Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Real-time switch output Unit switching Hysteresis mode ON YES Accumulated flow l Display Real-time flow rate l/min OFF P-1 P-2 Real-time flow rate GPM gal (US) "P" Window comparator mode H : Hysteresis GPM = gal (US)/min H H Note) Fixed SI unit (l/min, l, m3 or m3x10) will be set for the type without the unit switching function.

MLGP

hexagon bolt X 0.02 DA DB IB ID X U VB VA H T PW GC GA 2-Rc P (Plug) A + Stroke E B + Stroke FA FB C + Stroke PA + Stroke GB PB Q 2-Rc P G J K S XA H7 depth XL IE XA H7 depth XL T-slot dimensions Note 1) The intermediate strokes other than the standard strokes at left are manufactured by means of installing a spacer.

MLGP

Retraction locking LOCK LOCK Rc 1/8 Unlocking port Unlocked when pressurized Section XX L 4-OA through 4-OB depth of counterbore depth OL 4-NN through 4-MM depth ML Z Section XX IA WA IC IC IH R X 0.02 HA: T-slot for hexagon bolt X 0.02 DA DB IB ID X U VB VA H T PW GC GA 2-Rc P (Plug) A + Stroke E B + Stroke FA FB C + Stroke PA + Stroke GB PB Q 2-Rc P G J K S XA H7 depth XL IE XA H7 depth

15

QW PW GP W 2 x P (Piping port) 2 x UU (Bumper bolt) HP HA HG 2 x For holding switch rail GA G A L A G R GA 5.3 (6.9) 2 x 2 x Counterbore diameter B 14 Square nut 2 x 2 x Counterbore depth C K 18.5 Q + Stroke GB (NA) GB 2 x NN (Adjustment bolt) (NF) (NC) (NB) (NC) (NE) 2 x Shock absorber Amount of stroke adjustment Y2 Y1 Adjustment bolt Shock absorber Bumper bolt CY3B CY3R R1 R1 With shock

Dedicated Controller

Dedicated Controller/LC1 P.73 Controller setup software P.80 Dedicated teaching box P.82 Options P.85 Dedicated Regenerative Absorption Unit/LC7R P.86 Non-standard Motor Compatible Drivers P.89 73 2 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3

CM2

Bore size (mm) Bore size (mm) MM K NN ZZ NA Z N P S Q WB N1 P WA G Bore size (mm) 20 20 20 5 116 24 107 15 62 M8 x 1.25 M20 x 1.5 1/8 21.5 8.5 6 13 8 17.5 25 25 25 5.5 120 30 111 15 62 M10 x 1.25 M26 x 1.5 1/8 24.5 10.5 6 13 8 17.5 32 32 32 5.5 122 34.5 113 15 64 M10 x 1.25 M26 x 1.5 1/8 27 11.5 6 13 8 17.5 40 40 40 7 154 42.5 143 21.5 88 M14 x 1.5 M32 x 2 1/4 32.5 15 8 16 11 21.5 With Rod

MLGC

P GL GQ M Q R V Bore size (mm) 20 25 32 40 93 60 5.5 80 35 16 4 25 26 50 M5 x 0.8 4 50 14 53 105 M6 x 1 112 103 70 9 95 40 20 7 32 31 60 M5 x 0.8 7 60 14 63 125 M8 x 1.25 132 104 70 9 95 40 20 7 32 38 60 Rc 1/8 Rc 1/8 7 60 13 63 125 M8 x 1.25 132 115 82.5 11 115 45 25 8 38 47 70 8 75 14 73 150 M8 x 1.25 162 W Y WH X Z Bore size (mm) 20 25 32 40 30 23 30 146 182 30 25 37 167 199 25 28.5 37

MLGC

GL GQ GR I J K L M N O Q R S T U V W Bore size (mm) 20 25 32 40 93 60 5.5 80 M5 x 0.8 4 4 35 50 25 14 26 16 53 50 105 M6 x 1 112 103 70 9 95 M5 x 0.8 7 7 40 60 32 14 31 20 63 60 125 M8 x 1.25 132 104 70 9 95 Rc 1/8 Rc 1/8 7 7 40 60 32 13 38 20 63 60 125 M8 x 1.25 132 115 82.5 11 115 8 8 45 75 38 14 47 25 73 70 150 M8 x 1.25 162 W WH X Y Z Bore size (mm) 20 25 32 40 30 23 30 146 182 30 25

FQ1

Model symbol (In-line filters) Element size 500mm (250mm x 2) EM600-005 x 4 EM600-010 x 4 EM600-020 x 4 EM600-040 x 4 EM600-074 x 4 EM600-105 x 4 5 10 20 40 74 105 Bore size 06 10 Rc 3/4 Rc 1 65 x 125mm Housing O-ring material Note) Specity seal material in place of "" (N for NBR or V for FPM). N V NBR FPM Elements other than 1 to 4 listed above are also available.

3 Port Solenoid Valve SYJ300/500/700 Series

R P R 10% rated voltage Allowable voltage 0.5 (With light : 0.55 ) Power consumption W Note) DC 0.9 ( With light : 1.0) 100V External pilot 110V [115V] 1.0 (With light : 1.10) [1.1 ( With light : 1.2) ] SYJ71 R 2 4 SYJ72 R 2 4 Apparent power VA AC 1.8 (With light : 1.9) 200V A X A X 1.9 (With light : 2.0) [2.2 (With light : 2.3) ] 220V [230V] P R P R Surge voltage suppressor Diode Indicator

Turntable Cylinder Series MGT

X X X X X X X X X X X X 90 X b d X X X Table position detector arm X X X X X X a Switch mounting bracket X Cylinder unit/Applicable auto switch types Load voltage Lead wire length (m) Auto switch part no.

ISO Cylinder

(With mounting bracket) Single foot: Cl75KEl lTL/Flange: Cl75KEl lTG LT (W + Stroke) NH NH LT LT 2 x AB (XS + Stroke) (With mounting bracket) Double foot: Cl75KEl lTM 4 x 8 x FD LT (W + Stroke) TF UR 4 x AB AV US TR (XL + 2 x Stroke) LS + Stroke AO [mm] Bore size AB AO AV FD LS LT NH TF TR UR US (W) (XL) (XS) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150

IC

Display protective cover P2992136 14-8-36 3 Series IC Controller for Electro-pneumatic Regulator Specifications Pressure range 0.1 MPa 0.5 MPa 0.9 MPa 0.1 MPa Proof pressure 500 kPa 500 kPa 1.5 MPa Fluid Air/Non-corrosive gas Dimensions 48 x 48 x 100.5 Power supply 12 to 24 VDC (15 W or more), Ripple (p-p) 1% or less qNo. of inputs: Up to 10 bit input from sequencer (parallel) Input method

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

(With light: 1.2 W), 100 VAC: 1.4 W (1.45 W), 110 VAC: 1.45 W (1.5 W) Air Operated Valve Specifications Refer to page 13-4-11 for dimensions.

Compact

45 L 15 50 CQ-M3 x 50 L 20 55 CQ-M3 x 55 L 25 60 CQ-M3 x 60 L 30 65 CQ-M3 x 65 L 35 70 CQ-M3 x 70 L 40 75 CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12

CRB1/Size: 10, 15, 20, 30

(CRB1BW10: 0 to 230) CRQ Port position On the body side or in the axial direction Body side M3 X 0.5 M5 X 0.8 M5 X 0.8 M3 X 0.5 M5 X 0.8 M3 X 0.5 Size MRQ Axial direction M5 X 0.8 Double shaft (One flat chamfering on each shaft) Shaft MSQ Angle adjustable range of the unit 0 to 230 0 to 240 Mounting Basic, Flange MSUB Auto switch Mountable (Port: Only on the body side) Note 1) Make sure to

1.63

Grease pack part no.: GR-S-010 (10 g) D-X 511 MGPW Series 20 to 63/MGPWM Stroke Z 4 x YY depth YL Stroke Z L 4 x MM depth ML 4 x NN through DA DB H V U X T R PW 2 x P OL GA GB 4 x OA through FA FB 2 x OB counterbore Q J K C + Stroke B + Stroke E S G A + Stroke For intermediate strokes other than standard strokes, refer to Manufacture of Intermediate Strokes on page 499.

CXT

Load weight W (kg) MX 3. Operating pressure P (MPa) P 0.7 MPa MTS 4.

Angle Seat Valve /

Indicator 45 22.5 27 1/8 Pilot port 5 17 D E OUT IN E C B 2 x P Port size A A Dimensions [mm] Model Port size P A B C D E VXB215A D 3/8 23 55 99.8 88.3 11.5 VXB215B E 1/2 27 65 106.8 90.8 13.5 VXB215C F 3/4 32 75 111.5 93.2 16 6 VXB Series For Steam Replacement Parts How to order the maintenance kit Maintenance Kit Insulated Adapter (for Individual Parts) VXB021-20-1A (1 set) VXB215 KT *

Compact Cylinder with Air Cushion

B + Stroke L K 2 x 4-M6 x 1.0 effective depth 10 A + Stroke M W Rod end male threads H1 Rod end nut C1 X L1 Rod end male threads mm Bore size (mm) C1 X H1 L1 20 25 18.5 12 14 M8 x 1.25 22.5 15 17.5 M10 x 1.25 Standard type mm A B C D E E1 E2 F H K L M Q W Bore size (mm) 20 25 Stroke range (mm) 15 to 50 36.5 32 7 10 36 18 21 15.5 M5 x 0.8 8 4.5 25.5 21 39 15 to 50 41.5 36.5 12 12 40 20 23.5