XM, XY

-M9NL Du Seal material and its changed part XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3

CRB2/CRBU2/CRB1

Applicable shaft types: J, K, T a1 1.5 L1 N1 (mm) Size N1 a1 L1 0 0.025 0 0.025 20 6.8 10 2h9 30 9.2 14 3h9 Double shaft Symbol: A39 Symbol: A40 Applicable to single vane type only Shaft with through hole (Additional machining of S, Y shaft) Not available for size 10. Minimum machining diameter for d1 is 0.1mm. A parallel keyway is used on the long shaft for size 40.

C76

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com S + Stroke ZZ + Stroke MB MB1 (mm) CA2 KK K H G2 G1 EE NB ZZ 116 D N2 XB C N1 WH B LX SW AM L LD LH NDh8 S Bore 26 0 0.033 32 40 10 12 36 40 9 12 22 27 G 1/8 G 1/4 34.5 42.5 37.5 46.5 17 22 28 31 12 14 29 38 16 16 42.3 52.3 30 38 17 19 20 24 47 58.5 21

Cylinder with Lock

Width across flats KB B C V MM BH1 BH2 BH3 TX D E B1 C B ZZ + Stroke S + Stroke H A K BN N1 N MA MB F AL H1 TT B C B1 C B TY With rod boot d e 10.2 f h 10.2 l [mm] Bore size A AL B B1 BH1 BH2 BH3 BN BP C D E F GA GB GC GD GE GF H H1 J 32 22 19.5 46 46 23 38.5 46.5 59 1/8 32.5 12 30 13 37.5 13 37.5 18.5 4 13 47 6 M6 x 1.0 40 30 27 57 52 28.5 42.5 48.5 73 1/8 38 16 35 13 59.5 14 44.5 19.5 4

VK300

VKF Dimensions: Base Mounted VQZ Grommet: VK334-G-01 DIN terminal: VK334-D-01 VZ VS (Mounting screw) VFN Manual override (Non-locking) (Mounting screw) Applicable cable O.D: 3.5 to 7 300 (Lead wire length) (Piping port) 3-Rc 1/8 (Piping port) 3-Rc 1/8 Refer to grommet type for other dimensions. 4-5-5 6 Series VK300 Type 20 Manifold Body Ported (Top ported) VV3K3-20Stations n1 = Number of

5 Port Solenoid Valve, Series VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

N1: 1/8 N3: 5/32 N7: 1/4 Y Note 2) Note 1) When specifying two or more options, enter symbols in alphabetical order.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x

SY

SS5Y5-M45Stations B Dimension L: Formulas for dimensions L1 to L4 L3 = 12.5 x n1 + 16 x n2 + 70 L3 12.5 M = ( + 1) omit decimals L1 = 12.5 x M + 23 L2 = L1 10.5 L4 = (L1 L3)/2 n1: Number of SY3000 stations n2: Number of SY5000 stations Order made Manifold spec. sheets 188 Order Made Specifications SY5000/7000/9000/SY500 DIN Connector (DIN 43650C Standard) DIN connector type with conformity

Series VQ Base Mounted Metal Seal/Rubber Seal

P.1.10-140 P.1.10-144 VFS C C3 (3.2) C4 (4) M5 (M5 thread) VS C6 (6) kit VS7 N1 (1/8) N3 (5/32) N7 (1/4) Built-in silencer P.1.10-178 P.1.10-182 P.1.10-186 Terminal block C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C8 (8) kit N1 (1/8) N3 (5/32) N7 (1/4) N9 (5/16) Built-in silencer P.1.10-178 P.1.10-182 P.1.10-186 Terminal block 1.10-115 Cylinder Speed Chart Series VQ0 Cylinder

SI Unit: QW (DeviceNet), Input Block Stations: None, Input Block COM: +COM, Stations: 3 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: DeviceNet, Input Block Stations: 1 Station/M12: 4 Inputs, Input Block COM: +COM, Stations: 3 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 5/32" One-touch Fitting, Mounting Method: DIN Rail Mounting, US Option: Preferred US Option for DeviceNet Type

SI Unit: DeviceNet, Input Block Stations: 1 Station/M12: 4 Inputs, Input Block COM: +COM, Stations: 3 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 5/32" One-touch Fitting, Mounting Method: DIN Rail Mount w/o DIN Rail, US Option: Preferred US Option for DeviceNet Type

SI Unit: DeviceNet, Input Block Stations: 1 Station/M12: 4 Inputs, Input Block COM: -COM, Stations: 3 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 5/32" One-touch Fitting, Mounting Method: DIN Rail Mount w/o DIN Rail, US Option: Preferred US Option for DeviceNet Type

SI Unit: DeviceNet, Input Block Stations: None, Input Block COM: +COM, Stations: 3 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: ø4 One-touch Fitting, Mounting Method: DIN Rail Mounting, US Option: Preferred US Option for DeviceNet Type

SI Unit: DeviceNet, Input Block Stations: 1 Station/M12: 4 Inputs, Input Block COM: -COM, Stations: 3 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: DIN Rail Mount w/o DIN Rail, US Option: Preferred US Option for DeviceNet Type

SI Unit: DeviceNet, Input Block Stations: None, Input Block COM: +COM, Stations: 3 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: DIN Rail Mount w/o DIN Rail, US Option: Preferred US Option for DeviceNet Type

SI Unit: QW (DeviceNet), Input Block Stations: 12 (1 Station/M12: 4 Inputs), Input Block COM: N (-COM), Stations: 3 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 12 (1 Station/M12: 4 Inputs), Input Block COM: +COM, Stations: 3 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N3 (5/32" One-touch Fitting), Mounting Method: D (DIN Rail Mounting), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 12 (1 Station/M12: 4 Inputs), Input Block COM: +COM, Stations: 3 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N3 (5/32" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail), US Option: X160US (Preferred US Option for DeviceNet Type)