Series: 3 (10-SY3000), Actuation: 1 (2 Position, Single), Coil Specification: None, Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Connector, w/o Connector), Light/Surge Voltage Suppressor: U (with Light/Surge Voltage Suppressor, Non-Polar Type), Manual Override: Non-Locking Push Type, A, B Port Size: M5 (M5 x 0.8)
Type of Actuation: 2 Position Double, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: L Plug w/o Connector, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor Non-polar, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported M5X0.8, Thread: Rc (or None), Option: Side Bracket
Type of Actuation: 2 Position Single, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: L Plug w/o Connector, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor Non-polar, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported M5X0.8, Thread: Rc (or None), Option: Foot Bracket
Type of Actuation: 2 Position Single, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: L Plug w/o Connector, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor Non-polar, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported M5X0.8, Thread: Rc (or None), Option: Side Bracket
Type of Actuation: 3 Position Closed Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: L Plug w/o Connector, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor Non-polar, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported M5X0.8, Thread: Rc (or None), Option: Side Bracket
Type of Actuation: 3 Position Pressure Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: L Plug w/o Connector, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor Non-polar, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported M5X0.8, Thread: Rc (or None), Option: Side Bracket
Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: U (Light & Surge Suppressor Non-polar), Manual Override: Non-locking Push Style, A, B Port Size: M5 (Body Ported M5X0.8), Thread: Rc (
Type of Actuation: 2 (2 Position Double), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: U (Light & Surge Suppressor Non-polar), Manual Override: Non-locking Push Style, A, B Port Size: M5 (Body Ported M5X0.8), Thread: Rc (or None
Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: U (Light & Surge Suppressor Non-polar), Manual Override: Non-locking Push Style, A, B Port Size: M5 (Body Ported M5X0.8), Thread: Rc (or None
Type of Actuation: 5 (3 Position Pressure Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: U (Light & Surge Suppressor Non-polar), Manual Override: Non-locking Push Style, A, B Port Size: M5 (Body Ported M5X0.8), Thread: Rc
Series: 1 (VQZ1000), Configuration: 4 (3 Position Exhaust Center), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: LO (L Plug w/o Connector, w/Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: M5 Thread, Thread: Rc, Foot Bracket: None, CE Compliant: Q (CE Marked)
Manifold Type: 41 (Base Mounted), Valve Stations: 5 Stations, A, B Port: M5 (M5X0.8), CE Marked: Q (CE Marked)
AS Release ring How to Order Slide range 0P AS 0 06 06 20 Body size q qSlide down the release ring, and push the release bushing to the end.
None Float type auto-drain 00 11 q Replacement Parts AU100 has no auto-drain type. Element Bowl guard Material Model Port size Description No.
Assembly example qResidual pressure relief 3 port solenoid valve VP517Y-5DZ1 1 pc. wAir combination AC30C-03DG 1 pc. eSpacer with bracket Y300T-A1 pc. tPiping adapter *1 *2 rSpacer Y300-A1 pc. tPiping adapter E300-03-A1 pc. q Residual pressure relief 3 port solenoid valve Applicable Combinations/Attachment Part Nos.
VXB Solenoid Specifications VXE Apparent power (VA) Inrush Holding Power consumption (W) (Holding) Temperature rise (C) (Rated voltage) 7.5 6 60 50 Frequency (Hz) 50 53 18 60 44 12 Power source VXP AC VXR VXH VXH How to Order VXF VXH2230 02 1 G Symbol 2 VX3 CE-compliant VXA 2 port valve for high pressure CE-compliant Nil Q 1 For DIN terminal only Bracket Valve/Body None With bracket Nil
The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
Connecting thread IN 1 OUT 2 2 OUT 01 male thread, M5 female thread 8 1 Thread type Nil N Rc NPT Note) A standard model is equipped with a backflow function. A main valve opens when the inlet pressure is released, and then an outlet pressure backflows into the inlet side. Note) Use caution not to tighten excessively when mounting a pressure gauge, otherwise it may result in a breakdown.
SRF Flow rate (L/min (ANR)) Example of mounting ITV Pressure Characteristics (Representative Value) Initial setting P1 = 0.7 MPa P2 = 0.2 MPa Q = 20 L/min (ANR) Bracket IC ITVH Set nut Outlet pressure (MPa) ITVX PVQ VY1 VBA VBAT Model Part no.
How to see the serial number S O 001 January 2014 S O 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2014 S Repeated from A to Z in alphabetical order 1 O Repeated from O to Z in 2015 T 2 P alphabetical order, with O for January and Z for December 2016 U 3 Q Fig. 1-1 Position of the product label HRS Series 1.4Product Label 1-3 HRX-OM-S004 Chapter 1 Safety Instructions 1.5 Safety