HRX-OM-W032

Status (5): 50 minutes passes after starting operation. Alarm monitoring has started. It shows that the "50 min" setting does not influence the alarm monitoring under these conditions.

Series HAW Water Cooled Aftercooler 1

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

JXCx-OMT0034CN

ULUL1310Class2 6.2 2) AWG20(0.5mm (24V0V) 60 2) EMG AWG20(0.5mm (EMG+,EMG-) 60 8mm 21 - D (100) D 6.3 (CN2SW)ON (EMG+,EMG-) (LEC)EMG (CN2SW) RY CN4 CN2 EMG+ EMG24V 0V (CN2SW)ON EMG+,EMG-(LEC)OFF (LEC)(EMG+,EMG-) 22 - (LEC) ()LEC6 DC24V 0V Ry EMG+ Ry EMG(1 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (2 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (3 ) BK RLS EMG Ry C 24V 24V M

IR1000/2000/3000

P-84.5 (YG)

Precision Cylinder Series MTS

MT-S8 8 40 MT-S12 12 Caution Do not apply a load that is 50% or more of the theoretical output.

EX600-SEN_eng

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range The status display LED displays the power supply and communication status.

EX600-SEN3_4_eng

Safety cannot be assured in the case of unexpected malfunction. : This switch can be enabled and disabled by parameter. -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range -20 to 60 oC Storage temperature range Switch for diagnosis: Allocates the diagnostic data to the input data.

EX600-SEC_eng

Tightening torque: 0.7 to 0.8 Nm. 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 : Mode 3 is a function for extension in the future. (not to be used.) Vibration resistance After maintenance is complete, perform appropriate functional inspections. Stop operation if the equipment does not function properly.

EX600-SPN_eng

. surrounding air temperature rating: 50 oC) Operating temperature range Node flashing test command received. (2)Mount and tighten the end plate at one end of the unit.

EX600-AX_AY_AM_eng

URL http://www.smcworld.com -10 V to 10 V -20 mA to 20 mA for 2 hours each in direction X, Y and Z respectively (De-energized) 24 VDC Class2, 2 A 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 0 V to 10 V 0 mA to 20 mA Content Content Content 0 V to 10 V 0 mA to 20 mA 0 V to 10 V 0 mA to 20 mA

AMPSeries

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

EX600-SDNA_eng

Displays the diagnosis status of the unit. 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 Minor communication error. Fatal communication error. The element in SI unit is broken. Connection is not established. Communication is normal. Double checking the node address. Communication error. The power supply for control and input is Off.

EX600-SMJ_eng

Displays the diagnosis status of the unit. 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 Communication error has occurred. Communication is normal. Communication is not established. Or, the power supply for control or input is Off. A unit other than the SI unit has been diagnosed and detected. The power supply voltage for output is abnormal.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional

SY3000V-OMY0001

-2SY3000-OMY0001 / 1 1.5 *3) 3)1 1 () -3SY3000-OMY0001 SY Series 5 / / () ( ) () 1 DC DC N.O.( 33 AB , 3 , , () 3 EXH 0.1 2 () () C-R ( ) C-R 3 3 1) 2 , 4 No.SY3000V-OMY0001 SY Series 5 / / 2) ,1V & -10 ,1 1 3 1) M5 () 1/61/4 11.5Nm ) 2)Rc N m Rc 1/8 35 Rc 1/4 812 Rc 3/8 1416 5 No.SY3000V-OMY0001 SY Series 5 / DC () m [] ()ISO VG32 (MSDS) IP65 IP67(IEC60529

VFR3000-OMJ0001

SOL.ASOL.B 1 AC 2 SOL.ASOL.B 1 DC24V 2 () () 1.1Nm ) SOL.ASOL.B 1 AC 2 SOL.ASOL.B 1 DC24V 2 9 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 3 3 3 3 DIN DIN DIN DIN / / / / 01T 01T 01T 01T DIN (A B AB) COM 1.25-3.5M1.25Y-3L1.25-3M VFR3000 AB+ B+COM -COM 90 O 1) 0.9MPa 2) 3) MAX.50 4) 2 5) P 3 AB ARBF3000 P AB ARBF3050 A B P 1.0MPa 1)

VFR5000-OMN0001

N.O. 9 VFR5000-OMN0001 VFR5000 Series/ DIN / 01T DIN 180 (A B AB ) COM ARBF5050 A B P 1.0MPa 1) 1.25-3.5M1.25Y-3L1.25-3M VFR5000 A-B+B+COM -COM AB+ B0.1~0.83MPa 2) VFR5100 A COM 5~60 () 3) VFR5200 A COM B Rc1/8 3 (kg) 0.83 A COM B VFR5 400 PA 44 38 32 (mm2) P1=0.7MPa;P2=0.5MPa S PB 38 40 31 5 AEA 90 (mm2) P2=0.5MPa S AEB 77 1) 0.9MPa 2) 3) .50 4) 2 5) P A B ARBF5000 ARBF5000

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

4.68 (0.26) A/BR 4.68 (0.26) C8: PA/B 12.6 (0.7) A/BR 12.6 (0.7) A, B port piping specifications SY3000 SY5000 SY3000 Operating pressure range External pilot operating pressure range MPa 2 position single Pilot pressure range 2 position double 0.25 to 0.7 Port size 3 position A/B ports Ambient and fluid temperature C Maximum 50 10 3 5 3 SY5000 2 position single, double 3 position Max. operating

Pressure switch for energy-saving control ejector with N.O. type valve

System Error If the error can not be reset after the above measures are taken, then please contact SMC. -54NO.TQ1050188-OM002 Specification Specifications Rated pressure range 100 to -100 kPa Set pressure range 105 to -105 kPa Proof pressure 500 kPa Smallest settable increment 0.1 kPa Applicable fluid Air Power supply voltage 12 to 24 VDC 10%, Ripple (p-p) 10% or less (Protected against reverse

Direct Operated Precision Regulator Modular Style Series ARP3000 1

Handle Note Body 1348102#1 ADC POM e Piston assembly Bonnet 1348104A r POM POM, NBR Valve 1348105 t Brass, NBR Valve spring 1348109 y Stainless steel 1348108 (For 0.85 MPa) Steel wire Adjusting spring u 1348108-1 (For 0.3 MPa) Dimensions Panel cutout dimensions 26 R2.5 SUP OUT SMC K C O P A A L U S H 12 37 54 25 1.6 (Max. thickness 4.5) 44 79.5 (When regulating pressure = 82) 5.4 10 31.5