AC

(01) Y31-02 (01) Y41-03 (02) Y51-03 (02) T type interface (3) Pressure switch VHS2000-01 02 02 03 VHS302 03 VHS3000VHS402 03 04 Y24-01 02 Y34-01 02 Y34-03 02 Y44-02 03 Y54-03 04 Residual pressure exhaust 3 port valve Cross interface Y30 Y40 Y50 B210T B310T B310T B410T B510T T type brcket Y20 Y30 Interface G46-10-02 G36-10-01 G36-10-01 G36-2-01 G36-10-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02

5 Port Solenoid Valve SY Series

SY3120-C6 SY3140-01 T0604 x 1 m T0806 x 1 m AS3001F-06 T0604 x 1 m T0806 x 1 m AS3001F-08 AS3001F-06 SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075 x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

ZSE2/ISE2

ZSE2-01-15CN1 pc. ZS-10-5 A-501 pc.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

(Z/ISE20B) * For tubing, please use the SMC TU0425 (polyurethane, O.D. 4, I.D. 2.5) for the pressure switch.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Power saving circuit is only available in the "Z" type.

ZSE1/ISE1

ZSE1-01-15CN1 pc.

Modular Type Regulator Series AR

type GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Pressure gauge G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 Round G46-2-02 G46-2-02 0.2MPa Note 4) Square embedded type GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

7ND9071en

Not applicable to 6. sign "X", "X7", "Z", "U" and "E4". Omron D2VW-01, gold plated contacts, 100 mA 30 V DC / 125 V AC. Temperature range: -40 to +85 C / -40 to +185 F. Not applicable to 6. sign "X", "X7", "Z", "U" and "E4". FOUNDATION fieldbus and Profibus Uo(Voc) = 5.0V, Io(Isc) = 17.8mA, Po = 22.2mW, Co(Ca) = 10nF, Lo(La) = 10H. K06 G Exhaust adapter.

125

With light/surge voltage suppressor Electrical entry for D DC AC Nil None S With surge voltage suppressor Z With light/surge voltage suppressor * DOZ is not available. * There is no S option for AC mode, since a rectifier prevents surge voltage generation. 1725 VEX3 Series Specifications Model Body ported VEX312-01 02 VEX33202 03 04 Base mounted VEX322-01 02 VEX34202 03 04 Operation

F

1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 B O D Y S I Z E 1 M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard T H R E A D P O R T S I Z E M5 ...M5 U01 ..1/8 U02 ..1/4 U03 ..3/8 U04 ..1/2 U32 ..10-32UNF 01 ... 1/8 02 ... 1/4 03 ... 3/8 04 ... 1/2 W I T H O N E-T O U C H F I T T I N G S T Y P E 2 Elbow 3 Universal C O N T R O L M E T H O D 0 Meter Out 1 Meter In Courtesy of Steven

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

F

Applicable Connection Model H (Width D L1 L2 M Effective Tube OD mm Thread Across Flats) Orifice (mm 2) Uni Thread Nylon 4 1/8 KQF04-01 14 10 27 11 16 5.6 4 1/4 KQF04-02 17 10 31 14 16 5.6 6 1/8 KQF06-01 14 12 27.5 11 17 13.1 6 1/4 KQF06-02 17 12 31 13 17 13.1 6 3/8 KQF06-03 19 12 33.5 15 17 13.1 8 1/8 KQF08-01 14 14 29 11 18.5 26.1 8 1/4 KQF08-02 17 14 32.5 13 18.5 26.1 8 3/8 KQF08-03 19

Micro Mechanical Valve Series VM1000

Red VM131-01-35RA VM151-01-35RA VM131U-01-35RA VM151U-01-35RA VM133-M5-35RA VM153-M5-35RA Black VM131-01-35BA VM151-01-35BA VM131U-01-35BA VM151U-01-35BA VM133-M5-35BA VM153-M5-35BA Green VM131-01-35GA VM151-01-35GA VM131U-01-35GA VM151U-01-35GA VM133-M5-35GA VM153-M5-35GA Yellow VM131-01-35YA VM151-01-35YA VM131U-01-35YA VM151U-01-35YA VM133-M5-35YA VM153-M5-35YA Note 1) It is possible

ZP

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

ZP

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

Nozzle Type Ionizer

Ionizer Ozone monitor 300 Fig. 2: Ozone condensation measuring circuit 9 Nozzle Type Ionizer IZN10E Series How to Order Energy saving static neutralization nozzle 01 P IZN10E 06 Z B1 High flow rate nozzle Female threads for piping High frequency AC nozzle type Bracket Nozzle type Symbol Type Part no.

Booster Regulator/Air Tank

VBA10A-N02 VBA10A-T02 : when -Z VBA43A-N04 VBA43A-T04 : when -Z G27-20-01 G27-P20-01-X30 AN20-N02 VBA20A-N03 VBA20A-T03 : when -Z VBA40A-N04 VBA40A-T04 : when -Z VBA22A-N03 VBA22A-T03 : when -Z VBA42A-N04 VBA42A-T04 : when -Z VBA11A-N02 VBA11A-T02 : when -Z Model ITVH Description ITVX Pressure gauge : when Nil Pressure gauge : when -Z Note 4) G36-10-N01 G36-P10-N01-X30 AN30-N03 ANA1-N03

Smooth Cylinder/Low Speed Cylinder

ND hole H10 Axis d9 MM NX2 H A L R2 U2 Z (Min.)