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Frame) LJ1H20/LJ1S20 M6 bolt M6 bolt 33 33 2-T-slot Recommended dimension 8 (Refer to JIS B0952.) 20 0.02 A: Stroke + 124 A: Stroke + 32 92 0.02 A 92 92 A Positioning hole 2-8H10 4-T-slot Recommended dimension 8 (Refer to JIS B0952.) 67 Long positioning hole LJ1H30/LJ1S30 M8 bolt M8 bolt 30 30 2-T-slot Recommended dimension 8 (Refer to JIS B0952.)

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m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a weight movable by thrust.

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0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

5 Port Solenoid Valve Series SY3000/5000/7000/9000

S, Z and T type (with power saving circuit) should be used within the following allowable voltage fluctuation range due to a voltage drop caused by the internal circuit.

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Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

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G E C T D DL S Z L 1, 2, 3, 4 (Only G)(Except G) 5, 6, 7 (Except DL)(Only T) (Only T) 17-4-13 2 Series VNB How to Order Seal material Body option Nil V Standard Vacuum pilot A B C NBR seals FKM seals EPR seals Thread type Bracket (valve size: 1/2/3/4.)

LJ1H

Frame) LJ1H20/LJ1S20 M6 bolt M6 bolt 33 33 2-T-slot Recommended dimension 8 (Refer to JIS B0952.) 20 0.02 A: Stroke + 124 A: Stroke + 32 92 0.02 A 92 92 A Positioning hole 2-8H10 4-T-slot Recommended dimension 8 (Refer to JIS B0952.) 67 Long positioning hole LJ1H30/LJ1S30 M8 bolt M8 bolt 30 30 2-T-slot Recommended dimension 8 (Refer to JIS B0952.)

Electric Actuator/Slider Type

3 q u t y u o A !9 r e @0 !0 !2 !5 !6 !4 i A w A-A Component Parts No. Description Material Note No.

V100

VK Nil F N T Rc G NPT NPTF Passage symbol Body size N.C. (Normally closed) A N.O.

Made to Order

B-A XC11 Z XC11 Z CG1 Mounting type Type Bore size Stroke A Stroke B-A Suffix MB MB1 Mounting type Bore size Stroke A Stroke B-A Suffix Suffix XC11 Z Except trunnion type XC11 Z CA2 Mounting type Type Bore size Stroke A Suffix Stroke B-A Suffix Except trunnion type CA2K Mounting type Type Bore size Stroke A Suffix Stroke B-A Suffix XC11 Except trunnion type XC11 CS1 Mounting type Tubing

High Vacuum Angle Valve

How to Order [Option] q e u r t XLFV M9N 16 A 1 G G w y i o !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

3 q u t y u o A !9 r e @0 !0 !2 !5 !6 !4 i A w A-A Component Parts No. Description Material Note No.

Rotary Actuator

-XC47 to -XC58 S, W, Y -XC59 to -XC61 Change of port direction S, W, X, Y Z, T, J, K -X7* Heat resistant type (100C) S, W, X, Y Z, T, J, K Angle adjusting screw -X16 Fluororubber seal S, W, X, Y Z, T, J, K -X10 Both sides angle adjustable S, W, X, Y Z, T, J, K 0 0 9 0 y 1 a y A port B port w a y n w e -X11 One side angle adjustable, One side with cushion io k y of e S, W, X, Y Z, T, J, K

15

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Confirm the total of x, y and z is 1 or less. x + y + z 1 When 1 is exceeded, consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3. Wall x y x z 2.

LJ1H

depth 20 8H8 depth 10 Cable entry side Body mounting reference plane Z section detail 8H8 depth 8 130 200 52 52.5 Z section Stroke + 150 (table movement range) 53 190 92 3.3 55 90 82 A section 5.8 1.7 4.8 Stroke + 393 135 A section detail (Switch groove) Stroke + 32 92 3-8H10 depth 5 11.5 20 67 90 (T-slot pitch) 45 62 92 58 30 9.4 8-6.6 4.5 10 Stroke + 216 18 T-slot dimensions The body

CJ2

2 Brass NBR Rod seal Piston A t !3 Brass NBR Tube gasket Piston B y !4 Zinc chromated Piano wire NBR Piston gasket Return spring u !

CRB2/CRBU2/CRB1

Single vane type Double vane type 0 -5 +4 0 a r n n R e o 9 g o g t 0 0 n a i e 9 +4 0 a t t 0 i a o r 0 1 e t 1 n n o 8 g o R 0 e n r i a g a +4 0 t a n n r t g a n o e r o R n i 2 t o a 7 t i 0 t o a R t o +4 0 R For size 40 actuators, a parallel keyway will be used instead of chamfer.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

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Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead