Fieldbus system Ethernet POWERLINK compatible SI unit

175 g 1: All unused connectors must have a seal cap fitted.

EXxx-OMY0006CN

Table 10-1 specifications EX245-FPS1 EX245-FPS2 EX245-FPS3 (W x L x H) mm 85 x 148.5 x 136 1,100 g 1,200 g 8 128 () 64 (US1) 350 mA 300 mA (US1/US2) XD1/XD2 16 A (US1/US2) 10 A (US1/US2) 24 VDC +20%/-15% <20.4 VDC US1 >21.6 VDC < 17 VDC 6 A 24 VDC +20%/-15% <21.6 VDC : >22.8 VDC US2 / <17 VDC 4 A () 1.2 V US1 US2 4 8 US1 UT1/UT2 24 VDC +20%/-15% 2 A( UT1) 1 A (

SL5200

Reference: Bureau of Industry and Security (USA) http://www.bis.doc.gov/ 1) 2B350.g.2 (1) Product name : Regulator, Diaphragm valve (2) Body material : Hastelloy (3) Connection size : 1/2 inch or more 2) 2B999.g (1) Product name : Regulator, Back pressure regulator, Diaphragm valve, Check valve, Vacuum generator module (integrated with valve

AME

BM51 BM52 BM53 BM54 BM55 BM56 BM57 How to Order AME 250 03 R B Option R INOUT reversal Body size HAl Accessories (Options) 150 250 350 450 550 650 850 1/8 1/4 3/8 1/2 3/4 None B AT With bracket IDl Port size 1/8B 01 02 03 04 06 10 14 20 2B 1 Thread 1/4B AMG 11/2 3/8B Rc(PT) F G(PF) N NPT 1/2B AFF 3/4B 1B AMl 11/2B Symbol Related poroducts AME Note) Refer to p.4.7-7 for "How to Order" case

MHx-OMY0001

(Nm) L(mm) MHM-16D M3x0.5 0.63 6 MHM-25D M4x0.7 1.5 8 MHM-32D M5x0.8 3 10 MHM-50D M6x1 5.2 12 (N) MHM-16D 100 MHM-25D 200 MHM-32D 300 MHM-50D 500 -7- 2-3. 40 2-4. () 5 5 P-01-11 -8- 2-5. 1.52 2-6. 1 ()ISO VG320 (SDS) -9- 2-7. 1) 1) 2) 3) 12mm -10- 2 C3 C1 C2: C3 D-M9V D-M9WV D-M9AV D-M9 D-M9W D-M9A D-P3DWA A B E G A B E G L A B E G L D F H MHM-16D 9.1 9.1 5.6 4.6 8.1 12.8 11

Model: 31, Orifice: 1 (1.5mm), Style: 4 (COM, Single Unit), Option: G (Stainless Steel, Seals: NBR, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: F (G), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Surge Suppressor: Non, Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Series: 350 [3 Port COM (Single Unit)], Voltage: 6 (12VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: F (G), Material: G (Stainless Steel Body, NBR Seal Class B Coil)

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: F (G), Material: G (Stainless Steel Body, NBR Seal Class B Coil)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: F (G), Material: G (Stainless Steel Body, NBR Seal Class B Coil), Option: None, CE Compliance: Q (CE Marked)

AS-R/AS-Q

Metric size: Light gray Inch size: Orange Elbow Thread type Nil R N NPT G G Port size Thread type R and NPT are applied with sealant. Thread type G adopts face seal method. 02 1/4 03 3/8 04 1/2 Only meter-in type is available. The meter-out version is not available and therefore is not shown in this How to Order. 10

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Low Differential Pressure Sensor

Without power supply/output connection cable 30 g Note 1) Pressure range can be selected during initial setting.

ALB900

Description Material Aluminum casted Aluminum casted Top cover Bottom cover q w VOA301-M V0307E-D-X56 3 port switching valve (for operation control) e 1 VR4152-00-0 GA46-10-01 12702A 12705A NLP-100A PNY-25 SW-100 x 6 x 2 JIS B 2401P3 r t y u i o !0 !

VQ7-6/7-8

Control unit type (see pages 13 and 14 for details) Control equipment Symbol A AP M MP F G C E Nil Air filter with auto drain Air filter with manual drain Regulator Air release valve Pressure switch Blank plate (air release valve) Blank plate (filter, regulator) Number of manifold blocks required for mounting (stations) 2 2 2 2 2 2 2 1 Manifold Specifications Piping specifications Ports 2

Body Size: 20, Backflow: K (w/Backflow Function), Thread: F (G), Port Size: 01 (1/8), Options: G (Round Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 2 (1/8, 1/4), Control Type: 1 (Meter-in), Thread Type: G (G), Port Size: 01 (1/8), Applicable Tubing O.D.: 08 (ø8)

Body Size: 2 (1/8, 1/4), Control Type: 1 (Meter-in), Thread Type: G (G), Port Size: 01 (1/8), Applicable Tubing O.D.: 06 (ø6), Seal Method: w/o Sealant, Option: Electroless Nickel Plating, Lock Nut Option: J (Round Lock Nut)

Body Size: 1, Set Pressure: 2 (0.02 to 0.8 MPa), Exhaust Direction: 0 (Bottom Exhaust), Thread: F (G), Port Size: 01 (1/8), Option: BG (B + G), Semi-standard: None

Body Size: 1, Set Pressure: 2 (1.5 to 116 psi [0.01 to 0.8 MPa]), Exhaust Direction: 0 (Bottom Exhaust), Thread: F (G), Port Size: 01 (1/8), Option: G (Round Type Pressure Gauge), Semi-standard: None

Body Size: 1, Set Pressure: 1 (1.5 to 58 psi [0.01 to 0.4 MPa]), Exhaust Direction: 0 (Bottom Exhaust), Thread: F (G), Port Size: 01 (1/8), Option: G (Round Type Pressure Gauge), Semi-standard: None