MXU

MG Lateral Mounting (Body tapped) CX D-X Front Mounting l1 l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M4 x 0.7 2.5 12.7 9.4 20M5 x 0.8 5.1 15.6 11.2 M5 x 0.8 5.1 20.6 16.2 Data Vertical Mounting (Body tapped) l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 5 M4 x 0.7 2.5 7 M4 x 0.7 2.5 9.5 Top Mounting l Model MXU6 MXU10 MXU16 Bolt Maximum tightening

CJ2

Dd9 d L m t CJ2 l Applicable bore (mm) Applicable snap ring Part no.

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

CUJ

Auto switch CUJ cylinder Cylinder B Cylinder A Auto switch Magnetic substance Non-magnetic spacer of 2.5 mm or more Without Shielding Plate d Bore (mm) 10 L 6 8 L d 19 6 19 6 19.5 6 The space can be reduced by attaching shielding plates (steel plates 0.2 to 0.3 mm thick) to the sides of the cylinders facing each other.

RHC

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000

High Power Cylinder Series RHC

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 10

SYJ Series

On B side SY3000-37-80A-7 On A side 1 to 8stations SY3000-37-80A-3 On B side SY3000-37-80A-10 On A side 9 to 12stations SY3000-37-80A-6 On B side SS5YJ7-21,41SA SY3000-37-80A-12 On A side 13to16stations SY3000-37-80A-9 On B side Note 1) The above is for station addition or maintenance.

KS/KX

(mm) D2 L A M D1 Applicable tubing KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S M5 x 0.8 M6 x 1 38.5 11 13 39 35 8 10.4 16 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 12.8 15 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

AS121FG-M5-23 AS121FG-U10/32-01 9.6 25.8 28.6 12.3 8 7 12.7 17.3 22.1 8.4 8.4 3.2 M5 0.8 25 1/8" 22.2 12.3 17.3 22.1 12.7 AS221FG-01-23 AS121FG-U10/32-03 14.2 31.1 36.1 14.3 12 16 12.7 20.4 27.5 9.3 9.3 3.2 32.1 5/32" 27.1 R 1/8 8 10-32 UNF 28.6 25.8 25 22.2 7 9.6 AS121FG-M5-04 AS121FG-U10/32-05 21.3 26.1 12.3 12.7 17.3 22.1 9.3 11.4 4 3/16" 16.5 M5 0.8 11.7 9.6 25.8 28.6 8 7 25 22.2 AS121FG-M5

Compact Direct Operated 2 Port Solenoid Valve for Water and Air SeriesVDW10/20/30 VX2 How to Order Valves (Single Unit) VXD VD W 2 1 1 G 2 01 VXZ For Water, Air, Vacuum VXE Made to Order (Refer to page 244.) Series VXP 1 10 Valve type Option 2 20 VXR

Model Av x 106 m2 C [dm3/(sbar)] N.C. 0.96 Cv 0.40 b 0.14 Cv converted 0.04 1 0.04 VDW10 M5 1.6 0.07 0.07 1.7 0.25 0.30 1.6 0.09 0.08 1.9 0.45 0.31 M5 1/8 (6A) VDW20 2.3 0.18 0.18 4.3 0.45 0.58 3.2 0.33 0.30 7.2 0.38 1.2 2 0.16 0.16 3.8 0.52 0.52 1/8 (6A) 1/4 (8A) VDW30 3 0.30 0.28 6.7 0.52 1.0 4 0.46 0.44 11 0.49 1.5 244

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 Weight (g) ASV120F-M3-04 ASV220F-M5-04 ASV220F-M5-06 Model 5 8 9 M3 x 0.5 M5 x 0.8 M5 x 0.8 5.5 8 8 9.3 9.3 11.6 7.2 9.6 9.6 21.4 22.8 23.6 25 27.6 28.4 9.8 11.1 11.1 28.6 31.4 31.4 26.1 28.6 28.6 25.8 27.7 27.7 23.3 24.9 24.9 12.7 12.7 13.5 4 4 6 Reference dimensions of M thread after installation. Inch Size Applicable tubing O.D. d T H D1 D2 L1 L2 L3 L4 A Max. Min. Max. Min.

SMC Pneumatic Clean Series

Bore size NTJ-010A NTJ-006A 8 6 M3 x 0.5 2.4 5.5 6.4 5.5 6.5 M3 x 0.5 6 12.5 M4 x 0.7 3.2 7 8.1 7 8.5 M4 x 0.7 8 14.5 NTJ-015A 10 M5 x 0.8 4 8 9.2 10.5 M5 x 0.8 16.5 10 9 (mm) Standard C D E F B A J K L M N O P G H I Bore size 8 6 M2.5 x 0.45 13 7 7 10 9 19 3 5 4 9 3.5 8 7 5.3 24 M3 x 0.5 13 7 8 11 10 21 3 6 5 11 4.5 10 8 5.3 25 10 13.5 M3 x 0.5 7 8.5 11.5 10.5 22 3.2 6 6 12 5 11 8.5 5.6

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

ASD Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) AS AS-FE KE AS-FG Number of needle rotations Number of needle rotations Number of needle rotations AS-FP Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate L/min (ANR) Flow rate L/min (ANR) AS-FM AS-D AS-T ASP Number of needle rotations Number

IDX-OM-U021

V IDF100F V IDF125F V IDF150F B 1-3 IDF100150F 1 4 IDX-OM-U021 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm 2 M3 6.5mm 1.25mm 2 1-3 IDF100150F 1 5 IDX-OM-U021 1 3.6 5.2 5.2 (IDF150F) R OFF L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

Low-Speed Rotary Actuator

Round plate (Including column) Position of rotational axis: Through the center Number of teeth = a (B) axis 1. Find the moment of inertia I for the rotation of shaft (B). r B 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teeth = b 5.

ITV0000

Straight type Right angle type Built-in One-touch fitting With error indication LED Brackets Flat and L brackets are available.

AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

AS-FPQ/AS-FPG

AS121FP-M5 AS221FP-01 AS221FP-02 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08,10 06,08 06 04 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FP-03 AS421FP-04 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa 12 10 Flow rate (L/min (ANR