PFxx-OMX0007

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Measurement diagnostics 0: Within range 1: Out of range (HHH) 14 Fixed output 0: Normal output 1: Fixed output (Setting of output check) 15 Error Diagnosis 0: Error not generated 1: Error generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow

EXxx-OMU0020CN

EX245-SPN1 16 Valves (16 coils)32 Valves (32 coils) 2 2 4 D 0 1231 0.X byte Valves (16 coils) Valves (32 coils) 0 Valve coils 0-7 Valve coils 0-7 1 Valve coils 8-15 Valve coils 8-15 2 Valve coils 16-23 3 Valve coils 24-31 . 6-2 46 No.EX-OMU0020CN 6.4.

LECA6_C

LEC-OM08001 DC24V / / LECA6 Series 1. . 4 2. . 6 2.1. . 6 2.2. 7 2.3 . 8 2.4 (). 9 (1) . 9 2. 9 3. 9 4. 10 5(). 10 6. 10 3. . 11 3.1. . 11 3.2. 12 3.3. . 13 1LECA6. 13 2DIN LECA6D. 13 3.4. 14 1. 14 2. 14 3. 15 4. . 16 4.1 CN1. 16 4.2 CN2CN3:. 16 4.3 CN4I/O . 16 1. 16 2. 17 4.4 CN5I/O . 17 5.

LECP6_C

. , , (), 16.1 /P.16 4.

SI unit for DeviceNet TM

Specifications 41 Dimensions 43 Accessories 46 -1No.EX-OME0015-F Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Programless controller Step motor (servo 24 VDC)

Product Specifications . 13 3.1 Basic specifications . 13 3.2 Parts description . 14 3.3 Outside dimension diagramm . 15 3.4 How to install . 16 (1) How to install . 16 (2) Grounding cable connection . 16 (3) Installation location . 17 4.

ZSE2/ISE2

Refer to pages 16-14-3 to 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-111 to 16-1-13 for Precautions on every series.

High Vacuum L Type Valve

-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1/

This is a legacy product, and replaced byLVA20-01N-A-V-Z, FLUOROPOLYMER, VALVE, VALVE, FLUOROPOLYMER VALVES and REG, 2I, FLUOROPOLYMER, 0.44273 lb

This is a legacy product, and replaced byVT307-5DO1-01N-Q, VT3 BASE MT 1/8, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, 0.34012 lb

This is a legacy product, and replaced byVT307-5DZ1-01N, VALVE, SOL, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, .39600 lb

This is a legacy product, and replaced byVXA2130-01N-1

This is a legacy product, and replaced byVT307-5G1-01N-F, VALVE, SOL 24VDC, VALVE, VT3/VO3 SOL VALVE 3-PORT, PA, VT3 BASE MT 1/4, .35486 lb

This is a legacy product, and replaced byVT307-6G1-01N, VT3 BASE MT 1/8, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, 0.308 lb

VFS2000, body ported and base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm2, Ambient and fluid temperature: -10 to 60 C, Manual override: non locking push style, VFS2200-5FZ-01N, VALVE, VFS2000 SOL VALVE 4/5 PORT, NE, VFS2000 BASE MT 1/8, 1.03617 lb

This is a legacy product, and replaced byVK3140-BD-01N, VALVE SOL 24VAC, VALVE, VK3000 SOL VALVE 4/5 PORT, ND, VK3000 BASE MT 1/8, .00000 lb

Piping: 42 (Base Mounted), Stations: 20 Stations, A, B Port: 01N (NPT1/8)

This is a legacy product, and replaced byVK332V-5DZ-01N, VALVE, SOL, BODY PORTED, VALVE, VK300 SOL VALVE 3-PORT, DA, VK300 BASE MT 1/8, 0.40891 lb

Manifold Type: 41P (Base Mounted, Bar Manifold, Compact, Flat Cable), Valve Stations: 4 Stations, A, B Port: 01N (NPT1/8)

Manifold Type: 41P (Base Mounted, Bar Manifold, Compact, Flat Cable), Valve Stations: 5 Stations, A, B Port: 01N (NPT1/8)