Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

80 85 90 95 100 105 60 65 70 75 80 85 73 78 83 88 93 98 16 to 25 Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0

New

C h 25 E R T g d C J IN OUT G1/2 j f 2 x M Depth 5 J J IN OUT H G A 2 x P Port size B B1 2 x M Depth 5 H B1 G A 2 x P Port size B i b Faston type D 11 Q F Terminal part Faston connector 250 Series Bracket mounting hole dimensions a1 (VXZ23, 25) Note) a a1 (VXZ24, 26) Note) 11 E C R 9 6.5 6.5 IN OUT 15 2 x M Depth 5 H B B1 G A 10.5 2 x P Port size (mm) Model A B B1 C D E F G Port size P 1

IZx-OMT0049

How to Order . 11 1-1. System construction . 11 1-2. How to Order . 14 1-2-1. Product number for single unit (to order separately) . 15 1-2-2. Made to Order . 17 1-2-3. Accessories (ordered separately) . 18 1-2-4. Sold separately . 20 2. Procedures to Operation . 22 2-1. Flow chart to operation . 22 2-2. Initial setting (IZT41/42) Initial setting is not necessary for IZT40) . 22 3.

2-Color Display Digital Flow Switch Series PFM

Piping Variations With one-touch fittings (C4, C6, C8, N7) Female thread (01, 02, N01, N02, F01, F02) Straight (Nil) Bottom (L) Straight (Nil) Bottom (L) Without flow adjustment valve (Nil) S 1 2 S 1 2 S S 1 1 2 2 IN 1 IN 1 IN IN With flow adjustment valve (S) S S 1 2 1 2 S S 1 1 2 2 IN IN 1 IN 1 IN 906 2-Color Display Digital Flow Switch Series PFM7 Option 1 Nil With lead wire with connector

58

(Different surfaces, Same surface), With 1 pc. 100 15 105 110 D-A9 110 + 40(n 4) 2 15 + 40(n 2) 2 (n = 4, 8, 12, 16) 100 + 40(n 4) 2 105 + 40(n 4) 2 With n pcs. (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) With 2 pcs. (Different surfaces, Same surface), With 1 pc. 75 10 80 85 D-A9V 75 + 30(n 4) 2 85 + 30(n 4) 2 80 + 30(n 4) 2 10 + 30(n 2) 2 With n pcs.

Cylinder with Lock Series CLS

(Different surfaces, Same surface), 1 pc. 10 85 90 80 D-M9V D-M9WV 10 + 30 (n2) 2 80 + 30 (n4) 2 85 + 30 (n4) 2 90 + 30 (n4) 2 n pcs. (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) 2 pcs. (Different surfaces, Same surface), 1 pc. 20 115 120 D-M9AL 20 + 40 (n2) 2 115 + 40 (n2) 2 120 + 40 (n2) 2 n pcs. (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) 2 pcs.

Large Size Vacuum Module: Series ZR

X, Y, Z directions, for 2 hours each 2% F.S.

Integrated Controller

At this position, 2 mm at the end.

Fieldbus system EtherNet/IP TM compatible SI Unit

) 0 2 Digital output unit EX600-DYF (16 outputs) 0 2 EX600-DME (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DMF (8 inputs/8 outputs) 1 1 Analogue input Unit EX600-AXA (2 channels) 4 (2 bytes per channel) 0 Analogue output Unit EX600-AYA (2 channels) 0 4 (2 bytes per channel) Analogue I/O Unit EX600-AMB (2/2 channels) 4 (2 bytes per channel) 4 (2 bytes per channel) -58No.EX-OMS0027 When

HRX-OM-R039

Name Size 1 Valve Rc1/2 2 Y-shaped strainer or filter Rc1/2 (#40) Rc1/2 (500m) 3 Flow meter 0 to 30 L/min 4 Others (Pipe, hose, etc.) I.D15more HRSE Series 3.4 PIPING 3-11 HRX-OM-R039 Chapter 3 Transport and Setting Up 3.5 Fill of circulating fluid Turn the tank lid anticlockwise to open. Supply the circulating fluid up to the H mark on the fluid level indicator.

CE

1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

21

Number of auto switches Same surface Different surfaces Same surface (n 2) 2 D-M9m/M9mW D-A9m 15 + 45 10 15 Note 1) Note 1) 45 45 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 D-H7BAL/H7NF 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 D-C73C/C80C D-H7C 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) (n 2) 2 D-B54/B64 D-G5NTL 15 + 50 10 15 75 75 + 55 (n 2) (n = 2, 4, 6) (n 2) 2 20 + 50 D-B59W

LEF-OM002xx

100 200 300 400 500 600 V(mm/s) V(mm/s) LEFS16A LEFS25A Model Stroke [mm] Note1) 50800 50500 Horizontal 7 10 5 11 18 Work load [kg] note2) Vertical 2 4 1 2.5 5 500 1 to 500 1 to 250 2 to 800 2 to 500 1 to 250 501600 2 to 800 2 to 500 1 to 250 Note2)Speed Stroke range [mm/s] 601700 2 to 630 2 to 420 1 to 230 701800 2 to 550 2 to 330 1 to 180 specifications Actuator specification 3,000 Max.acceleration

AW

C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C1SF-6 AD17-6 C1SF-2 AD17-2 C2SF-C AD27-C C2SF-J C2SF-CJ C2SF-6 C2SF-6C AD27-6 AD27-6C C2SF-6J C2SF-6CJ C2SF-2 AD27-2 C2SF-2J C3SF-J C3SF-W C3SF-6 AD37-6 AD38-6 C3SF-6J C3SF-6W C3SF-2 AD37-2 AD38-2 C3SF-2J C3LF-8 AD37-8 AD38-8 C3LF-8J Polycarbonate Nylon Metal Metal bowl

Digital Flow Switch (Integrated display type)

R S16 N -2 to 5 -82No.PF-OMW0007-E 1: "R" means Read and "W" means Write. 2: Refer to the table below for the symbol.

PFxx-OMY0005

OUT2 17 OUT output bit Accumulated 1 32 Accumulated 2 33 Flow rate 1 34 Flow rate 2 35 Connected with hardware output SW output bit (Not connected as OUT2 does not have the hardware) Temperature 1 36 Temperature 2 37 Pressure 1 38 Pressure 2 39 Pulse output 2 65 This is valid only when the output object of OUT2 is pulse output.

Modular Type Regulators Series AR

Model Option AR10 AR25(K) AR20(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) Bracket assembly Note 1) AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S AR50P-270AS Note 2) AR20P-270AS AR20P-260S AR25P-270AS AR25P-260S G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L AR10P-270AS AR10P-260S G27-10-R1 Set nut Note 3) Note 3) G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L GC3-10AS [GC3P-010AS (Pressure gauge

Rotary Cylinder Series MRQ

/2 63.5 ( 20 Stroke)/2 61 ( 25 Stroke)/2 63.5 ( 30 Stroke)/2 63.5 ( 40 Stroke)/2 66 ( 50 Stroke)/2 66 ( 65 Stroke)/2 71 ( 75 Stroke)/2 68.5 ( 90 Stroke)/2 73.5 ( 100 Stroke)/2 68 ( 5 Stroke)/2 68 ( 10 Stroke)/2 70.5 ( 15 Stroke)/2 68 ( 20 Stroke)/2 70.5 ( 25 Stroke)/2 68 ( 30 Stroke)/2 70.5 ( 40 Stroke)/2 75.5 ( 50 Stroke)/2 75.5 ( 65 Stroke)/2 80.5 (

3 Port Air Operated Valve

-41 Common EXH 1(P) port 1/2 3(R) port 1/2 2(A) port 1/2 2 to 20 stations VPA700 VV3PA7-42 Individual EXH 1(P) port 1/2 2(A) port 1/2 3(R) port 1/2 Note) Supply pressure to 1(P) ports and exhaust air from 3(R) ports on both sides for 10 stations or more. 1557 3 Port/Air Operated Valve Body Ported/Single Unit How to Order VPA300/500/700 Series VPA 3 4 2 1 01 A Series 3 5 7 VPA300 series VPA300

Pneumatic Transfer System Series MF

MF32-SA Stroke 4-M6 x 1.0 thread depth 12 288 + Stroke 2 x 2-6.9 through, 2 x 2-11 counter bore, depth 6.5 35 (cylinder tube O.D.)