Intrinsically Safe Valve

2position 1 (P) port 1/4 N.C.

EXxx-OMU0020EN

, 1: Short circuit 6 Valve 12, 13 diagnostics 0: No error, 1: Short circuit 7 Valve 14, 15 diagnostics 0: No error, 1: Short circuit 5.1.1.4.

PFxx-OMY0005

Bit offset Item Notes 0 Accumulated flow SW1 0: OFF 1: ON 1 Accumulated flow SW2 0: OFF 1: ON 2 Flow rate SW1 0: OFF 1: ON 3 Flow rate SW2 0: OFF 1: ON 4 Temperature SW1 0: OFF 1: ON 5 Temperature SW2 0: OFF 1: ON 6 Pressure SW1 0: OFF 1: ON 7 Pressure SW2 0: OFF 1: ON 8 Flow rate unit 0: L 1: ft3 9 Flow rate criteria 0: STD 1: nor 10 Flow diagnosis 0: Normal 1: HHH 11 Temperature diagnosis

EXxx-OMN0027CN

4 3 2 1 0 Byte 0 0 Bit No. 0 1 1 1 2 1 3 1 4 1 5 (0) 6 1 7 1 2 7 6 5 4 3 2 1 0 Byte 1 0 1 Bit No. 0 1 1 1 2 (1) 3 1 4 1FREEZE 5 1SYNC 6 (0) 7 1 3 7 6 5 4 3 2 1 0 Byte 2 0 0 0 0 0 0 0 Bit No. 06 (0) 7 1 PROFIBUS DP Byte 3 PROFIBUS FFh ID Byte 45 IDEX600-SPRA ID 1411h -72No.EX-OMN0027CN-D Header 7 6 5 4 3 2 1 0 Byte 6 0 0 0 0 1 1 0 1 Bit No. 07 0Eh(13 ) System diag.1 7 6 5 4 3 2 1

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Hexagon socket head cap screw End block L End block R 1 2 3 Refer to How to Order below. Refer to Table (1) (including 1 pc. of y). Refer to Table (1) (including 1 pc. of t). Table (1) ZQ13M--(-Q)Note 1) 4 Ejector assembly (1 pc. each in t and y is included.)

Digital Flow Switch (Integrated display type) ( compatible)

Nominal thread size Tightening torque Rc(NPT)3/8 22 to 24 Nm Rc(NPT)1/2 28 to 30 Nm Rc(NPT)3/4 28 to 30 Nm Rc(NPT)1 36 to 38 Nm Rc(NPT)1 1/4 40 to 42 Nm Rc(NPT)1 1/2 48 to 50 Nm If the tightening torque is exceeded, the product can be broken. If the correct tightening torque is not applied, the fittings may become loose. Avoid any sealing tape getting inside the piping.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(B) 2 (A) 4 (B) 2 (A) 4 Effective area (mm2) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R) (B) 2 (A) 4 JIS Symbol 1 3 position pressure center 3 position pressure center (B) 2 (A) 4 (B) 2 (A) 4 3 (R) 1 (P) (Single) 0 (Fully open) (Fully closed) 1 2 3 4 5 6 7 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R) How to order valve with built-in speed controller SYJ5 5 When using SYJ553 model the speed controller must be opend

7.4

type) 2 x 1/8 3(R) port = Thread type Manual override 72.8 (Double solenoid dual 3-port) 50.3 (Single solenoid) 2 x 4.5 Mounting hole 81 (Closed center) R 3 P 1 X 36.5 9 32 24.1 P 1 15.6 2 x 1/8 1(P) port = Thread type 10.2 Indicator light Stations 1 2 3 4 5 6 7 8 n D side U side 39.7 With plug connector/light B 2 B 2 20 14 A 4 A 4 5 14.6 2n x C2, C3, C4, M5, N1, N3 <4(A), 2(B) port>

JXCx-OMT0034CN

ID OFF(0) Ry0F Ry0E Ry0D Ry0C Ry0B Ry0A Ry09 Ry08 ID8 ID7 ID6 ID5 ID4 ID3 ID2 ID1 Ry13 Ry12 Ry11 Ry10 ID12 ID11 ID10 ID9 (6) (LEC)ID ID 2 1 120 12 12 bit Ry1B Ry1A Ry19 Ry18 ID 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 12 1 1 0 0 44 - 13.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

1 1 1 1 2 1 1 2 1 1 1 2 1 2 2 1 1 1 1 1 3 2 3 VCC12-1A-1 (for VCC12-00) 1 set unit VCC12(D)-00 (dedicated) Orifice body assembly VCC12D-1A-1 (for VCC12D-00) 1 set unit O-ring assembly 1 set unit VCC12-OR-1 O-ring assembly Orifice assembly 1 set unit VCC12-OR-4 1 set unit VCC13-1A-1 VCC13-00 (dedicated) 1 set unit O-ring assembly VCC13-OR-1 O-ring assembly 1 set unit VCC13-OR-2 Mounting nut

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

4 11 13 3 8 " " 1 2 Principal Parts Material Element Part No.

VSA4

0.31 0.31 0.30 0.33 b 0.34 0.47 0.51 0.34 0.47 0.51 0.34 0.44 0.48 0.33 0.48 0.53 Cv 1.0 1.2 1.4 1.0 1.2 1.4 1.0 1.2 1.3 1.1 1.2 1.3 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 8 Rc VSA4120-01 VSA4120-02 VSA4120-03 VSA4220-01 VSA4220-02 VSA4220-03 VSA4320-01 VSA4320-02 VSA4320-03 VSA4420-01 VSA4420-02 VSA4420-03 2 position single VA 1 4 1 8 Rc 0.60 1 8 Rc 1 8 Rc SA 2 position double

Clean Regulator/Fluororesin Type

Nil X401 Standard Applicable fittings LQ1 LQ2 Symbol 1 2 Nil N Rc 1/8 NPT 1/8 Rotating the mounting hole 90 Fitting size (IN side) Fitting size (OUT side) Note 2) Note 2) Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Fitting size Fitting type Applicable fitting size Fitting type Symbol Symbol Nil 07 11 13 19 25 Note 1) 2 3 4 5 6 Same as IN side 2 3 4 5 6 07 11 13

Air cylinder

Description Qty 1 Rod cover 1 14 Wear ring 1 2 Head cover 1 15 Rod seal 1 3 Cylinder tube 1 16 Piston seal 1 4 Piston rod 1 17 Cushion seal A 1(2) 5 Piston 1 18 Cushion seal B 1(0) 6 Cushion ring A 1(2) 19 Cushion valve seal 2 7 Cushion ring B 1(0) 20 Cylinder tube gasket 2 8 Bushing 1 21 Bumper A 1(2) 9 Cushion valve 2 22 Bumper B 1(0) 10 Tie rod 4 23 Rod end nut 1 11 Tie rod nut 4 24 Magnet

JXCx-OMT0030CN

JXC-OMT0030CN GWProfibus / LEC-GPR1 1 . 4 2 . 6 21 . 6 22 . 6 23 . 7 24 () . 8 1 . 8 2 . 8 3LEC . 8 4 . 8 5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23

0.5

in 1 m increments from 1 m to 20 m.

4/5 Port Air Operated Valve Series SYJA3000 1

center/pressure center SYJA7 20-01 3 position closed center/exhaust center/pressure center SYJA7 403 4 5 2-4.3 (For mounting) 3 4 5 01 02 2-3.2 35 34 8.5 (For manifold mounting) 2-M5 x 0.8 (Pilot port) 17 B A 1 34 27 13 1 B A A B 3 1 1 R1 P R2 32.5 45.5 2-M5 x 0.8 31.5 38 (Pilot port) 64 2-3.2 Manual override 69.5 14 35 (For mounting) 89 Manual override 1/8,1/4 (P, A, B port) 29 28 25 21

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZF ZP SP ZCUK Add or deduct the mass shown in the table on the left for order materials.

PFxx-OMJ0005CN

1 310 -1 310 -1 310 -1 ft ft ft ft 310 -1 0.1 ft 310 -1 1 ft 310 -1 1 ft 310 -1 / 0.1 ft 0.1 1 1 1 310 -1/pulse 310 -1/pulse 310 -1/pulse 310 -1/pulse ft ft ft ft 0.927= -23No.PF-OMJ0005CN-I [F 1] OUT1 OUT1 <> [F 1] [oU1] [1ot] () -24No.PF-OMJ0005CN-I 21 [P_1] [P1L][P1H] [P1.1][P1.2]([P1.1]3[P1.2]3) Pn [H_1] [CoL] ON OFF ON OFF [F 1] OUT1 -25No.PF-OMJ0005CN-I H_1(H_2) H1(H2) H1(H2

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High