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Pneumatic Circuit 24 11. Exhaust Characteristics,Flow Characteristics, And Time required to reach the specified vacuum 25 11.1. Exhaust Characteristics 25 11.2. Flow Characteristics 26 11.3. Time required to reach the specified vacuum 26 12. Handling Precautions 27 13. Trouble shooting 28 1 - Doc.

No 1 2)3) 4) 5)6) 6) 5)6) 7) O 8) 9) 10) 11) 12) 13) 1 2)3) 4) 14) 15) 10) 11)16) 28 No.ZL3-OM00801-A No 1 ON 10 2) 3) 4) 5) 6) 7) 8) O O 9) 10) 11) 12) 13) 14) 15) ON/OFF 16) 29 No.ZL3-OM00801-A Revision history AUKCA marking added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com

No.PS-OMX0002-A PRODUCT NAME Digital Pressure Switch ( compatible) MODEL / Series / Product Number ZSE20C(F)-L ISE20C(H)-L Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 11 Definition and terminology 13 Mounting and Installation 17 Installation 17 Piping 20 Wiring 22 Outline of Settings [Measurement mode] 24 Pressure Setting 25 3 Step

SN-032B SN-040B Applicable bore size (mm) 25, 32 40 8 M26 x 1.5 32 37 11 M32 x 2.0 41 47.3 H B 6

port side) / SS3YJ3-S41Stations -M3 26.1 L1 + + + + + 3.5 L2 (Light/surge voltage suppressor) 11 P R P R 26.6 22 48.8 [51] Approx. 300 (Lead wire length) L1 2-3.5 (For mounting) L2 3.5 Manual override Manual override (Pitch) P=10.5 12.5 Approx. 300 (Lead wire length) 5 M5 x 0.8 (P, R port) 2-3.5 (For mounting) 48.8 [51] P R 26.6 P R 13 22 (Station n) (Station 1) 11 (Pitch) P=10.5 12.5 4.5

The display accuracy Refer to Trouble No.11 does not meet the specifications. The Display Refer to Trouble No.12 measurement unit cannot be changed. Buttons do not work. Refer to Trouble No.13 Refer to Trouble No.14 -74No.PS-OMV0004-H Troubleshooting list Problem No.

Applicable strokes: 150, 250, 350 Example) LG1H2021PA-150-F2-X2 100 5.3 8.3 400 7.7 12.0 5 to 40 (with no condensation) 200 6.1 9.6 300 6.9 10.8 mm kg kg C kg N mm/s mm Standard stroke Aluminum Stainless steel Body weight Operating temperature range Work load Rated thrust Maximum speed Performance 30 180 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 10mm lead High

200 250 300 350 400 450 500 550 600 650 700 Flow rate (slpm, N2) AK1200HF 150 psig (1.0 MPa) 50 psig (0.34 MPa) Inlet pressure: 100 psig (0.69 MPa) AK1200FC Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections ) 100 0.69 75 0.52 0.62 90 0.55 80 60 0.41 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 0.48 70 0.41 60 45 0.31 0.34 50 0.28

B 200W without brake C Motor specifications Matsushita Electric Industrial Co., LTD Motor specifications Mitsubisi Electric Corporation, Yaskawa Electric Corporation, OMRON Corporation Brake 750W without brake 200W with brake Symbol D L 750W with brake Stroke(mm) M 100 150 10 15 750W without brake N Matsushita Electric Industrial Co., LTD 750W with brake 950 1000 P 95 A0 Standard strokes

Installation example Nm L 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 (mm) : L1 shows the dimensions of the VQC1000 series solenoid valve.

DISASSEMBLY DRAWING . 1819 11. DIMENSIONS . 2024 AIR COMBINATION Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

VQ0 Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ4 Model Passage/Stations Station 5 Station 1 Station 10 VQ5 11 11 11 C [dm3/(sbar)] 0.24 0.24 0.24 1 4/2 (P A/B) b VQZ 2 position metal seal VQ5 00 2.7 2.7 2.7 Cv 1 2 12 12 12 C [dm3/(sbar)] VQD 0.14 0.14 0.14 4/2 5/3 (A/B EA/EB) b 2.9 2.9 2.9 Cv 12 12 12 C [dm3/(sbar)] 0.33 0.33 0.33 1 4/2 ( RA/B)

Refer to Glossary of Terms on front matter 10 for details on the max. operating pressure differential and the max. system pressure. 3.0 4.5 0.46 0.61 2.3 3 8 (10A) 6 0.3 1.1 4.1 8 0.3 1.6 6.4 1.0 10 0.3 2.2 11 1 2 (15A) 10 0.3 2.2 11 Note) Weight of grommet type. Add 10 g for conduit type, 30 g for DIN terminal type, 60 g for conduit terminal type respectively.

OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .

P601010-11 q w Included Parts No. 1 2 Plug nut O-ring Description w q Gauge Nut Assembly Used to connect the pressure gauge and pressure switch. e P601010-18 q w Included Parts No.

2.20 0.30 1/2 (15A) 10 11 2.20 0.30 Note) Weight of grommet type.

Wiring 11 2.1. Communication/Power connector 11 2.2. FE terminal 11 3. Configuration 12 3.1. IODD file 12 3.2. Direct Parameter page 1 12 3.3. IO-Link defined parameters 13 3.4. Vendor defined parameters 15 4. Process data 22 4.1. Input process data 22 4.2 Output process data 26 5. Example of energy saving operation of ejector 28 6. LED indication 29 7. Event 30 8. Specification 31 8.1.

.4 No.5 No.6 -73No.PS-OMV0003CN-G No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -74No.PS-OMV0003CN-G No.

OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .

Air or fluid leakage Check if air or fluid are leaking from the piping. 11 After energizing, the display and output can drift. For detecting fine pressures, warm up the product for 10 to 15 minutes. Check if the product satisfies the specified accuracy after 10 minutes warm up time. Insufficient warm-up time Product failure Replace the product.