AMD

Option Bracket J: With drain guide (Option) female thread T: With element service indicatior Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35

AFF

Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

Air Cylinder CLA Series Fine Lock Model

Ambient temperature range should be 14-140"F 1-10^60'C). Please contact SIVIC for cases other than this ranoe. e Load on Diston rod Pay special attention to the lact that the load of piston rod should always be aligned parallel with lhe cylinder axis.

Title not found

Ambient temperature range should be 14-140"F 1-10^60'C). Please contact SIVIC for cases other than this ranoe. e Load on Diston rod Pay special attention to the lact that the load of piston rod should always be aligned parallel with lhe cylinder axis.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 35 190 190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

ZK2-C

0] [F] 2 2 [F 0] 22 SI kPa [F 1] OUT1 23 HYS ONOFF -70 kPa(P_1) 10 kPa(H_1) [F 2] OUT2 25 A ON ON 5 kPa(H_2) OFF OFF 0 kPa(H_3) ON 1 kPa(H_4) -20NO.ZK2-OM00801-B A [F 3] 27 2.5 ms [F 4] 28 [F 6] 30 0% [F11] 31 1000 [F80] 32 OFF [F81] 33 OFF [F90] 34 OFF [F96] 36 OFF [F98] 37 [F99] 39 OFF -21NO.ZK2-OM00801-B [F 0] (kPa/MPa) <> [F 0] [F 0] 2 bar psi InHg mmHg MPa

MXH Series Compact Slide

10 1 10 1 0.1 Weight m(kg) Weight m(kg) Weight m(kg) 20 16 10 6 20 1 20 16 16 0.1 0.01 10 10 6 6 0.01 0.001 0.1 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L(mm) Overhang L(mm) Overhang L(mm) 1 kg = 2.2046 lb 1 kg = 2.2046 lb 1 kg = 2.2046 lb Graph 5 Load eccentricity 100mm Graph 8 Load eccentricity 100mm Graph 11 Load eccentricity 100mm 1 10 10 0.1 1 Weight m(kg) Weight

3 Position Cylinder Series RZQ

102.5 5 14 20 32 10 6 14 22 124 92 114 40 14 7 20 28 134.5 96.5 124.5 50 146 102 14 132 8 20 30 63 CU Bore size (mm) L B + Full stroke RR CW CX+0.2 +0.4 CX CZ RR CL + Full stroke CZ -0.3 -0.1 18 36 10 32 A + Full stroke 18 36 10 40 22 44 14 50 22 44 14 63 10 Series RZQ Auto Switches Proper Mounting Position(For Detection of Piston A Stop Position) and Mounting Height D-A7 D-A80 =U B + First-stage

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

Thermo-chiller

HRLE090-A-20/40 HRLE090-A-20/40 [50 Hz] [60 Hz] 12 12 Ambient temperature 32C Ambient temperature 32C 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 Ambient temperature 40C 6 6 Ambient temperature 40C 4 4 Ambient temperature 45C 2 2 Ambient temperature 45C 0 0 15 20 25 Circulating fluid temperature [C] 15 20 25 Circulating fluid temperature [C] * The cooling capacity is the sum of

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

] L5 [mm] L5 [mm] 600 600 600 m Wall L5 Y 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 35 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work load [kg] 7 Model

VCB

Light With light 10 Series VCB Specific Product Precautions Be sure to read before handling. Refer to pages 7 through 10 for safety instructions and precautions of 2 port solenoid valve for fluid control. Replacing the Solenoid Coil Replacement Parts Caution Solenoid coil part numbers 20 1 G The valve will reach high temperatures from high temperature fluids such as heated water.

HRX-OM-Y098

-A-20 CH1) 8.5.2 HRL200-A-20 CH1 0.6 60 Circulating fluid outlet 0.5 50 Lifting head [m] 0.4 40 Pressure [MPa] 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow[L/min] Fig. 8-10 Pump capacity(HRL200-A-20 CH1) HRL Series Documents 8-9 HRX-OM-Y098 Chapter 8 Documents 8.5.3 HRL300A20 CH1 0.7 70 Circulating

Cylinder with Lock Series CLS

Graph 1 30 20 10 The movement time is the time that is necessary for the load to travel the total movement distance from the start without any intermediate stops. 2.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

in the figure below. 40 Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 30 30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0.2 MPa 0.2 MPa 10 10 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 F F 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 60 60 50 50 0.4 MPa

HRX-OM-W060

return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-10 Pump capacity(HRL200-A-20 CH1) HRL Series 8.5 Pump Capacity 8-9 HRX-OM-W060 Chapter 8 Documents 8.5.3 HRL300A20 CH1 0.7 Circulating 0.6 fluid outlet 0.5 Pressure [MPa] Lifting head [m] Lifting head [m] Usable flow rate range 0.4 0.3 Circulating fluid return 0.2 0.1 0 0 20 40 60 80 100 120

I

++t&F Eft!

Compact

0.08 0.06 0.06 ST 5, 10 0.06 ST 15, 20 0.04 0.04 ST 15, 20 0.04 ST 5, 10 0.02 0.02 0.02 ST 5, 10 0.00 0 5 10 15 0.00 0 5 10 15 0.00 0 5 10 15 Load [N] Load [N] Load [N] MXZ16 MXZ16 MXZ16 0.15 0.15 0.15 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 25, 30 ST 25, 30 ST 25, 30 ST 15, 20 0.10 0.10 0.10 ST 15, 20 ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5, 10