CG5-S

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 +0.4 +0.2 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.058 0 +0.058 0 0.2 0.4 8 20 20 I-G02SUS Y-G02SUS 8 8 8 34 8.5 16 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS +0.4 +0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25,32 10 10 10 10 41 10.5 20 30 M10 x 1.25 12.8 14 41 10.5

Table of Contents

Assuming the attachment material is aluminium alloy (relative density=2.7), r1= 16.4 (mm).

5 Port Air Operated Valve Series VFA3000 1

1 5 Port Air Operated Valve Series VFA3000 How to Order SA Thread type (Including pilot port) VA Nil F N T Rc G NPT NPTF SA Port size (P, A, B port) VA 01 02 1 8 1 4 Option R1, R2 port are 1/8.

VZA2000

258-9200-www.stevenengineering.com Pilot port (A side) 2-M5 x 0.8 sub-plate side (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 3 position exhaust center: VZA4441--01 02 Pilot port (B side) Body side 2-4.5 Mounting hole Pilot port (A side) 2-M5 x 0.8 body side Pilot port (A side) 2-M5 x 0.8 sub-plate side (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 5

SX

R1 OMRON Corp.: CompoBus/S System (16 output points) SS5X3-45SA-05U-C61 set (45S with serial 5-station manifold base no.) SX3140-5LOZ2 sets (Single solenoid part no.) SX3240-5LOZ3 sets (Double solenoid part no.)

Table of Contents

) kit (Terminal block) 2-4-1 2 Valve Specifications Sonic conductance: Type of actuation Voltage Electrical entry Manual override C [dm3/(sbar)] M plug connector Push type, Tool required L plug connector Locking type (Manual) Single Locking type Closed center Double Exhaust center Pressure center Grommet Plug-in 12 V 24 V DC 100 V 110 V AC 200 V 220 V AC 50/60 Hz 50/60 Hz 4/2 5/3 (A/B R1

Plate Cylinder with Lock Series MLU

I-MU02 I-MU03 I-MU04 I-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 Knuckle pin and snap ring are included. Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1

IDX-OM-W093

35 40 32 /AC200V (50Hz) /AC200/220V (60Hz) () 10%4 7-2 200V 770/910 1260/1590 1770/2170 2270/2960 5) 50/60Hz W 200V 790/970 1150/1380 1700/2160 2330/2980 200V 4.2/4.6 6.7/7.9 9.7/10.9 11.8/14.8 5) 50/60Hz A 200V 3.0/3.2 4.3/4.4 6.5/6.8 8.9/9.1 (30mA) 6) A 200V 10 15 20 30 200V 15 20 10 R410AHFC)GWP2,0887 200V 39010 53010 63010 78010 g 200V 34010 52010 74010 75010 0.1MPa 12 mm R2 R1

IDX-OM-U010

R1 1/2 R2 Weight kg 49 68 95 110 Coating color Panel: White1 Base: Gray2 Note 1: The operating range does not guarantee use with normal air flow capacity.

IDX-OM-W095

R1 1/2 R2 49kg 68kg 95kg 110kg 1 2 1 2[3275%] 3 4 5R 30mA 6IPCC4 AR4 R410A GWP2090 7L V1.6MPa IDFC60/70/80/90 Series 7-1 IDX-OM-W095 oC 35 40 45 50 55 60 65 70 75 80 1.58 1.46 1.09 1.00 0.79 0.64 0.55 0.51 0.49 0.47 MPa 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.01.6 0.67 0.79 0.88 0.91 1.00 1.02 1.04 1.09 20 25 30 35 40 45 1.19 1.13 1.06 1.00 0.90 0.77 IDFC6010 450.8MPa30 2.8 m 3/min 1.09 1.02

IDX-OM-V020

R1 1/2 R2 Weight kg 49 68 95 110 Coating color Panel: Urban white 1 Base: Urban gray 2 IDFA60/70/80/90 Series 7.1 Specifications 7-1 IDX-OM-V020 Chapter 7 Documents Note 1: The operating range does not guarantee use with normal air flow capacity.

IDX-OM-W032

R1-1/2 R2 10mm 1 2 54kg 62kg 100kg 116kg 1ANR 2065% 2 3 30mA 4() 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDFA Series 6-1 6 1 IDX-OM-W032 6 6-3 IDFA22EIDFA37E IDFA55EIDFA75E mm A B C D E F G K L M N P Q R IDFA22E R1 290 775 623 134 405 698 93 13 314 85 600 340 IDFA37E R1-1/2 855 680

PSxx-OMU0002CN

V ) (2 ) UL (1 20 ) -5No.PS-OMU0002CN-D * FG (35 N () () *() 6 33 () () DC(-)() () * -6No.PS-OMU0002CN-D ( ) () CE -550(5) * 1015 10 1% 2264 LCD * -7No.PS-OMU0002CN-D M5 ISE20A X M 3 ISE20A -0.100~1.000 Mpa Y ZSE20A 0.0~-101.0 kPa K ZSE20AF -100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1

PSxx-OMU0005CN

/8 N01 NPT1/8 C4L 4mm C6L 6mm -8No.PS-OMU0005CN-C / A ZS-46-A1 38L (2 ) B ZS-46-A2 38L (2 ) ZS-46-B + ZS-46-D ZS-46-5F 5 2 m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4L 6mm ZS-46-C6L -9No.PS-OMU0005CN-C OUT1 LCD OUT2 LCD 4 ON/OFF ON/OFF (kPaMPa) -10No.PS-OMU0005CN-C digit() 1digit=1kPa 1,2,3,,99,100 1kPa F.S.() -0.100 1.000[MPa]F.S.=1.000(-0.100)=1.100[MPa] (1F.S

PSxx-OMS0006CN

UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) -5No.PS-OMS0006CN-G * FG (35 N () ,() *() 6 33 () () 30m DC(-)() * -6No.PS-OMS0006CN-G ( ) () CE/UKCA -5~50(5 ) * , 1015 10 1% 2053 LCD * -7No.PS-OMS0006CN-G N M5 ISE20 3 ISE20 -0.1001.000 MPa Y ZSE20 0.0-101.0 kPa K ZSE20F -100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1

PSxx-OMM0006CN

UL1585 2 30[Vrms] 42.4[V ]2 UL (100 ) JIS B 8392-1 1.1.21.6.2:2003 () -5No.PS-OMM0006CN-E * (16 ) / / FG (49 N ) () () M8(3 ) * 6 33 () () 10m DC(-)() ( ) -6No.PS-OMM0006CN-E * ( ) () CE CE -550 (5 ) * ON , 1015 10 /1 2351 LCD -7No.PS-OMM0006CN-E * -8No.PS-OMM0006CN-E (M8(3 )11 ) 01 X M ISE40A 2 K ISE40A -0.11.000 MPa ZSE40A 0.0-101.3 kPa ZSE40AF -100.0100 kPa 1 01 R1

VQZ100V-OMT0001

) 5(R1) 5(R1) 5(R1) 1 1 1 1 P P P P) ) ) ) VQZ100/1000 KQ2H06-M5 AN120-M5 KJS04-M5 VQZ200/2000 KQ2S06-01S INA-25-46 IN-457-32(6 ) VQZ300/3000 KQ2H08-02S AN101-01 KQ2H06-01S 3 3 3 3 VQZ VQZ VQZ VQZ 82 82 82 82 ,N.C.

Pressure Gauge Guide

Size Symbol R1/8: M5 (Female thread) 01 R1 R 1/16 Max. display pressure Symbol 10 0.1 Unit: MPa Pressure other than 1.0 MPa is not available. 14-11-3 3 Pressure Gauge Guide Pressure Gauge for General Purpose /With limit indicator O.D.: 37 G36, GA36 Standard Specifications Model G36 GA36 Back side thread Vertical side thread Type 1 8 Port size (1) (Option M: With M5 female thread) R Air Fluid

Vacuum System Peripherals:

(VJA314) Attachment Body ported individual interface ZX1-R1 Blanking plate assembly ZX1-BM1 Note) Low wattage type is 12, 24 VDC. Air operated valve is controlled by external 3 port valve. External release is done directly from external 2 port valve.