KA

KAU23-M5 38 9.6 15.5 34.5 9 M5 X 0.8 M6 X 1.0 2.2 2.2 10 38.5 3.4 2.9 11 3.2 9.6 1 8 KAU23-M6 KAU23-U01 11 39.5 KAU04-M5 4 M5 X 0.8 M6 X 1.0 2.2 2.2 KAU04-M6 10 11 16 10.4 36 10.4 40 4 1 8 KAU04-U01 4.2 4.2 11 1 4 KAU04-U02 42 16 14 42.5 KAU06-M5 M5 X 0.8 M6 X 1.0 39 2.2 2.2 12 KAU06-M6 43 13 17 12.8 1 8 3 8 KAU06-U03 46 45 43.5 39.5 17 14 12.8 KAU06-U01 13 6 1 4 39 KAU06-U02

Antistatic One-touch Fittings Series KA

M5, M6 M5, M6 KAU23-M5 38 9.6 15.5 34.5 9 M5 0.8 M6 1.0 2.2 2.2 10 38.5 3.4 2.9 11 3.2 1 8 KAU23-M6 KAU23-U01 11 9.6 KAU04-M5 M5 0.8 M6 1.0 39.5 4 2.2 2.2 KAU04-M6 10 11 16 10.4 36 10.4 40 4 1 8 KAU04-U01 4.2 4.2 11 1 4 KAU04-U02 42 16 14 KAU06-M5 M5 0.8 M6 1.0 42.5 39 2.2 2.2 13 KAU06-M6 43 13 17 1 8 KAU06-U01 3 8 KAU06-U03 46 45 43.5 12.8 39.5 17 14 12.8 14 6 Uni thread 1 4 KAU06-U02 39

IDX-OM-U022

() IDFA100F150F i 7 i.3 IDX-OM-U022 1. 1.1 i.2.9 1 2 IDF100FA-40 C.RV IDFA100F-40-CRV.

ARM10/11

Panel Display cover Display cover Panel nut 14-4-40 23 Series ARM10 Regulator Single Unit Type 5. Unit representation 4.

ARM10/11

Panel Display cover Display cover Panel nut 14-4-40 23 Series ARM10 Regulator Single Unit Type 5. Unit representation 4.

Slide Tables MX Series

Lateral Mounting (Through Holes) Lateral Mounting (Tapped Holes) l1 12.7 15.6 20.6 24.0 l1 12.7 15.6 20.6 24.0 l 9.4 11.2 16.2 16.0 Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Max. fastening torque in lb (N m) Bolts M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 Model MXH6 MXH10 MXH16 MXH20 22 (25) 45

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

thread) 76 73 120 80 120 A 54 Finger opening port M5 x 0.8 14 Finger closing port M5 x 0.8 M5 x 0.8 M5 x 0.8 25 25 Finger closing port Finger opening port 4 x M5 x 0.8 thread depth 10 M5 x 0.8 thread depth 5 Vacuum suction port (A, B common view) +0.02 0 2 x 5 depth 10 52 Auto switch mounting groove 16h9-0.043 0 (A, B common view) 22 35.8 2 70 (76) 10 2-3 3.8 4.7 47 25.5 11.5 2 x 4.2 2 4

AR20-B to AR60-B

Applicable Model Model AR10 Port size M5 AR 10 X406 M5 A 0.4 MPa setting w q Option/Semi-standard: Select one each for a to f. Option/Semi-standard symbol: When more than one specification is required, indicate in alphabetic order.

3 Way Direct Acting NVKF 300 Series

(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

NVKF

(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

VCB

81.5 1/4, 3/8 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 VCB31 30 50 86 1/2 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27

VCB

19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Series VCB Model Selection

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Two switch spacers are included with the product with built-in magnet. 906 Rotary Actuator 11-CRA1-Z Dimensions: Basic Type, 11-CRA1S30 Size: 30 Single shaft Double shaft 75 10 8 6 0 0.2 8 (g6) 7.8 0 0.2 28 Auto switch 8 x M5 x 0.8 depth 6 (Opposite side 4 locations) 28 40 4 x 6 (Mounting hole) 9 16 0 0.1 8g6 9.2 14 3 M5 x 0.8 (Vacuum suction port) 0 0.025 3 2 x Cushion valve (Width across

Quick Exhaust Valve Series AQ 1

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1110 B Diaphragm Valve for Ultra High Purity Air operated type Series AZ3542 & 4542 Dimensions inch (mm) AZ3542 & 4542 Ports: 2PW (Welded) Ports: 2P (Machined) M5 x 0.8 Actuation port Actuation port M5 x 0.8 1.57 (40) 1.57 (40) FORGED BODY BAR STOCK BODY Note) 2.24 (57) 2.24 (57) 0.44 (11.2) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A

3 Port Air Operated Valve Series SYJA300 1

Flow Characteristics/Weight Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Weight (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 45 N.O. M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Series ANA1 Page 5-10-8 40 dB (A) 30 m High noise reduction type Series ANB1 has a larger effective area with the same port size as Series ANA1.

Short Stroke Electric Actuator Series LX

(B contact) mm Standard stroke 25 0.8 50 1.0 75 1.1 100 1.2 5 to 40 (with no condensation) 3 (2) horizontal Note 1) N.C. (B contact) Body weight kg N.O. (A contact) N.C.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(mm) Bore size A B C D F GA GB H MM NA NB NDh8 NN S Z 10 15 12 14 4 8 8 5 28 M4 x 0.7 12.5 9.5 8 0 0.022 M8 x 1.0 46 74 16 15 18.3 20 5 8 8 5 28 M5 x 0.8 12.5 9.5 10 0 0.022 M10 x 1.0 47 75 Single foot (L) CJ2YL Bore size Stroke Head cover port location Z Mounting nut Rod end nut Piping port 2 x M5 x 0.8 GB NN F GA Cover surface MM C D 0 0.3 LY LB B LH 0 0.3 B LX LT Piping port M5 x 0.8

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Pulling force (N) Stroke (mm) Bore size (mm) Rubber cap Thread size 2 20, 25, 32 M2.5 x 0.45 x 25 or more 4.9 40, 50, 63 M3 x 0.5 x 30 or more 10 3 80, 100 M5 x 0.8 x 40 or more 24.5 3 Remove the bolt for normal operation. It can cause lock malfunction or faulty release. 2. Manual release, Lock type While pushing the M/O knob, turn it 90 counterclockwise.