Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Solenoid: No.2 Solenoid, Body Option: 7 (32A), Style: 0 (Energized Open/N.C.), Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 12 [1 1/4 (35A)], Thread: Rc, Voltage: 1 (100VAC 50/60HZ), Lead Wire: C (Conduit)
Solenoid: No.3 Solenoid, Body Option: 8 (40A), Style: 0 (Energized Open/N.C.), Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 40 (Flange 40A), Thread: Rc, Voltage: 1 (100VAC 50/60HZ), Lead Wire: C (Conduit)
Solenoid: No.1 Solenoid, Body Option: 3 (10A), Style: 0 (Energized Open/N.C.), Option: C (Brass or BC6, Copper Body & Shading Coil, PTFE Seal, Class B Coil), Port Size: 02 [1/4 (10A)], Thread: Rc, Voltage: 1 (100VAC 50/60HZ), Lead Wire: C (Conduit)
Solenoid: No.3 Solenoid, Body Option: 8 (40A), Style: 0 (Energized Open/N.C.), Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 14 [1 1/2 (40A)], Thread: N (NPT), Voltage: 1 (100VAC 50/60HZ), Lead Wire: C (Conduit)
Solenoid: No.3 Solenoid, Body Option: 8 (40A), Style: 0 (Energized Open/N.C.), Option: S (Brass or BC6, Copper Body & Shading Coil PTFE (FPM)Seal, Class H Coil), Port Size: 40 (Flange 40A), Thread: Rc, Voltage: 1 (100VAC 50/60HZ), Lead Wire: C (Conduit)
Solenoid: No.3 Solenoid, Body Option: 8 (40A), Style: 2 (Energized Closed/N.O.), Option: S (Brass or BC6, Copper Body & Shading Coil PTFE (FPM)Seal, Class H Coil), Port Size: 40 (Flange 40A), Thread: Rc, Voltage: 1 (100VAC 50/60HZ), Lead Wire: C (Conduit)
Solenoid: No.1 Solenoid, Body Option: 4 (15A), Style: 0 (Energized Open/N.C.), Option: A (Brass, Copper or BC6 Body & Shading Coil, FPM Seal, Class B Coil), Port Size: 03 [3/8 (10,15A)], Thread: Rc, Voltage: 1 (100VAC 50/60HZ), Lead Wire: C (Conduit)
Regulator Unit Combination: Filter Regulator, Port Size: Rc1/8, Filter Rating: 5μm, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Size of Body: 20, Check Valve: None, Residual
Regulator Unit Combination: Filter Regulator, Port Size: G1/8, Filter Rating: 5μm, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Size of Body: 20, Check Valve: None, Residual
Regulator Unit Combination: Filter Regulator, Port Size: G1/8, Filter Rating: 5μm, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: [With Standard Pressure Gauge] Round-shaped pressure gauge (with limit
Regulator Unit Combination: Filter Regulator, Port Size: Rc1/4, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Auto/Manual] N.C. (Normally Closed) at non-pressurized without
Model: -, Orifice Size: -, Style: -, Fluid Option: -, Suffix: -, Port Size: -, Thread: -, Voltage: -, Lead Wire: -, Surge Suppressor: -, Rectifier: -, Bracket: -
Model: -, Orifice Size: -, Style: -, Fluid Option: -, Suffix: -, Port Size: -, Thread: -, Voltage: -, Lead Wire: -, Surge Suppressor: -, Rectifier: -, Bracket: -
Model: -, Orifice Size: -, Style: -, Fluid Option: -, Suffix: -, Port Size: -, Thread: -, Voltage: -, Lead Wire: -, Surge Suppressor: -, Rectifier: -, Bracket: -
Model: -, Orifice Size: -, Style: -, Fluid Option: -, Suffix: -, Port Size: -, Thread: -, Voltage: -, Lead Wire: -, Surge Suppressor: -, Rectifier: -, Bracket: -
Model: -, Orifice Size: -, Style: -, Fluid Option: -, Suffix: -, Port Size: -, Thread: -, Voltage: -, Lead Wire: -, Surge Suppressor: -, Rectifier: -, Bracket: -
Model: -, Orifice Size: -, Style: -, Fluid Option: -, Suffix: -, Port Size: -, Thread: -, Voltage: -, Lead Wire: -, Surge Suppressor: -, Rectifier: -, Bracket: -
Model: -, Orifice Size: -, Style: -, Fluid Option: -, Suffix: -, Port Size: -, Thread: -, Voltage: -, Lead Wire: -, Surge Suppressor: -, Rectifier: -, Bracket: -
Model: -, Orifice Size: -, Style: -, Fluid Option: -, Suffix: -, Port Size: -, Thread: -, Voltage: -, Lead Wire: -, Surge Suppressor: -, Rectifier: -, Bracket: -