Aluminum High Vacuum Angle Valve A XL Series Case Model Weight (kg) A (mm) Conductance (L/s) XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 B (mm) 40 103 0.25 5 50 113 0.45 14 65 158 1.1 45 Little heavy metal contamination 70 170 1.6 80 88 196 2.9 160 90 235 5.0 200 The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 11-11-10 Reed switch Solid state switch CRA1 11-11-11 D-90/97 D-A90/A93/A96 D-A90V/A93V/A96V 11-11-12 CRQ2 Grommet D-90A/93A 11-11-13 Direct MSQ D-R731/R732 11-11-14 D-R801/R802 11-11-14 MRQ 11-11-15 D-R731C/R732C Connector 11-11-15 D-R801C/R802C DRail
13 14 14 17 14 16 15 18 Reed switch Without indicator light RB 8 7 5.5 6.5 6.5 J 2-color indication 2-color indication Water resistant 3.5 3.5 5 5 5 Grommet (In-line) D-F5BAL DSolid state switch D-F5NTL D-G5NTL D-Y69A/Y7PV/Y69B D-Y7NWV/Y7PWV/Y7BWV With timer 4 4 4.5 4.5 4.5 -X Grommet (Perpendicular) 2-color indication 20With pre-wire connector is also available in solid state auto switches
QW RW T W X Y Z Bore size (mm) S 140 32 60 33 19 157 33 10.5 7.5 40 84 35 180 21 187 39.5 11 8 Long Stroke X Y Z Bore size (mm) Stroke range (mm) 32 125, 150, 175, 200, 250, 300 45.5 12.5 12.5 40 125, 150, 175, 200, 250, 300 55 14 14 8-27-9 10 Series CXT Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Reed switch Solid state switch A B W D-A9 D-M9 D-F9BAL
Bracket ISA-14 DIN rail ISA-5-m L Stations Part no.
Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2016 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing UR printing UR 11030SZ Printed in Japan. D-G
21 29 14 21 29 11.5 18.5 26 Note 1) Cannot be used with gases.
Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series RoHS Specifications Compact, solid, and safe design The case and cover have undergone testing in which they were subjected 100,000 times to impacts equivalent 1.5 times the rated pressure (confirming to MIL standard).
SET 20 VY1 + G P.SET PPA AL 14-11-19
Ported Type Series 52-SY7000 Dimensions 2-position single L plug connector (L) 52-SY7120-L-02 (-F2) In case with foot bracket 52-SY7120-L-02-(F1) 29.4 20 2 x M4 x 0.7 Threads depth 6.5 (For bracket mounting) 57 24.5 7 46 5.5 19.8 28 38 79.2 Manual override Insulation: Black () 14.7 B 13.6 40 A Insulation: Red (+) 2 x 4.2 (Mounting holes for manifold) 20 2 x 1/4" {A (4), B (2) port} 42 (14
Operating Parameters Status Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv Vacuum to 250 psig (1.7 MPa) Vacuum to 125 psig (0.9 MPa) 1000 psig (6.9 MPa) 8000 psig (55.2 MPa) 14 to 160F (10 to 71C) (No freezing) 1) 0.29 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in
35 26 18 13.6 2.7 14 PF3W720 3/8 1/2 78 54 30 60 40.6 15.2 27 18 39 30 18 13.6 2.7 12 PF3W740 1/2 3/4 98 71 38 68 48.6 19.2 32 28 49 35 28 16.8 2.7 12 PF3W711 3/41 124 92 46 77 57.6 23 41 42 63 48 28 18 3.5 14 S T U V W WX Y Z PF3W704 24 22 32 40 50 4.5 5 1.5 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W740 34 30 42 48 58 4.5 5 1.5 PF3W711 44 36 48 58 70 5.5 7 2 -81No.PF-OMM0004-D PF3W721 A AA B
HECR 5-14 MODBUS communication function 5.10.3 Control operation mode The control operation mode is assigned as follows.
No. , 15 No.120 No.2131 No. 1 2 3 4 5 1 1 2 3 4 5 2 6 7 8 9 10 3 11 12 13 14 15 4 16 17 18 19 20 20 - ,No.131(OUT 15), No. (:ON:OFF) No. 1 2 3 4 5 No. No.
Refer to "LECSB2-T Operation Manual (Simplified Edition)", section 5.7 for how to set the Point table. 1000 for LEFS25 H Lead 14 - LECSB-T LEFB25 LEFB25U LEFB32 LEFB32U LEFB40 LEFB40U Series Lead symbol S Lead 54 Initial Parameter *1,*2 Para value Recommended value No Number of command input pulses per revolution *3. PA05 10 10 Electronic gear numerator *3.
LEC-OM08001 DC24V / / LECA6 Series 1. . 4 2. . 6 2.1. . 6 2.2. 7 2.3 . 8 2.4 (). 9 (1) . 9 2. 9 3. 9 4. 10 5(). 10 6. 10 3. . 11 3.1. . 11 3.2. 12 3.3. . 13 1LECA6. 13 2DIN LECA6D. 13 3.4. 14 1. 14 2. 14 3. 15 4. . 16 4.1 CN1. 16 4.2 CN2CN3:. 16 4.3 CN4I/O . 16 1. 16 2. 17 4.4 CN5I/O . 17 5.
JXC-OMT0034CN (GW)(CC-Link) / LEC-GMJ2 1. . 4 2. . 6 2.1 . 6 2.2 . 6 2.3 . 7 2.4 () . 8 (1) . 8 (2). 8 (3)(LEC) . 8 (4). 8 (5) . 8 (6) . 9 (7) . 9 3. . 10 3.1 . 10 3.2 . 12 3.3 . 13 (1)(LECGMJ2) . 13 (2)DIN (LECGMJ2D) . 13 3.4 . 14 (1) . 14 (2) . 14 4. . 15 4.1 (STATION NO.,B RATE) . 15 4.2 (CN2SW) . 16 4.3 (LEC) . 17 5. . 19 5.1 CN4 . 19 5.2 CN3 . 19 5.3 CN1CONT . 19 5.4 CN2PC
. 14-1 14.1 . 14-1 IDFA60/70/80/90 Series IDX-OM-W094 1 1.1 z z z z z z z z z () 6.2 z 1.1.1 3 IDFA60/70/80/90 Series 1-1 IDX-OM-W094 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFA60/70/80/90 Series 1-2 IDX-OM-W094 1.2.4 IDFA60/70/80/90 Series 1-3 IDX-OM-W094 1.2.5 230VAC 1PH 50Hz SERIAL No.
Specifications 5 Model 7 Note2) FGGLD Note 1) FGGLC Note 1) FGGLB Note 1) FGGSD Note 1) FGGSC Note 1) FGGSB Note 1) Number of elements 14 65 x L250 7 Note2) 21 65 x L250 7 Note2) 28 65 x L250 Stainless steel 304 Stainless steel 304 28 65 x L250 7 Note2) 14 65 x L250 7 Note2) 21 65 x L250 7 Note2) 65 x L500 65 x L750 65 x L1000 65 x L500 65 x L750 65 x L1000 Element size Cover Case O-ring
120 53.5 28 40 242 36.5 30 6.8 6.6 M6 x 1 12 16 116.5 M8 x 1.25 14 M10 x 1.5 372 354 186 190 124 158 118 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 AA BB CC DD EE FF GG II JJ KK LL MM NN WW XX ZZ Model ML1C25 ML1C32 ML1C40 1/ 8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 8 D1/ 8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 8 1/ 4 30.5 6 5 6 5 8 47 17 62 30 22 16.5 170 51 10 -X 1113 ML1C