 NVFR22C)0 NVFR2300. 2400. 2sO0 Gasket NBR AXr624-20-2 AXr624-20-2 N{r624-20-2 Valve mounting bolt Steel AXr624-26 (M3X31) AXT624-26 (M3X31) AXI624-26 (M3X31) @ Pilot Ass'y Refer to "Pilot Operalor Ass'y/How to Order" on page 8. Series NVFRzOOO:Base Mounted Tlpe Pilot Operatar Ass'g/How to Order NVFR2000 Series enty and lndicat!

Without brake C section Brake electric circuit YellowC;*1 Y e l l o w O Y !

Connect the motor power supply input terminal (U, V, W) to the driver power terminal (U, V, W).

IDX-OM-W011-B / Series IDF1E/2E/3E-10(-A,C,S) IDF3E-20(-A,C) IDF4E-10(-A,C,L,M,R,S,T) IDF4E-20(-A,C,L,M,R,T) IDF6E-10(-A,C,K,L,M,R,S,T) IDF6E-20(-A,C,K,L,M,R,T) IDF8E-10(-A,C,K,L,M,R,S,T) IDF8E-20(-A,C,K,L,M,R,T) IDF11E-10(-A,C,K,L,M,R,S,T) IDF11E-20(-A,C,K,L,M,R,T) IDF15E1-10(-A,C,K,L,M,R,S,T) IDF15E1-20(-A,C,K,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded

If the leakage volume is 30 /min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.