SMC Corporation of America
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Shock absorber Lock plate 1191 MY1B Series Construction 25, 32, 40 MY1B25 to 40 r @3 @9 y u t !5 w @7 !1 !7 !8 !9 @0 e #7 i !6 @5 #5 q #9 #4 !3 #2 !2 @1 !0 @2 @6 #6 #3 @8 #1 @4 o #8 !

[kPa] to [kgf/cm2]. 1 [kPa] = 1.0197 X 102[kgf/cm2] 1.01972 X 102 X 80 = 0.81576 [kgf/cm2] 3.14-13

Series: Bore size 10 16 20 25 32 40 50 63 80 100 M C Slide bearing guide type Cam follower guide type Stroke adjusting unit Combination Symbol Mounting pcs.

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Red flashes if the CPU is abnormal. q w e r t y u Green lights up when emitters require cleaning.

0.8 80 0.7 Circulating fluid pressure[MPa] 70 Availavel area 0.6 60 0.5 Pump head[m] 50 Outret60Hz 0.4 40 0.3 30 Return port Outlet50Hz 0.2 20 0.1 Availavel area 10 0.0 0 0 5 10 15 20 25 5 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS030--20-T) HRS Series 9.6 Pump capacity 9-7 HRX-OM-R016 Chapter 9 Documents 9.6.3 HRS030--20-MT 0.8 80 0.7 Circulating fluid pressure[MPa] 70 0.6

Power supply Pressure switch S = 12.1 log10( ) . (6) Thermometer V PS + 0.1 293 Solenoid valve Pressure control Control t P + 0.1 T circuit equipment Equipment for test S : Effective area [mm2] V : Air tank capacity [dm3] t : Discharging time [s] Air tank Rectifier tube on the Rectifier tube on the downstream side Filter Air Shut off upstream side Pressure gauge or pressure convertor supply

[IDFA150F-38/40] (100.7m) () (10 2m) DIN 80 268 217 20 8x 18 4x 18 A A 4x 20 A 160 1300 160 720 1290 9351 20 K K 64 75 DIN 80 (17 ) 40 1332 (14~18) 1432 R () P.1-5 P.1-5 P.1-5 () 9902 20 475 1030 950 IDFA100F150F 6 5 6.3 IDX-OM-U022 6. 6.4 [IDFA100F/125F] R R GFCI PE L1 L2 L3 TB1 THR MC1 CM OLR MC2 FM1 PRR FM2 T SWL PLC TB2 Y0 1 MC1 COM0 2 MC1 Y3 3 Y1 MC2 COM3 PRS1

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Series AF modular style air filter is a cost effective, clean looking solution to your filtration needs. Its' modular design allows connection with other SMC air preparation equipment. The series is available in six size options with a wide range of accessories.Modular air filter , Prevents contamination , Lighter weight than old style modular AF , Thickness reduction of resin case provides

available in six size options with a wide range of accessories.Modular air filter , Prevents contamination , Lighter weight than old style modular AF , Thickness reduction of resin case provides increased capacity (approx. 1.3 times more). , Improved water separation efficiency extends the service life of filter elements , Rc, NPT or G(PF) type threads, VACUUM FILTER, VACUUM FILTER, N71, 80

Series AF modular style air filter is a cost effective, clean looking solution to your filtration needs. Its' modular design allows connection with other SMC air preparation equipment. The series is available in six size options with a wide range of accessories.Modular air filter , Prevents contamination , Lighter weight than old style modular AF , Thickness reduction of resin case provides

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: A (2 NPN Outputs), Unit Specification: Unit Switching Function, Operation Manual: N (None), Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket for w/o Flow Adjustment

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber)

This is a legacy product, and replaced byVM220-N02-32BA VM (VFM/VZM) MECHANICAL VALVE. MECH VALVE W/ACTUATORS. VALVE. VM BODY PT 1/4. .00000 lb. FA.

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)