Modular F.R.L. Unit

Note 3) Bowl assembly for AF30 to 60 models comes with a bowl guard (steel band material). 25 Air Filter AF10 to 60 Dimensions L AF10, 20 AF50, 60 A G D Bracket (accessory) L Bracket (accessory) F D M G K K F M J J B E E B OUT IN H C OUT IN H C Port size OUT OUT Port size o s Drain A P Min. clearance for maintenance 25 AF30, 40, 40-06 L Bracket (accessory) A D G F M K J 40 B E Drain Min.

Battery-less

With motor cover: LEYG16DmE -mC A B C H Dimensions (Size 16) U 35 Motor cover direction H D1 42.3 D2 42.3 D3 55.1 D4 47 A + Stroke Y X2 Cable length 250 With lock/motor cover: LEYG16DmE -mW A B C Motor Cover Direction Cable length 350 D1 D2 J J J J J J J J 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 30.3 22.2 J 30.3 22.2 J 30.3 22.2 J 22.2 30.3 J 22.2

Table of Contents

C 4-O D T 2-P Q E B U W S K L Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AA I A R AP AB Y + Stroke X J V Z + Stroke AC AD 8-AF AE Stroke range (mm) Bore size (mm) AF AE AD AC AB AA G F N E M D L C K B J AP H I A 20 30 75 16.5 11 12 5.5 45 92 25 60 80 24 60 108

PSxx-OMR0001CN

-2No.PS-OMR0001CN-J 1 / 1 1.5 *3) *3)1 1 -3No.PS-OMR0001CN-J 1 SMC 100 1 -4No.PS-OMR0001CN-J 1 / (5 m ) CE 50 N 30m DC(-)() () IP67IP65 -5No.PS-OMR0001CN-J 1 41 LCD VX2 (2 )AR20 () -6No.PS-OMR0001CN-J 2 (0.01 mm0.03 mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMR0001CN-J 2 2 9 0.010.03mm 0.020.15mm 0.050.30mm DIN F G H 7 10 B Rc1/8 4

Table of Contents

K Y A J K B Y C D Misc.

AC

AFM3000 to AFM4000-06 Combination Table/Accessory and Option Combinable Impossible Depends on the model Applicable mist separator Option Auto drain Sym Accessory/Option AFM2000 D D C 2 6 8 C J R W AFM3000 AFM4000 D D C 2 6 8 C J R W Pressure differential auto-drain Float style auto drain (N.O.)

7

I F C e d Grommet (with surge voltage suppressor) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet Grommet (with surge voltage suppressor) DIN terminal C T U T T U U V 10,

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

Electric Actuators

LJ1 LG1 LC1 LX LC6D/LC6C Switches 76 46 38 2-M2.5 x 0.45 thread depth 4 5H9 +0.030 0 10 3 depth5 J 27 J x K 25 8 Motor unit Refer to "Applicable Motor List" below for dimensions. (This drawing shows a Tamagawa Seiki, Co., Ltd. motor.)

NCA1

None Nylon Neoprene Nil J K MT4 T MP4 C Standard stroke Inches MP1 MS2 MT1 MT2 Air cushion Nil Without auto switch Auto switch X S U J Stroke Both ends None Head end Rod end Nil N H R Hundredths of an inch For the applicable auto switch model, refer to the table on page 6-15-7. Auto switches are shipped together, (but not assembled.) Mounting Bracket Part No. Part no.

2 Phase Stepper Motor/Without Motor Brake Series LXS

Proximity switch (optional) depth 5 10 7.5 15 pin plug 5H9 +0.030 0 E-M5 x 0.8 thread depth10 Home position switch (optional) 6 Refer to page 100 for connection cables. 76 46 38 2-M2.5 x 0.45 thread depth 4 5H9 +0.030 0 10 3 depth5 J 27 J x K 25 8 Motor unit Refer to "Applicable Motor List" below for dimensions. (This drawing shows a Tamagawa Seiki, Co., Ltd. motor.)

NCA1

None Nylon Neoprene Nil J K MT4 T MP4 C Standard stroke Inches MP1 MS2 MT1 MT2 Air cushion Nil Without auto switch Auto switch X S U J Stroke Both ends None Head end Rod end Nil N H R Hundredths of an inch For the applicable auto switch model, refer to the table on page 6-15-7. Auto switches are shipped together, (but not assembled.) Mounting Bracket Part No. Part no.

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

ZP

(for Heavy-duty) Buffer assembly model Applicable pad model Series ZP Page ZP40H ZP50H ZP40HB ZP50HB P. 80 P. 81 ZPB-T1 (J/JB/JF)01 ZP63H ZP80H ZP63HB ZP80HB P. 80 P. 81 ZPB-T2 (J/JB/JF)01 ZP100H ZP125H ZP100HB ZP125HB P. 80 P. 81 ZPB-T3 (J/JB/JF)01 ZP40H ZP50H ZP40HB ZP50HB P. 82 P. 83 ZPB-X1 (J/JB/JF)01 ZP63H ZP80H ZP63HB ZP80HB P. 82 P. 83 ZPB-X2 (J/JB/JF)01 ZP100H ZP125H ZP100HB ZP125HB

LX

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

Nozzle Diameter: ø1.0mm, Vacuum Pressure: -48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A, SUP: One-touch Fitting ø1/4", VAC: One-touch Fitting ø1/4", EXH: One-touch Fitting ø5/16", Accessories: w/Standard Bracket, w/Silencer

Nozzle Diameter: ø1.0mm, Vacuum Pressure: -90 kPa, SUP: One-touch Fitting ø1/4", VAC: Screw-in NPT 1/8, EXH: One-touch Fitting ø5/16", Accessories: w/Standard Bracket, w/Silencer

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 09 (One-touch Fitting ø5/16"), Accessories: S (w/Standard Bracket, w/Silencer)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: 07 (One-touch Fitting ø1/4"), VAC: N01 (Screw-in NPT 1/8), EXH: 09 (One-touch Fitting ø5/16"), Accessories: S (w/Standard Bracket, w/Silencer)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 09 (One-touch Fitting ø5/16"), Accessories: S (w/Standard Bracket, w/Silencer)