High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

0 Driver type*6 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 11LEJS 11LEJS 25Au Vacuum port

CC

Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) MI W S CEP1 CE1 CE2 No load No load Load ratio Load ratio ML2B C J G5-S Bore size (mm) Bore size (mm) Bore size (mm) CCVL10/11/12/13 4.

MQQ

to 1000 mm/s (Refer to page 10-5-7.) (3) Piston speed H (High speed/High frequency type) 5 mm/s to 3000 mm/s (Refer to page 10-5-7.)

MQQ

to 1000 mm/s (Refer to page 10-5-7.) (3) Piston speed H (High speed/High frequency type) 5 mm/s to 3000 mm/s (Refer to page 10-5-7.)

Air-hydro Unit

Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load No load No load Load ratio Load ratio Load ratio Load ratio Bore size (mm) Bore size (mm) Bore size (mm) CCVS30/31/32/33 CCVL20/21/22/23 CCVL02 Piping bore Piping bore Piping bore Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load

LG1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Lead screw type Ground ball screw Rolled ball screw Slide screw P N S Motor output 100W 2 Power supply voltage 100/110VAC (50/60Hz) 100/115VAC (50/60Hz) 200/220VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor 1 The tables above show the definition for each symbol only and cannot be used for actual model selection. 2 0

Fluoropolymer Piping Equipment

Drain 861 Needle Valve /Bore Through Connector /High Purity Fluoropolymer Tubing LVN/LQHB Series/ / / TL TIL TD TID TH TIH Needle Valve P.938 Tubing O.D. Metric Size Inch Size 6 4 Size Series Appearance 8 10 12 1/8" 3/16" 3/8" 1/2" 1/4" 2 Needle valve LVN 3 LVC 4 LVA Note) Basic size With reducer LVH Bore Through Connector P.941 LVD Tubing O.D.

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

VQ

Refer to p.2.9-15 for How to Order for DIN rail.

Air Cooled Aftercooler Series HAA 1

ID AMG Accessory (Option) HAA7 HAA7 HAA15 HAA22 HAA37 Auto-drain Applicable model AFF Working Principle HAA7-F HAA7-S HAA15-F AD402-03 HAA15-S HAA22-F HAA22-S HAA37-F AD402-04 Dust-protecting filter Mounting bench AM HAA37-S Inlet side air (HOT AIR) Push button switch Pilot light The accessories should be mounted by user. Misc.

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Signal Cable color S Standard cable Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

The voltage drop will occur due to the internal circuit of S, Z and T types (with energy saving circuits). Allowable voltage fluctuations should be within the range below.

ZSE30/ISE30

Blue DC() -26 Analog output type 1 to 5V (2.5% F .S.) Output impedance: 1k Bring the pressure back to atmospheric pressure and try using the zero out function. Residual pressure error Brown DC(+) Black OUT (Analog output) + 12 to 24VDC Load Blue DC() Supply pressure exceeds the maximum regulating pressure. -28 Analog output type 4 to 20mA (2.5% F .S.)

PA3000/5000/PAX1000

P-80 (D)

ZMA

Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-27 8 Series ZMA Dimensions 111 S: Vacuum pressure switch trimmer Pilot valve for vacuum pressure T: Release period adjustment trimmer Pilot valve for vacuum release M5 x 0.8 through (P, E port) Release flow adjustment screw 3-Rc 1/8 SUP.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

steel rod Rod side nose mounting Head side pivot mounting Double end mounting Block mounting O O O O O O O S S O O O O O O NCA S S S S S O O O S O O N N S S S S S S N N N O O O O S 1 1 1 1 1 2 1 1 1 3, 4 1 DN S S S S S S O O O O N S S O S S S O O O O N -X N N O N N N O O O O O N N N O O O O O 20N N O O O O O O N N O O O O S Data N O O O O S O O O O O O O O O 1, 5, 6 O Combination

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series ®

(13) 1.5 (34) s PRESSURE MPa OUT (13.2) Lead wire with connector ZS-32-A Brown DC (+) Black OUT (1) Blue DC () + O 2020 128 A

Series 10-, 21- AF-A Air Filter

Fittings & Tubing Air Cylinders Rotary Actuators Bracket (Option) Bracket (Option) R R V Q V Q IN OUT B C IN OUT Clearance for maintenance G B C 2 x P (Port size) 2 x P (Port size) Hexagon width across flats 14 1/8 Drain Hexagon width across flats 17 1/4 E A Clearance for maintenance G Drain A AF50/60-A 1021J D M U S N T Bracket (Option) R V Q C B IN OUT 2 x P (Port size) Hexagon width across

EXxx-OMS0026CN

EX600-SEN4 TM EtherNet/IP (Composite 11) EtherNet (CAT5 100BASE-TX) 10/100 Mbps / SI 192.168.0 1.1254 IP DHCP Vendor ID7(SMC Corporation) Device type12(Communication Adapter) Product code203 (DLR) TM EtherNet/IP QuickConnect Web () 120 mA /PNP() /NPN() 32 DC24 V 1.0 W (SMC ) HOLD / CLEAR / ON 1 IP67() -1050 -2060 3585%RH( AC500 V1 FE DC500 V10 M FE 1057 Hz0.75 mm p-p

PSxx-OMU0002CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -19No.PS-OMU0002CN-D Z/ISE20A(F)-S/-R () DC(+) NPN 2 Max.28 V80 mA 1 V R15 V OUT1 1 k OUT2 S420 mA DC(-) 12 V 300 24 V 600 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -20No.PS-OMU0002CN-D -V/-T () DC(+) PNP 2 Max.80 mA 1 V T15 V OUT1 1 k OUT2 V420 mA DC(