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Power supply cable For details, refer to subsection "Wiring" (page 13) in this manual.

Micromesh element 1 20 0.7 2 3 40 SUS316 L EM5, 6 0 to 250 74 30 105 (Absolute) 2 4 HEPO II element Precision cleaning R 0 to 80 0.5 30 PP EJ 6 13 1 Series FQ1 Quick Change Filter Specifications Model FQ1011 FQ1012 FQ1010 1 (L125) 1 (L250) 2 (L250 x 2) No. of built-in elements (L: Element length in mm) Operating pressure Maximum 1MPa Operating temperature Maximum 80C (Not exceeding boiling

Note 6) The flow rate of the body ported product with a built-in silencer decreases by 30%.

Dimensions Manifold type (without PD port) ZZQ1 -B2B-X125 ZQ1 3M(-Q) 2 x Rc 1/4 EXH. port PE P 8 P PE 62 13 Space Saving Vacuum Ejector Series ZQ Manifold Exploded View e y r b y y r y a) part b) view t w a) part t q a) part t Part no. Component Parts Description No. Hexagon socket head cap screw End block L End block R 1 2 3 Refer to How to Order below.

. 13-1 13.1 . 13-1 IDFC60/70/80/90 Series IDX-OM-W095 1 1.1 () 6.2 1.1.1 3 IDFC60/70/80/90 Series 1-1 IDX-OM-W095 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFC60/70/80/90 Series 1-2 IDX-OM-W095 1.2.4 IDFC60/70/80/90 Series 1-3 IDX-OM-W095 1.2.5 SERIAL No.

Micromesh element 1 20 0.7 2 3 40 SUS316 L EM5, 6 0 to 250 74 30 105 (Absolute) 2 4 HEPO II element Precision cleaning R 0 to 80 0.5 30 PP EJ 6 13 1 Series FQ1 Quick Change Filter Specifications Model FQ1011 FQ1012 FQ1010 1 (L125) 1 (L250) 2 (L250 x 2) No. of built-in elements (L: Element length in mm) Operating pressure Maximum 1MPa Operating temperature Maximum 80C (Not exceeding boiling

Micromesh element 1 20 0.7 2 3 40 SUS316 L EM5, 6 0 to 250 74 30 105 (Absolute) 2 4 HEPO II element Precision cleaning R 0 to 80 0.5 30 PP EJ 6 13 1 Series FQ1 Quick Change Filter Specifications Model FQ1011 FQ1012 FQ1010 1 (L125) 1 (L250) 2 (L250 x 2) No. of built-in elements (L: Element length in mm) Operating pressure Maximum 1MPa Operating temperature Maximum 80C (Not exceeding boiling

40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40 40 30 30 20 20 20 20 10 10 10 20 30 40 10 20 30 40 0 0 Load speed : u (m/min) m=0 Load speed : u (m/min) m=0.1 4.3-4 Heavy

Symbol Number of arranged elements 4 7 13 19 Number of arranged elements 30 36 55 83 04 07 13 19 30 36 55 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2) L750 (L250

Inspection record . 13-1 13.1 INSPECTION RECORD . 13-1 IDFB60/70/80/90 Series IDX-OM-V024 Chapter 1 Safety Instructions Chapter 1 Safety Instructions 1.1 Before Using Air Dryer.

Symbol Number of arranged elements 4 7 13 19 Number of arranged elements 30 36 55 83 04 07 13 19 30 36 55 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2) L750 (L250

B AXT661-13ALatching Lead wire length Nil 6 10 20 30 DC negative common Latching 300 mm 600 mm 1000 mm 2000 mm 3000 mm AXT661-13ANMounting of Valves Connector and socket (3 pcs.) only Caution AXT661-12A After confirming the gasket is correctly placed under the valve, securely tighten the bolts with the proper torque shown in the table below.

A A B Section BB PCD Thread Coupling Motor 28.3 10.5 30 8 26 32 6 0.5 Section AA (Housing interior) Coupling mounting dimensions 11 Series LG1H Nonstandard Motors/Matsushita Electric Industrial Co., LTD Drivers Dimensions 5.2 150 160 168 5.2 20 A 105 3 Summary of input /output signals (connector CN-1/F) Dimension table Pin No. 1 2 3 4 5 6 7 8 9 10 11 Pin No. 12 13 14 19 20 21 22 23 24 25

/O.D. mm Symbol Symbol Symbol 01 02 03 04 N01 N02 N03 N04 07 09 11 13 06 08 10 12 07 09 11 13 6 8 10 12 1/4" 5/16" 3/8" 1/2" R, Rc1/8 R, Rc1/4 R, Rc3/8 R, Rc1/2 NPT1/8 NPT1/4 NPT3/8 NPT1/2 50 60 65 80 85 110 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Metric size The figures in ( ) indicate the internal diameter of the applicable hose.

Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions. Installation of Threads Caution Selection Caution KQ2 1.

14 15 16 17 18 19 20 stations Station n L1 L2 1571 VPA300/500/700 Series VPA500 Series/Dimensions Type 41/Common exhaust: VV3PA5-411-03 Stations 92.5 2 x 7.2 (For mounting) 30 N.C.

Model Model Model Port size Effective area Weight Dimensions (mm) R(PT) (mm2) (g) Model Port size Effective area Weight Dimensions (mm) R(PT) (mm2) (g) AN103-01 10 1 23.5 11 3 36 16 14 17 66 22 19 A B D A B D 1 8 1 4 2504-002 33.9 111 62 30 24 106 64 30 24 113 68 30 24 AN203-02 15 1 4 AN303-03 35 3 8 25 84 25 22 AN403-04 60 1 2 2505-003 45.9 3 8 2506-004 50.0 1 2 310 88.5 48 35 2507-006

Valve model VCL2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included

(800) 526-7661 1/4 Female Pipe Thread to Tube 23/32 LTees: 1/4 NPT Female to Tube 21/32 9/16 31/32 13/16 29/32 27/32 11/16 9/16 9/16 11/16 Hex Typ. 13/16 13/16 15/16 19/32 Typ. 1 3/32 65 1/4 FLT2 1/4 FLT1 1/4 FLT4 1/4 FLT5 1/4 FLT6 1/4 FLT3 1/4 FLT2 1/2 111/16 Tees: 1/4 NPT Female to Tube 11/8 17/16 15/16 19/32 Typ. 11/16 Hex Typ. 13/4 11/8 13/8 15/16 11/16 Hex not shown 66 1/4 FT2 1/4

(Refer to "List of output mode" on page 30.) The ability to withstand a voltage applied between an electrical circuit and the body. If more voltage is applied to the product, the product may be damaged. (voltage mentioned here is not power voltage to activate the product).