VCA

= 28.5 24.5 12.5 OUT port n-1/4 25 19.5 Mounting valve: for conduit terminal (P = 34.5) Side ported: L1 = n x 28.5 + 10.5 L2 = n x 28.5 + 20.5 Front ported: L1 = n x 28.5 + 50.5 L2 = n x 28.5 + 60.5 Dimensions (mm) L n 8 238.5 248.5 278.5 288.5 9 267 277 307 317 10 295.5 305.5 335.5 345.5 3 96 106 136 146 4 124.5 134.5 164.5 174.5 5 153 163 193 203 6 181.5 191.5 221.5 231.5 7 210 220 250

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Sensors (R) (P) 7.4 3 (13) M plug connector (M) L plug connector: 10-VQD1151-L-M5 M plug connector: 10-VQD1151-M-M5 5 5 5.5 2(B) 4(A) Direct manual override Lead wire length 300 mm 27 Indicator light 17.6 11.2 3 3(R) 9 0.3 3.8 10.9 3.5 5.5 9.1 2 x mounting hole 33.5 28.5 37 38 1(P) 1(P) 5.5 12 4-M5 x 0.8 13 L plug connector (L) (P, A, B, R port) 49 50.5 M plug connector (M) 598 4 Port Direct

Pulse Valve

port 1/8, 1/4 (Rc, NPT, G) 2 x P Port size 2 x P Port size F E F E D D C B C B Port size: Size 14 A A ( 52) ( 52) (20) (20) Silencer (Option) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot port 1/8, 1/4 (Rc, NPT, G) Exhaust port 3/8 Exhaust port 3/8 2 x P Port size 2 x P Port size F E F E G G D C B D C B 20 20 Dimensions [mm] Model Port size P A B C D E F G JSXFAF-06 3/4 74 55.5

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

Body oplion %NPTF subplate O :lndividual pllot exhaust I t -43 W 3:Common exhaust for main and pilot valve I :Without subolate 'ubplate ' -x-jr.,T3,l#:' G:Grommet(std.)

Compact Guide Cylinder

position) (Mounting hole position) X 4 x YY depth YL Section XX Bottom view 4 x OA through 4 x NN through 4 x MM depth ML L 2 x Counterbore diameter OB, depth OL WA Z XAH9 XB Section XX Section XX XA XL XC HA: T-slot for hexagon bolt Section XX details X 0.02 R T X 0.02 DB DA H VA VB U X PW b a e d c T-slot dimensions 2 x P XAH9 depth XL 2 x P (Plug) XAH9 depth XL S Q G J K PB GB GA [mm]

Title not found

Body oplion %NPTF subplate O :lndividual pllot exhaust I t -43 W 3:Common exhaust for main and pilot valve I :Without subolate 'ubplate ' -x-jr.,T3,l#:' G:Grommet(std.)

CYP

G 6.5 8.5 H 45 75 HA 19.5 39 HB 8.5 19 HG 8.5 19 HI 23 39 HL 38.6 64.9 HP 44 73.5 HS 27 49.5 HT 19.5 39 J M6 x 1 M10 x 1.5 JK 10 12 K 21 20 Model +0.030 0 +0.030 0 CYP15 CYP32 LD 5.6 8.6 LW 69 115 MM M4 x 0.7 M6 x 1 M 6 8 P M5 x 0.8 Rc 1/8 N 4.5 7.5 PA 25 50 PB 60 100 Q 105 138 QW 48 87 R 45 79.5 T 23 29 TA 13 17 TB 18 22 W 69 115 WA 32 46 WB 17 27 Y 2.5 3.5 Z 118 155 L 67 90 Model CYP15

RB/RBL/RBQ

C J G5-S Material: Carbon steel Material: Polyurethane (mm) (mm) (mm) CV MM A B M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 B 3.5 4.5 5 6 6.6 C 22 27 32 41 41 h1 25.4 31.2 37 47.3 47.3 C 4 8 8.3 11.3 13.1 C 22 27 32 41 41 B 6 6 6 6 6 h M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 MM Part no. Part no. Part no.

240

Hard anodized Chromated Countersunk head screw Nut Rod seal Piston seal Gasket Plug Nickel plating Nickel plating Zinc chromated D-X 23 MXH Series Dimensions: 6 LT 9 15 LA LB 8 J x M3 x 0.5 Depth 5 3 x M4 x 0.7 through Pilot hole dia 3.3 2 x 3 x 6 counterbore depth 3.3 2 x 2 x M5 x 0.8 Cylinder port (With plug for port) 4 x M3 x 0.5 Depth 5.5 2 x M5 x 0.8 Cylinder port 4 x M3 x 0.5 Depth

Series VQ Metal Seal/Rubber Seal Body Ported

P kit F kit T kit PS (Side entry) FS (Side entry) Note 1) S kit is composed of a flat cable housing assembly (AXT1002PU20) of q SI unit and w P kit (20 pin).

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

63 80 100 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 19.5 27 32 32 37 37 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 4 4 5 5 5 5 16 16 16 16 16 16 15 21 21 21 30 30 6 6 7 7 10 10 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 45 52.5 59 64 76.5 86 33.5 38.5 45 50 62 71.5 47 51 58 58 72 72 21 27 27.5 28.5 37 37 13 14 15.5 16.5 19 19 13 13 14 14

MRQ

F1 = X A1 X P . (1) F2 = X A2 X P . (2) 4 A1 = D2 . (3) 4 A2 = (D2 d2) . (4) F1 = Cylinder force generated on the extending side (N) F2 = Cylinder force generated on the retracting side (N) = Load rate A1 = Piston area on the extending side (mm2) A2 = Piston area on the retracting side (mm2) D = Tube bore size (mm) d = Piston rod diameter (mm) P = Operating pressure (MPa) While not

IDG

for purge air discharge (Option: P) u t e q IN OUT i } r w y HA Purge air for dehumidification Purge air for dehumidification AT ID AMG Component Parts AFF Material Description No.

rep-filter-e

Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure P.460 FGD Vessel Series P.461 FGE Vessel Series P.463 FGET Vessel Series P.466 FGG Vessel Series P.468 FGA Vessel Series P.472 FGB Vessel Series P.476 FGC Vessel Series P.478 FGF Bag Filter P.480 FGH High Precision Filter for Liquids P.482 FQ1 Filter for Cleaning Fluid/Quick Change Filter P.483 FN1FN4

Industrial Filters Replacement Procedure

Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure P.460 FGD Vessel Series P.461 FGE Vessel Series P.463 FGET Vessel Series P.466 FGG Vessel Series P.468 FGA Vessel Series P.472 FGB Vessel Series P.476 FGC Vessel Series P.478 FGF Bag Filter P.480 FGH High Precision Filter for Liquids P.482 FQ1 Filter for Cleaning Fluid/Quick Change Filter P.483 FN1FN4

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

For notes w and e, refer to the left. 4B/6B 870 M20 X l 500 AMD1000 w When the element has reached its replacement interval, replace it immediately with a new element.

Compact Electric Actuator Series LG1

MC NFB Servomotor HC-PQ Power supply Single phase 200VAC (Type A) or Single phase 100VAC (Type A1) C P U L1 U V V W Servo amp SM L2 W MR-CA E or MR-CA1 The length of the cable between the controller and servo amp is 2m or less.

Digital Flow Switch For Air/Water Series PF2A/PF2W

Real-time switch output Unit switching Hysteresis mode ON For Air YES OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l Real-time flow rate "P" Window comparator mode H : Hysteresis CFM x 10-2 x CFM x 10-1 ft3 x 10-1 H H CFM = ft3/min ON High Flow Rate Type (For Air) NO OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 Real-time flow rate OUT1

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

(port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP

Square Tube Type Air Cylinder Series MB1

D e D e Effective thread Effective thread 13 13 ZZ + 2 strokes S + Stroke 9 A K f N N f h + Stroke K A l + Stroke 9 l h Without air cushion S ZZ Stroke range Bore size (mm) Effective thread length Width across flats C B MB J K MM N P V W S ZZ A D Ee11 F G H 32 40 50 63 80 100 32.5 38 46.5 56.5 72 89 84 84 94 94 114 114 13 14 15.5 16.5 19 19 4 4 5 5 5 5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25