Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

g Vertical mounting Mounting orientation Horizontal mounting Ceiling mounting Wall mounting Vertical mounting m1 m2 m3 m4 Note) M3 Static load (m) M1 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment z y Y M2 m1 x g x Y m2 x g x Y m3 x g x Z Z M3 m3 x g x X m4 x g x Y m4 x g Note) m4 is a weight movable by thrust.

Thermo-chiller

2 Contact input signal 1: Run/Stop (Default setting) 4.7 k 1 k 3 Contact input signal 2: External switch (Default setting) 4.7 k 5 SD+ RS-485 communication 6 SD Internal circuit 7 SG 9 24 COM Circuit diagram Contact output signal 1: Operation status (Default setting) 10 Contact output signal 1 COM 11 Contact output signal 2: Alarm signal (Default setting) 12 Contact output signal 2 COM 13

Cylinder with Lock Series CLS

For long strokes AL M (tie-rod reinforcement ring) GA M 2-Rc(PT) P 14 GA MM BZ GB 4-J RY LY 59 90 D 419 W LH LT Y X N RT Y X N LX Width across flats KA C LS + Stroke B ZZ + Stroke With rod boot 75 l 15 40 h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) 125 140 160 K KA LH LS LT A AL B BA BB BC BY BZ C D GA GB GC J 15 31 85 298 8 50 47 145 75 18 110 136 115 36 16 107 58 M14 x

SMC Pneumatic Clean Series

Basic style / CG1RN, CG1RN 10112122M5 x 0.8 Relief port GA GB X 2-P (Rc, NPT, G) 2-LD H1 RA Width across flats B1 D 0 -0.05 I E LH MM AL Y KA A K N H S + Stroke LX F ZZ + Stroke L Bore size (mm) I H1 H K F E A AL L B1 D Stroke range KA Y GB S GA RA LD MM LX LH 40 30 27 25 6 19 16 47 8 39 Up to 300 52.4 2 32 2219.5 18 5.5 17 12 32 6 38 Up to 200 42.4 2 25 2219.5 14 5.5 17 10 32 6 31 Up to

MY1

X x m x g Vertical mounting Mounting orientation Ceiling m Wall m Vertical m Note) Static load m Horizontal m M M m x g x X m x g x X m x g x Z M Static moment z y Y m x g x Y m x g x Y m x g x Z M Z m x g x X m x g x Y m x g M Note) "m" is a weight movable by thrust.

PSxx-OMS0004CN

0.2F.S.(25 IP65 AC500V 1 100M(DC500 V) -1060 -2070 () 3585RH() CERoHS 01 02 R1/8M50.8 R1/4M50.8 C3604+ Al2O3(96) OFKM+ M12 88 g 95 g M12 175 g 182 g AWG23 0.72 mm 1.14 mm 4 3 m -15No.PS-OMS0004CN-D [mA] [V] A B 01MPa 0 1MPa -100100 kPa -100 kPa 100 kPa 0500 kPa 0 500 kPa -16No.PS-OMS0004CN-D A B PSE57-01 8 R1/8 PSE57-02 12 R1/4 M12 ZS-37-A 1 2 4 3 M12 ZS-37-B 3 4 2 1

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

Please refer to p.4.5-7 for with pressure differential gauge (GD40-2-01). 4.6-6

IDX-OM-M051

(O.D.10, Length approx. 2m) Inside diameter 25 Compressed Air outlet (The opposite side (For Option K: 16K) 4xEye bolt condensed water JIS flange 80A 10K Drain tube for Drain tube Drain tube 268 t 217 20 18 t A A 8x23 8x19 20 Flange bolt hole Drawing of view A 75 4x 1056 720 9351 1290 160 150 t Other than Option K Option K Model (For Option K: 16K) Compressed Air inlet JIS flange 80A 10K

Basic Type/Direct Mount Type

0 i q o u y !7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

Vacuum Regulator Series IRV

U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60

7

D f J I F C e d Grommet (with surge voltage suppressor) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet Grommet (with surge voltage suppressor) DIN terminal C T U T T U U

Square Tube Type Air Cylinder Series MB1

MM L1 E1 E1 L1 NDH10 NX U1 ND H10 NZ MM R1 U1 R1 NX A A1 32 40 50, 63 80 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 22 28 40 40 30 40 50 65 65 I-03M I-04M I-05M I-08M I-10M Y-03M Y-04M Y-05M Y-08M Y-10M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10

MGP

1 y !5 Component Parts Description Material Note Component Parts Description Material Note No. q w e r t y u i o !0 for piston rod for guide rod No. !1 !2 !3 !4 !5 !6 !7* !8* !

Cylinder with Lock Series MNB

C 2-J (Double side) S + Stroke Width across flats B1 A F GB K BN GF Cushion valve H1 Rc(PT)P Rear cylinder port MM Q E D V LY 4LD LH Width across flats Y X X Y N T LX VA LT LS + Stroke ZZ + Stroke LZ (mm) Width across flats Bore size (mm) Stroke range (mm) Effective thread length (mm) Ee11 GL A B1 H1 B2 BN C D F GB GD GF B GL1 GR GE BP GA GC 30 8.5 32 to 700 22 17 6 46 97 32.5 12 13 13 13

CS1

Bore (mm) 125 140 160 180 200 250 300 H A H1 L1 H A I type single knuckle Y type double knuckle 125 65 125 140 160 180 / 200 250 300 100 156.5 I-12 Y-12 125 3.5 65 50 110 105 161.5 I-14 Y-14 140 3.5 76 50 110 110 170.5 I-16 Y-16 155 3.5 83 56 120 125 193.5 I-18, I-20 Y-18, Y-20 160 3.5 88 63 135 160 245.5 I-25 Y-25 195 3.5 106 71 160 175 266.5 I-30 Y-30 210 3.5 115 80 175 Accessory SCS1

240

50 1 1 R 6N q w e r t y u i o !

Lightweight and Compact

Contact input signal 2 Circuit diagram 4 1 k HECR 11 Run/stop signal input Contact input signal 1 4.7 k 3 1 k Internal circuit HEC 10 Alarm status signal output Contact output signal 3 2 HEB 9 Remote status signal output Contact output signal 2 1 8 HED Operation status signal output Contact output signal 1 0 HEA * The pin numbers and output signals can be set by user.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

80

dimensions (XD) Electrical entry Model Port size P G U W X Y Grommet Q R VDW1 M5 4 28 11 34 17 15.5 30.15 VDW2 M5, 1/8 4 33 14 39 20 17 36.2 M 2 x J thread depth K 465 VDW Series Glossary of Terms Pressure Terminology Others 1.

Compact Cylinder with Air Cushion

Rod end nut L1 10 Series RQ Accessories Single Knuckle Joint Double Knuckle Joint For I-G02, I-G03 For I-G04, I-G05 For Y-G02, Y-G03 For Y-G04, Y-G05 ND hole H10 Shaft d9 MM ND hole H10 Shaft d9 MM L NDH10 MM NDH10 MM L RR1 RR1 RR1 RR1 E1 E1 E1 E1 A1 L1 A NX NZ U1 A1 L1 A NX NX U1 A1 L1 A U1 A1 L1 A NX NZ U1 Material: Carbon steel Material: Cast iron Material: Carbon steel Material: Cast