Digital Pressure Switch

M5 M5R 01 N01 Port size M50.8 M50.8 R1/8 NPT1/8 M5(0.8) M5(0.8) Wetted parts Pressure sensing part Silicone Material of Piping port C3602 (Electro less nickel plating) O-ring: HNBR With lead wire and connector attached (5-core, 2 m) 55 g 63 g Weight Without lead wire and connector 15 g 23 g Analogue output Voltage output Range Rated pressure range A B C Vacuum 0.0 to -101.0 kPa 0 -101 kPa

PFxx-OMU0002

PF3A703H (For 3000 L/min) PF3A706H (For 6000 L/min) PF3A712H (For 12000 L/min) 74 No.PF-OMU0002-D Dimensions Symbol Models A B D E F H K L N PF3A703H 130 45 79.1 55.3 22.5 25 35 60 30 4 x M4 x 0.7 depth 7 PF3A706H 170 60 94.1 70.3 30 68 45 80 40 4 x M5 x 0.8 depth 8 PF3A712H 200 70 104.1 80.3 35 85 50 100 50 4 x M6 x 1.0 depth 9 75 No.PF-OMU0002-D Lead wire with M12 connector (ZS-37-A) Pin

VFM300

(Total Travel) 40 Hexagon nut thick 11, across flats 27 (Pilot exhaust port) JIS symbol 0.5 MPa supply 3-4.5 mounting hole 15 N F.O.F. 40 T.T. 5-6-57 Series VFM200 Series VFM200 Push button (Mushroom) VFM250-02-30R/B/G/Y Panel mounting hole (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F. 3-4.5 mounting hole 1.7 mm O.T. 6.5 mm T.T.

Magnet Gripper for Collaborative Robots

at 40 mA) Current leakage 100 A or less at 24 VDC Indicator LED Red LED illuminates when turned ON.

VZM400

(Total Travel) 40 Hexagon nut thick 5, across flats 17 (Pilot exhaust port) JIS Symbol 0.5 MPa supply 2-3.2 mounting hole 15 N F.O.F. 40 T.T. 5-6-44 5 Port Mechanical Valve Series VZM500 Series VZM500 Push button (Mushroom) VZM550-01-30R/B/G/Y Panel mounting hole SA (Pilot exhaust port) JIS symbol VA SA VA VM 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F.

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Side seal None With side seal Nil K Note) Cylinders with side seal are available for 16 to 40. Number of auto switches Bore size 16 20 25 32 40 50 63 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 2 pcs 1 pc n pcs Nil S n Stroke adjustment unit symbol Refer to Stroke adjustment unit on page 1351. Made to Order Specifications For details, refer to page 1351.

RB/RBL/RBQ

13 34 25 52 80 M27 x 1.5 50 M12 10-18-16

RB/RBL/RBQ

x 1.0 19 M5 9 drill, 14 counterbore depth 8.6 16 12.5 34 54 M14 x 1.5 25 M8 11 drill, 17.5 counterbore depth 10.8 22 19 44 70 M20 x 1.5 38 M10 13.5 drill, 20 counterbore depth 13 34 25 52 80 M27 x 1.5 50 M12 10-18-16

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

DOC1001322

Date and time, Operation time and Alarm history are not reset. (1) Data reset setting screen Table 5.4-16 Data reset setting No.

Sine Rodless Cylinder Series REA

Stop 5 Series REA Sine Rodless Cylinder Dimensions (mm) REA 25, 32, 40 1in = 25.4mm Effective thread depth J L 0 0.1 NN G 4-MM H G B 2Port size I X D NB NB T N K W N S + Stroke F NA F R ZZ + Stroke MM x J B D F G H I K L N NA NB NN Model Port size REA25 REA32 REA40 Rc(PT) 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc(PT) 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

1 t LEM e Motor type*1 r Lead [mm] q Accuracy LEY Symbol Type Output [W] Actuator size Compatible driver*2 Nil Basic type H High precision type Symbol LEJS40 LEJS63 A 16 20 B 8 10 LES S2 AC servo motor (Incremental encoder) 100 40 LECSA-S1 w Size S3 AC servo motor (Incremental encoder) 200 63 LECSA-S3 LEPY LEPS t Stroke [mm]*3 40 63 S6 AC servo motor (Absolute encoder) 100 40 LECSB-S5 LECSC-S5

XLA Series

Vale specifications Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for

XLA- ∗ -F7NJ ∗ - ∗ Series

Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding

AS-FM

Thread type AS-D Port size Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT M5 U10/32 01 02 M5 x 0.8 AS-T 10-32 UNF 1/8 N ASP 1/4 ASN Made to Order AQ ASV Grease-free (Seal: Fluorine Coated) + Throttle Valve (Without Check Valve) X21 Lubricant: Vaseline X12 AK Ex.) AS1201FM-M5-23-X12 Ex.)

Silencer Compact Resin Type/Male Thread Series AN05 to 40

Construction/Parts/Dimensions AN05/10/20 AN15/30/40 No hexagonal part in AN05 and AN10 B Dimensions (mm) B Port size R, NPT A B D Model Sound absorbing material (Resin sintered body) AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 6.5 15 M5 x 0.8 Body (Resin) A 23 1/8 11 A 32 1/4 14 16 Hexagonal flats D 14 45 1/4 16.5 17 58.5 3/8 20 Port size 21 68 24 1/2 2

53

Applicable model HRS-WL003 HRS090-mm-20/40 Parts List q No.

IDX-OM-M050

The connection size is M5. Applicable crimped terminal width: 9.5mm or less [Wiring procedure] 1. Remove the front panel of the product. When lifting the front panel, be sure to hold the handle. 2-2 Installation 2 7 IDF100150F IDX-OM-M050 Air Dryer 2 Transportation / Installation 2.

IDX-OM-U021

3 P R V 1-1 IDF100150F 1 1 IDX-OM-U021 1 1-2 1-2-1 (C) 1-2-2 G 1-2-3 K 1.6MPa 1-2-4 P 1-2-5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1-2-6 V ON 1.5 OFF 0.5 1-2-7 3 2 1 1-2 IDF100150F 1 2 IDX-OM-U021 1 1-3 A 3 300 A 1-3 IDF100150F 1 3 IDX-OM-U021 1 B V IDF100F V IDF125F V IDF150F B 1-3 IDF100150F 1 4 IDX-OM-U021 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5

XLF Series

Specifications Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 XLF-100 XLF-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the