MHx-OMM0057

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / 1 1.5 *3) *3)1 1 () 3 - 2

Clean Gas Filter

MPa 0.1 MPa B IN 0.01 AM 0.7 MPa AMD A 0.001 AMH 0.5 MPa A B Model Connection SFA102-02 SFA202-02 SFA302-02 76 96 120 89 93 101 TSJ 1/4 Tube Swage Joint AME AMF 0.0001 1000 1 10 100 ZFC SFA103, SFA203, SFA303 Flow rate L/min (ANR) SF SF 2 x UOJ 1/4 SFA30 SFD 7 9.5 6.5 0.1 LLB B Inlet pressure IN 0.3 MPa AD Max. flow rate line Pressure drop MPa 0.1 MPa 0.01 GD A 0.7 MPa A B Model Connection

PSxx-OMF0005CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

VDW Series

VDW 2 0 1 B 1 Series Lead wire length OUT (2) 1 2 3 10 20, 200 30, 300 300mm 600mm Nil L1 Note) Note) Type L1 is optional. (1) IN 2 port valve Voltage Type Note 1) Maximum operating pressure differential MPa (psi) 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Orifice size mm B C1 C2 20, 200 10, 30 300 Model Pressure port 2 Note 1) Pressure port 1 1 0.4 (58) 0.9 (130.5) VDW10 1.6 0.2

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Description Material Note ASF Body A Body A PBT PBT q q Body B Elbow body Electroless nickel plated Brass PBT w w Needle Body B Electroless nickel plated Electroless nickel plated Brass Brass e e Seat ring Needle Electroless nickel plated Electroless nickel plated Brass Brass r r Spring Seat ring Electroless nickel plated Steel wire Brass t t U seal Spring HNBR Steel wire y y Cassette U seal

06-mgz-e

Contents Bore size (mm) MGZ20-PS 20 25 32 40 50 63 80 MGZ20-PS MGZ25-PS MGZ32-PS MGZ40-PS MGZ50-PS MGZ63-PS MGZ80-PS @0 21 Rod seal A MGZ25-PS Rod seal B 21, 22, 23 and 24 are non-replaceable parts, so they are not included in the seal kit.

Exhaust Cleaner for Vacuum Pump AMV Series

AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E

KB

Screw size: Cross recessed round head screw (M6 X 1 X 8l) Screw color: Black Dl MS Tl 2.1-80

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

switches 32 40 B Through hole/ Double end tap common (standard) 32mm 40mm Number of auto switches Bore size 12 16 20 25 Port thread type 2 pcs. 1 pc.

ZSP1

Hysteresis 0.5 kPa Internal orifice 0.5 0.8 Supply voltage 12 to 24 VDC (Ripple 10% or less) Output type NPN open collector 30 V, 80 mA Indicator light ON: When output is ON.

Large Flow Lubricator AL800/900 Series

5 is attached. 1045 AL800/900 Series Dimensions Semi-standard AL800/900 Metal bowl Metal bowl Port size D A B B B C B Maintenance space E IN OUT Metal bowl with level gauge With drain cock Semi-standard/Dimensions B Model Metal bowl Metal bowl with level gauge AL800 AL900 Model Port size With drain cock 297 303 306 312 D A B C E AL800 AL900 286 292 125 125 1 , 1 2 100 100 286 292 59 63 1

Title not found

P3, L10 1 2 1 2 1/2 B Thd D A Thd C Hole Dia. Stainless Steel Threaded Parts Page & Part No. Line No. Page & Part No. Line No. D Line No.

Title not found

When used in stopper application mounting hole, diameter should be 2d or more = E b o I il Cro.z Compact Guide Cylinder:Series MGQ Permissible lateral load (Ordinary-use load) F + 12 t6 ' i 4 : : : 49 25 51 F t 108 A6 104 176 3 3 206 686 343 80. : . l ' s s i 1070 lN=OlO2kql r(N.m) Bore size Modd to 20 r 3 B ' .50 75 .t( P , 0.29 o.24 o.21 0.18 0.16 0.48 o.39 0.31 o.37 0.33 -^ I McoM 0.51

Precision Clean Regulator Series SRP

IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

Precision Clean Regulator

100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate L/min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure

Gun Type Ionizer

Contamination and wear of emitters b. Loosening and damage of nozzles c. Twists or crushing of connected tubes d. Hardness and deterioration of connected tubes e. Air leakage 192

Compressed Air Preparation Filter

Dimensions [mm] Auto drain (1.0 MPa) Auto drain (1.6 MPa) Drain guide B C D E F G Bracket related dimensions Model Port size A H I J K L M N O P AFF70D, AM70D, AMD70D 1, 1 1/2 391.5 379.5 382 31.5 144 136 68 23 40 124 82 48.4 90 18 9 16 10 2.6 AFF80D, AM80D, AMD80D 1 1/2 404 392 394.5 38 170 160 80 23 40 148 93.5 58.5 110 22 11 20 12 3.2 AFF90D, AM90D, AMD90D 1 1/2, 2 470 458 460.5 38 170

HRX-OM-W032

B Contact output signal 3 selected alarm Sets the alarm selected for the contact output signal 3.

KK/KK13

P-80 (D)

IR10-OM00007

JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. -2- . / 1 1.5 *3) *3) 1 1 () -3- IR1000 (1) 0.2% F.S.