ZSE30/ISE30 Blue DC() -26 Analog output type 1 to 5V (2.5% F .S.) Output impedance: 1k Bring the pressure back to atmospheric pressure and try using the zero out function. Residual pressure error Brown DC(+) Black OUT (Analog output) + 12 to 24VDC Load Blue DC() Supply pressure exceeds the maximum regulating pressure. -28 Analog output type 4 to 20mA (2.5% F .S.)
R 3/8 R 1/2 10-32 UNF NPT 1/8 0 1 Meter-out Meter-in Be sure to read this before handling the products.
Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Control 0 1 Meter-out Meter-in 15-9-89 16 Construction AS2200
Round type Diamond type R D Table 1.
(1mm/s for 16 or smaller) Operates smoothly with minimal stick-slip CJ2XB10-60 CQSXB20-20D Average speed 0.85mm/s Average speed 0.88mm/s 2.0 Average speed 0.43mm/s Average speed 0.43mm/s 2.0 Speed waveform Speed mm/s Displacement mm Speed waveform Speed mm/s Displacement mm 0 0 Operating direction in Operating direction out Operating direction in Operating direction out 2.0 -2.0 60 40 Displacement
7 Main air supply adjustment nut t Initial air supply adjustment nut r Main air supply lock screw !6 Initial air supply lock screw !5 Main spring !3 Poppet valve !2 Initial spring !1 Opening and closing valve piston !0 Initial air supply valve pilot port S @0 Bonnet assembly q Main air supply valve pilot port M !
Speed V(mm/s) V 500mm/s CL MLGC CNA Guideline for selection of bearing style CB Bearing Required conditions Slection of bearing style CV/MVG Impact load and vibration load are added. Change in load is large. Long life span is required. Slide bearing CXW High accuracy (Little rattle is allowed.)
Display accuracy 0.5% F .S. 1 digit (Ambient temperature of 25 3C) Repeatability 0.1% F .S. 1 digit Accuracy Temperature characteristics 0.5% F .S.
(1 mm/s for 16 or smaller) is achieved.
(1 mm/s for 16 or smaller) is achieved.
Flow velocity (m/s) Calculating the Flow Velocity v = 21.2 x Q/d2 (Symbol) v: flow velocity (m/s) Q: flow rate (L/min) d: piping inner diameter (mm) 626
I PORTOPORTLOOP SEC mm2/s LABEL PRO Main modes ALM mm/s L C RUN Directs a program operation. Operation mode ACTUATOR & CONSTRUCTION SYSTEM CONTROLLER POWER ALARM STOP JOG Executes a JOG operation. JOG operation mode HOLD /BS UP L R MON Monitors operating condition. Monitor mode DOWN MODE ENT /ESC Directs alarm code display and clear.
R 177 177 50 CKQ SF B B S S P5DWL P5DWL Without lock With lock SF CLKQ 50 R Guide pin diameter With a lock at the clamp side Guide pin diameter Body shapes and mounting positions Note) Auto switch type Guide pin diameter Pin shape 12.5 12.7 14.5 14.7 15.5 15.7 17.5 17.7 19.5 19.7 24.5 24.7 Hole diameter of the work Symbol 125 127 145 147 155 157 175 177 195 197 245 247 q Body shape Body shapes
~0.6Nm U +-( ) 1V ( ) +DIN
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.
114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B { 28 1C FS 60 3C < 92 5C \ 124 7C | 29 1D GS 61 3D = 93 5D ] 125 7D }
~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".
R 1/ 4NPT 1/4G 1/ 4 (with M5 male thread) URJ 1/4TSJ 1/ 4 Port size Leak rate 1 x 10 -5Pa. m 3/ s 1 x 10 -10Pam3/s 100kPa 1MPa 100kPa 1MPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Output voltage 1 to 5V Analog output Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive
R Lead wire length 0.5 (2.9) m NPN output Analog output PNP output 27 26 67 Lead wire length 0.5 (2.9) m Lead wire length 0.5 (2.9) m Not required for Nil, vacuum adapter (GN) and vacuum pressure gauge (G).
Foot MounVOlevis Mount . 8 5 Auto Switch Mounting Position Circuit Diagram T r u n n i o n . . . . . . .