Rated Pressure Range: -0.1 to 1 MPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)]

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: F02 [G1/4, (M5, Female Threaded)]

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: B2 [TSJ1/4 (Compression Fitting)]

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: -, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: -, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: B2 [TSJ1/4 (Compression Fitting)], Piping Direction: -, Lead Wire: -, Bracket: -, Operation Manual: -

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

0 o i y t r e w q o VXZ u VXE t VXP y !3 !2 VXR r e w !1 i w VXH u VXF !4 q w w 1 (IN) 2 (OUT) 1 (IN) 2 (OUT) VX3 VXA VCH VDW Component Parts Component Parts VQ Material No. Description No.

Booster Regulator Series VBA1110 to 4200 1

2 VBAT10-Y-2 Accessorys part no.

1

When the energizing of the solenoid coil q is canceled, the armature assembly t is separated from the core w side by the reactive force of the spring y, thus closing the poppet. 4 XSA Series Dimensions: Face Seal Fitting, Compression Fitting Grommet: G Face seal fitting Compression fitting D 300 G F C H P Fitting size E 2 1 1 2 (L) A Bs Spacer B (Face seal fitting) (B) (Compression fitting

Series SV

3-position 0 3 Regulator port P port A port (P port control type A port regulated) B port (P port control type B port regulated) P P port A port (P port control type A port regulated) B port (P port control type B port regulated) P Option A1 A1 With pressure gauge (for odd no. station) With pressure gauge (for even no. station) Without pressure gauge 05 B1 B1 Option 06 00 M1 With pressure

S

A P P L I C AT I O N H O W T O O R D E R (N)VM400 V A LV E M E C H A N I C A L O P E R AT I O N Basic Roller Lever VM-01A Polyacetal roller Roller Lever VM-01AS Hardened Steel Roller One Way Trip VM-02A Polyacetal roller One Way Trip VM-02AS Hardened Steel Roller Straight Plunger VM-05A Roller Plunger VM-06A Polyacetal roller Roller Plunger VM-06AS Hardened Steel Roller Cross Roller Plunger

HAW

IDFB ID IDG Pressure drop = = (0.7 + 0.1013) x P P1 + 0.1013 0.8013 x 0.0065 0.3 + 0.1013 = 0.013 MPa AMG AFF Construction AM HAW2/7 HAW22 to 110 Air inlet Air outlet AMD q w e u r i t Air outlet Air inlet AMH Cooling water outlet Cooling water outlet AME Cooling water inlet Cooling water inlet AMF SF SFD Drain y y LLB Note) Chart shows HAW22 to 75.

RB/RBL/RBQ

e r t y u i o !

RB/RBL/RBQ

e r t y u i o !

A-HEC-OM-J004

Space Minus ASCII code 41H 42H 43H 44H 45H 46H 47H 48H 49H 4AH Character used A B C D E F G H I J ASCII code 4BH 4CH 4DH 4EH 4FH 50H 51H 52H 53H 54H Character used K L M N O P Q R S T ASCII code 55H 56H 57H 58H 59H 5AH Character used U V W X Y Z 7.4 Communication 7-18 A_HEC-OM-J004-4 Chapter 7 Appendix 7.5 Performance Chart The values shown on the performance chart are representative and

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port location Nil.

Valve Single Unit

Stations W = 39n + 83 W = 48n + 99 W = 67n + 118 W = 88n + 151 W = 109n + 174 Socket: 26 pins MIL with strain relief (Conforming to MIL-C-83503) +COM (Type 41P, 42P), COM (Type 41N, 42N) 12, 24 VDC Applicable flat ribbon cable connector Internal wiring (2) Rated voltage Note 1) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

y Note Component Parts Material No.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

y Note Component Parts Material No.