Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

VV3QZ22-05C = 1 pc.5 station manifold base VVQZ200-10A-2 = 1 pc.Blank plate assembly VQZ212-5M-N7T = 4 pcsValve N7T: One-touch fitting for 1/4" VVQZ200-10A-2 VV3QZ22-05C 19 Series VQZ How To Order How To Order: VQZ100 Body Ported Valve For Direct Piping Preferred Option Program VQZ 1 1 5 5 L N7T PR Series 1 VQZ100 Body width 10mm Bracket F None With bracket Symbol N.C.

OMR0031

Threshold value (in 0.1 This OVC signal is turned ON when the current flowing into the Card Motor has exceeded [OVC] the set threshold value. increments) 40 to 70 This determines the condition for when the OVT signal is activated.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Maximum vacuum pressure 84 kPa (630 mmHg) The suction volume has been increased by 40% through the adoption of a twostage nozzle construction.

VEX1

Thread Rc(PT) T NPTF F G(PF) N NPT Example of ordering a manifold base: The valve and blank plate for manifold arrangement should be specified in order from the left side of the manifold base (With the A port on your side). (Example) VVEX2-2-7-02N VEX3222-1LN 6 pcs. VEX1-17 1 pc. VVEX4-2-6-A VEX3420 5 pcs. VEX4-5 1 pc.

IDX-OM-W035

(2.8) 3/h) 3/h) 3/h) 3/h) (182m (273m (384m (510m (ANR) (1) 120SCFM 173SCFM 258SCFM 353SCFM 45 F (7.2) 3/h) 3/h) 3/h) 3/h) (205m (294m (438m (600m 130SCFM 181SCFM 297SCFM 406SCFM 50 F (10) 3/h) 3/h) 3/h) 3/h) (221m (308m (504m (690m 100psi (0.7MPa) 100 F (37.8) 100 F (37.8) 41122 F (550) 22 150psi (0.15 ~ 1.0MPa) 36-104F (2~40) 85% (4) AC115V10% AC230V10% (60Hz) AC460V10% (60Hz

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard products Nil L R S a b h g d c f e Operating direction Left Right Load weight Light Low Heavy Bore size (mm) Series Guide type Note) Plugs are installed in ports other than those indicated for the model. 6 10 15 20 25 32 40 50 63 L R S Nil Model Clean room rodless CYP High precision guide type Piping port position a b c d e f g h Right Left Right Left Right Left Right Left Operating

10-cy3r-e

Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding sections GR-S-010 (10 g) for tubing interior Grease pack part no. for 15 to 63: GR-S-010 (10 g) 112

A

C Soft start-up valve Manual override Nil: Non-locking push type (flush type) B: Locking type (tool required) C: Locking type (lever type) Body size 1/4 3/8 1/2 3/4, 1 20 30 40 50 Thread type Indicator light/Surge voltage suppressor Rc G NPT Nil F N None With surge voltage suppressor (grommet type only) With indicator light/surge voltage suppressor (not possible with grommet type) Nil S Z

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

: Base mounted (A port bottom ported) How to Order Applicable solenoid valve VKF334VKF VV3KF3-40 05 01 Applicable blanking plate assembly VK300-42-1A VQZ 1(P) port: Rc 1/8 3(R) port: Rc 1/8 Option Valve stations 01 Nil 1 station None VZ Bracket VK300-43-1A With bracket (Not mounted) F 20 20 stations VS 2(A) port: Rc 1/8 Port size 01 Rc 1/8 VFN Type 42: Base mounted (A port side ported)

Soft Start-up Valve AV2000/3000/4000/5000

C Soft start-up valve Manual override Nil: Non-locking push type (flush type) B: Locking type (tool required) C: Locking type (lever type) Body size 1/4 3/8 1/2 3/4, 1 20 30 40 50 Thread type Indicator light/Surge voltage suppressor Rc G NPT Nil F N None With surge voltage suppressor (grommet type only) With indicator light/surge voltage suppressor (not possible with grommet type) Nil S Z

Rotary One-touch Fittings Manifold Series KM

F (inch) Part No.

ZL3-OM00801

2 0.1 3 90,000 1,000 3 -20 3 1 4 10,000 4 +3 4 5 5 100,000 5 +7 6 +10 3.3.2 1 9 No.ZL3-OM00801-A 3.4 3.4.1 P5 (2/V) (3/E) G (1/P) 06 Rc3/4 Rc1 Rc1/8 04 Rc1/2 F06 G3/4 8() G1 G1/8 F04 G1/2 N06 NPT3/4 5/16(inch) N04 NPT1/2 NPT1 NPT1/8 3.4.2 1) 2), 3) 1 (2/V) 1 (G) 40 ) (3/E) 40 ) [Nm] G Rc1/8,G1/8,NPT1/8 35 Rc1/2,G1/2,NPT1/2 2830 (2/V) Rc3/4,G3/4,NPT3/4 2830 (3/

IDX-OM-Y002

Table 4-1 Cooling water system Items Circulating type Non circulating type Circulating fluid Make-up water Non circulating water pH [25oC] 6.5~8.2 6.5~8.0 6.8~8.0 Conductivity (mS/) [25oC] 80 or less 30 or less 40 or less Standard items Chloride ion (mg/L) 200 or less 50 or less 50 or less Sulphate ion (mg/L) 200 or less 50 or less 50 or less Acid consumption [pH4.8](mgCaCO3/L) 100 or less

ALF400 to 900, ALT-5/-9

182 182 242 242 G 15 15 16 16 H 24 24 40 40 I 382 382 422 422 J 414 414 472 472 K 428 428 L ALT-5 ALT-5-IS ALT-9 ALT-9-IS 449 482 14-13-9 5 Oil Distributor VA, VB/Nylon Tubing Related Products: Oil Distributor Series VA, VB How to Order V A 4 6 Applicable tubing O.D.

Low torque Metal seal type Rotary joint

type in 1 circuit system Options / Mounting bracket Number of circuits Flange part number 2 circuits MQR2-F 4 circuits MQR4-F 8 circuits MQR8-F 12 circuits MQR12-F Specifications Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male

.020 F-2815-201 Blue .025 F-2815-251 Brown .030 F-2815-301 Beige .040 F-2815-401 Rust

.020 F-2815-201 Blue .025 F-2815-251 Brown .030 F-2815-301 Beige .040 F-2815-401 Rust

.020 F-2815-201 Blue .025 F-2815-251 Brown .030 F-2815-301 Beige .040 F-2815-401 Rust

.020 F-2815-201 Blue .025 F-2815-251 Brown .030 F-2815-301 Beige .040 F-2815-401 Rust