CYV

1 !9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

Direct Solenoid

oN Opd.tion: 360 it60 131) 130 360 360 130 150 150 r5n 150 1 1 0 150 150 i $'q (46.C) (4.5) 0,177 t'r.5) (10) 0.39,1 ool (5) (5) .) 0346 19.81 0.543 03.31 03.q M6di4 air {lub.i*td d 0ll.16}, .nd non.flflm.blo mn.torlci non{orcs!.

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T 24 VDC (10-28 VDC) 24 VDC (10-28VDC) 24 VDC: 1 mA or less 24 VDC: 1oFA or less 24 VDC: l0|lA or Less 24 VDC: 1 mA or less Rd: ( ri Best 1 mS or less $erios CLA A||l0 $t/t|ilc SolidState Switch .,:,. 24 VDC (10-26 VDC) 28 VDC 1.5 V or less (1omA: 0.8 V or less) 24 VDC: 10!

Air Cylinder CLA Series Fine Lock Model

T 24 VDC (10-28 VDC) 24 VDC (10-28VDC) 24 VDC: 1 mA or less 24 VDC: 1oFA or less 24 VDC: l0|lA or Less 24 VDC: 1 mA or less Rd: ( ri Best 1 mS or less $erios CLA A||l0 $t/t|ilc SolidState Switch .,:,. 24 VDC (10-26 VDC) 28 VDC 1.5 V or less (1omA: 0.8 V or less) 24 VDC: 10!

MGC

View A-A Bore size (mm) Stroke range (mm) AF AE AD AC AB AA A G F E D C B AP H 20 25 32 40 50 75, 100, 125, 150, 200 25 62 15.5 13 11 84 5.6 90 45 24 106 M5 x 0.8 depth 10 9.5 depth 6 22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

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Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

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Mounting bracket Minimum order quantity Bore size [mm] Contents 20 25 32 40 Mounting nut (M5, Rc1/8, NPT1/8) *1 1 JSN-020B JSN-032B JSN-040B 1 mounting nut Rod end nut 1 NT-02 NT-03 NT-04 1 rod end nut * Refer to page 10 for dimensions. *1 Can be used for M and MZ only.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx. 0. 102 kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63 MGTL 199 212 226 243 170 186 127 143 MGTM 199 213 228 246

MLGC

RLQ MLU View A-A' ML1C DStandard Stroke B AF AP E A AA AB AC AD AE BP BZ C D F G GC Bore size (mm) 20 25 32 40 Stroke range (mm) -X 11 depth 8 26.5 73.5 6.8 75, 100, 125, 150, 200 M6 x 1 depth 12 13 94 16.5 70 32 35 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 50 28 135 118 12 14 depth 10 31.5 86.5 8.6 M8 x 1.25 depth 16 16 19 104 75 37 40 50 29 160 140 16 2075, 100, 125, 150, 200, 250, 300 14 depth 10 31.5

MLGC

RLQ MLU View A-A' ML1C DStandard Stroke BP BZ C D E F G GC A AA AB AC AD AE AF AP B Bore size (mm) 20 25 32 40 Stroke range (mm) -X 11 depth 8 26.5 73.5 6.8 75, 100, 125, 150, 200 M6 x 1 depth 12 13 94 16.5 70 135 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 50 118 28 35 32 12 14 depth 10 31.5 86.5 8.6 M8 x 1.25 depth 16 16 104 19 75 160 50 140 29 40 37 16 2075, 100, 125, 150, 200, 250, 300 14 depth 10 31.5

VKF300

O.D. 4 to 6.5 78.5 Max .10 71.5 71 Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152

ITV

Solenoid valve EXH 12 114 Rc(PT) 1/2 35.7 Exhaust port OUT 2 SUP (1) OUT (2) EXH (3) 22 8 25 Flat bracket P3020114 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 m36 Port size 4-M5 X 0.8 thread depth 6mm through Mounting hole G OUT 2 30 25 22 R3.5 15 25 m36 7 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 (7) 36 SUP port, OUT port 1.12-8 Series ITV2000/3000 Made to Order Specifications

BP1000

H 2 4 10 40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 2%F.S.

Peltier-type Chiller Thermo-con/ Compact Type

Water bath Q = T x V x x C h x 60 x 1000 10 x 2 x 1 x 103 x 4.2 x 103 20C V = 15 x 60 x 1000 After 15 min, = 93.3 W cool 30C down to 20C.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

1 !9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

Low Profile

Universal 0.8 4.9 10 2 (OUT) 1.5 2.3 1 (SUP) 3 (EXH) 3 3 1.7 3 (EXH) port 1 (SUP) port 2 (OUT) port Specific Product Precautions Be sure to read this before handling the products.

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Precision Cylinder Series MTS

7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty.

AMH

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35