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Various units 19 5.1 Switch block unit 20 5.2 Vertical auto switch unit 20 Part number for Auto switch unit 22 How to mount Auto switch unit 22 5.3 Angle adjustment unit 22 Part number for Angle adjustment unit 25 Mounting of angle adjustment unit 25 5.4 Joint unit for combining switch unit and angle adjusting unit 27 6.

/ [Nm] L[mm] [mm] LEY 16 M81.25 12.5 12 14 LEY 25 M141.5 65.0 20.5 17 LEY 32 M141.5 65.0 20.5 22 [mm] [mm] [mm] LEY 16 13 5 5 LEY 25 22 8 8 LEY 32 22 8 8 / [Nm] L[mm] LEY 16 M40.7 1.5 5.5 LEY 25 M50.8 3.0 6.5 LEY 32 M61.0 5.2 8.8 / [Nm] L[mm] LEYD LEY 16 M40.7 1.5 7 LEY 25 M50.8 3.0 8 LEY 32 M61.0 5.2 10 -44- LEYG / [Nm] [mm] M L M50.8 3.0 8 LEYG16 4 M L M61.0 5.2 11 LEYG25

Note 3) When the rod is extended, the clamp stroke and rotary stroke are added to the appropriate dimensions. 4.1-18 Rotary Clamp Cylinder/Heavy Duty Series MK2 32, 40, 50, 63 MK/MK2 RSQ/RSG RSH CE1 CE2 ML2B Rear flange With arm Model E D C B G A C F A B F G D E Model ML1C 39 46 58 57.5 45 45 65 65 20 20 22 22 67 67 88 88 18 18 22 22 48 54 67 80 5.5 5.5 6.6 9 8 8 9 9 65 72 89 108 25 25 40

22 14 14 1 1 25 25 25 25 1/8 2-3/8 1/4, 3/8 X (PE) port 1/8 R1, R2 port 2-3/8 P Port 1/4, 3/8 X(PE) port P port 3-10-8 9 ISO Standard Solenoid Valve: Size 1 Metal Seal/Rubber Seal Series VQ7-6 Prewired Connector Type 2 position single : VQ7-6-FG-SSC single (Reverse pressure): VQ7-6-YZ-SSC 120.5 120.5 68.5 52 Mounting hole 2-6.5 68.5 50 50 Manual override 42.5 42.5 13 (A port) 13 (B port)

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

VX Manifold Series VVXA21/22 VNl Normally Closed (N.C.), Normally Open (N.O.) VQ Refer to p.4.1-64, 4.1-65 for specifications and models.

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 7 3 Position Cylinder Series RZQ Construction 13 24 21 3 2 1 6 4 8 7 10 19 22 20 12 23 11 9 5 23 18 14 16 17 15 22 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 No. 13 14 15 16 17 18 19 20 21 22 23 24 Note Note Description Material Description Material Hard anodized Aluminum alloy

/N.O. 1/2 to 2 N.C. 1/4 to 1/2 10 to 50 20 to 50 10 2 Port for Dust Collector (Solenoid type, Air Operated type) Air Operated 2/3 Port VXF21/22, VXFA21/22 VXA21/22, VXA31/32 For Air For Air, Vacuum, Water, Oil The VX series has been renewed as the new VX series, with a new construction Orifice size mm Valve type Port size Orifice size mm 3 to 10 1.5 to 4 Valve type Model Port size VXA21/22

Refer to the specifications of actuator for more details. 22 Step Motor Controller (Servo/24 VDC) Series LECP6 Servo Motor Controller (24 VDC) Series LECA6 How to Mount a) Screw mounting (LEC6-) (Installation with two M4 screws) b) DIN rail mounting (LEC6D-) (Installation with the DIN rail) DIN rail is locked.

[0.15] 22 [0.15] 22 [0.15] 15 [0.10] 15 [0.10] 15 [0.10] 7.3 [0.05] 7.3 [0.05] 7.3 [0.05] 0 0 7.3 [0.05] 15 [0.1] 22 [0.15] 29 [0.2] 36 [0.25] 44 [0.3] 0 0.00 7.3 [0.05] 15 [0.10] 22 [0.15] 29 [0.20] 36 [0.25] 0 0.00 7.3 [0.05] 15 [0.10] 22 [0.15] 29 [0.20] 36 [0.25] Pilot pressure psi [MPa] Pilot pressure psi [MPa] Pilot pressure psi [MPa] 3 Regulator for Chemical Liquids Series LVR Specications

18 1/8 63 129 63 Up to 400 35 32 70 27 55 18 38 6 11 51 11 M6 x 1 7 16 11 M18 x 1.5 22 1/4 73 135 67 Up to 400 35 32 75 27 58 18 38 6 11 51 11 M8 x 1.25 7 16 11 M18 x 1.5 22 1/4 73 135 80 Up to 500 40 37 88 32 69 22 45 12 13 62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to 500 40 37 95 32 74 22 45 12 13 62 13 M10 x 1.25 7 19 14 M22 x 1.5 26 1/4 83 159 100 Up to 500 40 37 110 41 87

21 22 3.3 5.5 10 12.6 17 10.5 4.3 7.8 14 17 12 22.8 20.5 4.3 8 19.3 22 25 12 22.1 28 33 14 4.3 8 25 26.2 Note) Reference dimensions Inch Size D1 D2 D3 D4 L1 L2 L3 MAX.

M1 0Xl.5 15 50 131 20 28 22 SO.6 44 B " M l 0)(1.5 M10)(I .S 63 138. 5 18 124 .5 SO.6 44 I. 8 Ml0Xl .5 15 20 30 22 " M12xl .75 M1 2x 1.75 lB 150 27 M1 6X2.0 21 80 168 22 38 28 64 56 18 10 10 0SM:: Series CDQ2BP High Magll8lic Field Resistance ," , [).P70 ' , D-~i4,,;'; ' ; ::~::Y_iidiz!C:::i Auto SWitch No.

/2" 1/2" 15.6 17 17 105.7 60.9 28.4 26.4 22 22 10 8 Refer to the standard bracket dimensions.

Silicon rubber Urethane rubber Fluororubber 40 161 EPR 39 160 40 50 63 80 100 125 1 0 89 158 2 0 56 156 3 0 55 396 6 0 155 347 12 1 121 345 22 3 120 580 118 531 116 529 How to Order ZPT 40 HB N A14 Mounting thread diameter (Vacuum entry) Pad diameter (mm) Pad diameter Thread dia.

MRQ DBasic type 11-MSQBA 11-MSQBR M5 x 0.8 depth 5 (Vacuum port) 20DC DB DA (mm) DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD Size 10 20 30 50 46 45 20 35 20 5 59 HB 61 60 28 40 22 6 65 (HD) 11.5 67 65 32 48 22 6 68 5.5 HC 77 75 35 54 24 7 77 Dimensions other than above are identical to the basic type.

Doc. no.MSQB-OM04-E PRODUCT NAME Rotary Table MODEL / Series / Product Number MSQ10 to 200() Contents Safety Instructions 2 17 Outline Specifications 17 18 Mass 18 Effective torque 19 Internal construction and parts 22 Basic circuit 22 Circuit structure Recommended models 22 23 Mounting Load restrictions 23 23 Flange application Direction and Angle of Rotation (Adjusting bolt, Internal shock

C 0.2 B 0.2 0.1 A 0.2 0.05 100 1000 D (mm) MGPWM MGPWL/A Hexagon socket head cap screw 126 146 176 192 240 266 Maximum speed (mm/s) Bore size (mm) A (mm) B (mm) C (mm) 20 25 32 40 50 63 24 30 34 40 46 58 108 128 156 172 220 248 12 14 18 18 22 22 12 15 18 18 22 22 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 Other Caution Do not use this cylinder as a stopper. 518

3.2 D-M9N, P (3-wire) D-M9P DC (+) Brown [Red] Most sensitive position 6 22 3.2 D-M9B (2-wire) OUT Black [White] DC (-) Blue [Black] Most sensitive position 6 22 D-M9B OUT (+) Brown [Red] OUT (-) Blue [Black] 15 Solid State Switches: Direct Mount Type D-F9NV, D-F9PV, D-F9BV Refer to www.smcworld.com for details of products compatible with overseas standards.