Speed Controller with

n pcs.+ L16 x 2 L8 x n pcs.+ L17 x 2 L8 x n pcs.+ L25 x 2 L8 Refer to page 6 for L8.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

4 q 4 Series LVM10/100 Dimensions/Body Pored Type LVM11-(N.C.) (2 x R3.2) 9 25.4 19 2 x 3.2 Mounting hole (Lead wire length) 300 UL1007 AWG22 52.5 M5 x 0.8 IN port M5 x 0.8 OUT port 2 5 5 16 13 The broken lines indicate the bracket type. LVM11R-(N.C.) LVM12R-(N.O.) LVM112-(Universal) 1.8 (8.25) (Lead wire length) N.O.

2/3 Port Solenoid Valve for Chemicals

4 q 4 Series LVM10/100 Dimensions/Body Pored Type LVM11-(N.C.) (2 x R3.2) 9 25.4 19 2 x 3.2 Mounting hole (Lead wire length) 300 UL1007 AWG22 52.5 M5 x 0.8 IN port M5 x 0.8 OUT port 2 5 5 16 13 The broken lines indicate the bracket type. LVM11R-(N.C.) LVM12R-(N.O.) LVM112-(Universal) 1.8 (8.25) (Lead wire length) N.O.

AS-FPQ/AS-FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

AS-FPQ/AS-FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

Dedicated Controller

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 Model M 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Controller Connectors These are connectors 'all halfpitch type' used for CN1 (control input/output) and CN2 (general purpose input/output).

Dedicated Controller Series LC1 Uniaxial Type

Mounting bracket Ass'y Mounting screws Controller model M3 x 0.5 LC1-1-N3 LC1-1B-N3 M5 x 0.8 LC1-1-N5 LC1-1B-N5 M3 LC1-1-L3 LC1-1B-L3 M5 LC1-1-L5 LC1-1B-L5 Note) This controller comes with either the T-nuts or T-brackets as accessories.

Plug-in Unit

L L (60) 44 8 16 14 25 1 13 47.04 50 " 10 Multi-core vinyl cable 0.3 mm2 x 25C Terminal no. Socket side Plug terminal no. (arrangement as seen from lead wire side) 2-M2.6 x 0.45 D-sub Connector Cable Assembly Terminal No. q !5 !4 @4 !3 !2 @3 @2 !1 !0 o i !6 !7 w e r !8 Lead wire color Dot marking Terminal no. @1 @6 @5 Black None q !

Quick Exhaust Valve Series AQ

01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only 1 2 AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F Caution Be sure to read before handling.

Short Stroke Electric Actuator Series LX

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.

CJ2

B H 10 Y-J010B 15.2 8 21 M4 x 0.7 CP95 SNJ-006B 16 Y-J016B 6 NTJ-006A 16.6 11 21 M5 x 0.8 9.2 8 M6 x 1.0 4 6 5.5 6.4 M3 x 0.5 2.4 SNJ-010B 10 NTJ-010A 12.7 11 M8 x 1.0 4 10 7 8.1 M4 x 0.7 3.2 NDd9 NDH10 R1 NX U1 Part no.

Model Selection 1

Hydrogen peroxide x x x x x x Liquid Hydrosulfide acid Isopropyl acetate x x x x x x x x x x x x Water + Gas Liquid Select an air-operated, chemical valve. I Solvent for painting.

AR20-B to AR60-B

x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28 x 1 28.5 2 *2 28 29.5 27.8 40 37.5 65 37.5 66 AR25(K)-B 1/4, 3/8 1/8 53 71.9 28 27.5 M32 x 1.5 27.5 0 28 28.5 27.8 39 37.5 64 37.5 65 AR30(K)-B 1/4, 3/8 1/8 53 85.6 30.7 29.4 M38 x 1.5 29.4 3.5 28 30.4 27.8 40.9 37.5 65.9 37.5 66.9 AR40(K)-B 1/4, 3/8, 1/2 1/8 70 91.7 35.8 33.8 M42 x 1.5 33.8 3.5

Dual Speed Controller with One-touch Fitting Series ASD 1

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

Modular Type Lubricator Series AL

to 60 AL20 AL10 to 60 AL30 to 60 AL10 to 60 Body size 10 20 30 40 50 60 Thread type Metric thread (M5) Rc NPT G Nil N F AL20 Port size Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Pulling force (N) Stroke (mm) Bore size (mm) Rubber cap Thread size 2 20, 25, 32 M2.5 x 0.45 x 25 or more 4.9 40, 50, 63 M3 x 0.5 x 30 or more 10 3 80, 100 M5 x 0.8 x 40 or more 24.5 3 Remove the bolt for normal operation. It can cause lock malfunction or faulty release. 2. Manual release, Lock type While pushing the M/O knob, turn it 90 counterclockwise.

Thermo-chiller

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C Cooling capacity = Considering a safety

ZCUK

Bore size (mm) 2 Model Note) 10 16 20 25 32 10 ZCUKC ZCUKQ ZCDUKC ZCDUKQ M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 ZCUKD ZCUKR ZCDUKD ZCDUKR 16 20 25 32 U R Note) When using ZC(D)UK 10, use ZP02 to 08U-X11. Pad shape is flat only.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

x 0.8, R threads after installation.