7.4

S07 1 2 5 C4 G Connector kit 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 2 setsValve part no. (Stations 3 to 4) 2 setsValve part no. (Stations 5 to 6) 2 setsValve part no.

4/5 Port Air Operated Valve Series SYJA3000 1

14 15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2-1.8 2-M3 x 0.5 (Pilot port) A B 11 1.5 17.5 (For mounting) 2-3.2 equivalent (18.5) A B Manual override 14 36 (18.5) (21) Manual override 41.6 13.5 15 41.6 28.5 21 R2 P R1 13 R P R (

MHF2

3 2-M5 x 0.8 thread depth 5.5 Mounting thread Groove for auto switch mounting 20 122 17 Low Profile Air Gripper Series MHF2 Dimensions MHF2-20D Scale: 50% 38 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 2-M6 x 1 thread depth 15 Mounting thread 6 71 6 62 86 2-M6 x 1 thread depth 6 33 56 Finger closing port M5 x 0.8 Mounting thread E 13 25 25 30 41 E 0 -0.1 2-5.2 through (mounting hole) 32 31

EXxx-OMU0020EN

Diagnostics type 2 Table. 5-6 Overview of Diagnostics type 2 Byte Description 0 General diagnostics 1 1 Valve diagnostics 1 2 General diagnostics 2 3 Valve diagnostics 2 5.1.2.1.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

2 A-!

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

(De-energized) 2% F.S.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

2/3 Port Valve

-40F VND70D-50A VND70D-50F 7 0.7 1 1.3 3.8 5 8 12 13 0.3 1 8 1 4 18 23 70 90 140 220 3 8 0.6 15 1 2 3 4 20 0.9 1.4 2.3 5.5 3.6 7.2 5.7 10.8 25 1 1 4 1 32 18 320 32 1 2 1 28 40 500 40 2 50 43 770 50 Note 1) The companion flange is JIS B 2210 10K (Standard) or its equivalent.

EXxx-OMN0027CN

4 3 2 1 0 Byte 0 0 Bit No. 0 1 1 1 2 1 3 1 4 1 5 (0) 6 1 7 1 2 7 6 5 4 3 2 1 0 Byte 1 0 1 Bit No. 0 1 1 1 2 (1) 3 1 4 1FREEZE 5 1SYNC 6 (0) 7 1 3 7 6 5 4 3 2 1 0 Byte 2 0 0 0 0 0 0 0 Bit No. 06 (0) 7 1 PROFIBUS DP Byte 3 PROFIBUS FFh ID Byte 45 IDEX600-SPRA ID 1411h -72No.EX-OMN0027CN-D Header 7 6 5 4 3 2 1 0 Byte 6 0 0 0 0 1 1 0 1 Bit No. 07 0Eh(13 ) System diag.1 7 6 5 4 3 2 1

PFxx-OMA1007

information 1 5 Remote connection information 2 6 Remote diagnostic information 1 7 Remote diagnostic information 2 8 Remote registration information 1 9 Remote registration information 2 10 Accumulated flow [high word] 11 Unit: 10 L or ft3 12 Accumulated flow [low word] 13 14 Instantaneous flow [high byte] Unit: L/min 15 Instantaneous flow [low byte] 16 Fluid temperature [high byte] Unit

PFxx-OMY0005

OUT2 17 OUT output bit Accumulated 1 32 Accumulated 2 33 Flow rate 1 34 Flow rate 2 35 Connected with hardware output SW output bit (Not connected as OUT2 does not have the hardware) Temperature 1 36 Temperature 2 37 Pressure 1 38 Pressure 2 39 Pulse output 2 65 This is valid only when the output object of OUT2 is pulse output.

Digital Flow Switch (Integrated display type) ( compatible)

dEC2 (Subtraction OUT2) 0: 10^-2 1: 10^-1 2: 10^0 3: 10^1 4: 10^2 5: 10^3 6: 10^4 7: 10^5 8: 10^6 AC_E_L (Setting L of the accumulated flow value conversion factor) Setting of the accumuated flow value conversion factor Unit specification (Unit): When "L" is selected. 1071 0x042F 0 R/W U8 2 Y 0: 10^-2 1: 10^-1 2: 10^0 3: 10^1 4: 10^2 5: 10^3 6: 10^4 7: 10^5 8: 10^6 Accumulated value setting

PSxx-OMT0001CN

OUT1 OUT SUP OFF -56No.PS-OMT0001CN-E 4 [F80]OFF 30 OFF OFF "ON"() OFF 2 [F 0] [F80] [dSP][] OFF 2 -57No.PS-OMT0001CN-E 4 [F81] ON 62 2 [F 0] [F81] [Pin][] 2 -58No.PS-OMT0001CN-E 4 [F90] 2 [F 0] [F90] [ALL] 2 1 [Uni] 2 [P_1] 3 [H_1] 4 [CoL] 5 [oU2]OUT2 6 [2ot] 7 [ ]/ 8 [ ]OUT2 9 [rES]OUT2 10 [ ] 11 [SUb] 12 [dSP]OFF 13 [Pin] -59No.PS-OMT0001CN-E 4 [F98] 2 [

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

22.5 52h9 0 0.074 +0.030 0 +0.052 0 43 30H9 3-4H9 depth 4 5 4 ( A , B , C ) 3-R2 3-R2 2-6.6 through 21.5 10.5 16 5 53.5h9 0 0.074 7 6 43 23 10.5 46 4 13 Angle adjustment bolt 2-6.6 through 72 13 Adjustment: Max. 10.3 6 2 M5 x 0.8 2 8 A port 1 B port +0.030 0 3-4H9 long groove depth 3 8 g6 0.005 0.014 ( A , B , C ) 16h9 0 0.043 4-M6 x 1 depth 11 50 0 0.074 53.5h9 48 11-5-14 14 Series MSUA

SYJA3000

) 27.2 (R1, R2 port) 63 VM/VR VH 2 position double: SYJA7220-01 2 position double: SYJA72400 0 1 2 4.3 22-M5 X 0.8 63.6 34 8.5 (Mounting holes) (Pilot port) 1 A B 13 3 1 B A 17 2-M5 X 0.8 34 3.2 227 B A 35 (Pilot port) (Mounting holes for manifold) 1 R1 P R2 31.5 3.2 235 18 63.6 (Mounting holes) (Non-locking) Manual override 74.6 28 29 25 21 14 74.6 (Non-locking) Manual override 55 2-1.8

Rubber seal 5 Port Solenoid Valve Series SYJ5000

position single 2 position single Allowable voltage fluctuation (B) 2 (A) 4 (A) 4 (B) 2 Standard DC Power consumption (W) With power saving circuit 100V 110V [115V] 200V 220V [230V] 1 (P) 1 (P) 5 (R1) 3 (R2) 3 (R) Apparent power VA 2 position double 2 position double AC (B) 2 (A) 4 (A) 4 (B) 2 Surge voltage suppressor Indicator light 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R) In common between 110 VAC

180° Angular Style Air Gripper Series MHY2/MHW2

Number of fingers Number of auto switches 2 2 fingers Nil 2 pcs. S 1 pc.

VSA4

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 4 VSA440 3 4 , 1 2 3 4 1 2 standard 1 2 3 4 , Piping specifications/Side ported, bottom ported Type V Port size Rc EXH port Valve size Applicable valve Manifold base size Rc P EA, EB A, B , 1 4 3 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 1 2 1 2 VSA420 Common EXH , 3 8 1 2 , 1 4 3 8 , 3 8 1 2 , 3 8 1 2 3 8 standard

Compact Cylinder/Guide Rod Type Series CQM

A B C D A B C D Bore size (mm) Port aperture A 12 (1) (1) (1) 16 (2) (2) (2) B D 20 (2) (2) (2) (2) View from piston rod end 25 (2) (2) (2) (2) 32 C (2) 40 (2) 50 (2) 63 (2) (2) (2) (2) 80 (2) (2) (2) (2) 100 (2) (2) (2) (2) 804 Series CQM Specific Product Precautions Be sure to read before handling.

PROFIBUS DP Compatible Fieldbus System

SI unit for SV series valves (EX500-S001) 2. SI unit for SY/VQC/S0700 series valves (EX500-Q0 ) 1 2 Common to EX500-S001/EX500-Q0 1 2 No.