Function: 3 (3 Position Closed Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 5 (24 VDC), Lead Wire: D (DIN Terminal)

Function: 3 (3 Position Closed Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 4 (220 VAC, 50/60 Hz), Lead Wire: E (Grommet Terminal), Surge Suppressor: Z (with Light/Surge Voltage Suppressor)

Function: 3 (3 Position Closed Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 4 (220 VAC, 50/60 Hz), Lead Wire: D (DIN Terminal), Surge Suppressor: Z (with Light/Surge Voltage Suppressor)

Function: 3 (3 Position Closed Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 3 (110 to 120 VAC, 50/60 Hz), Lead Wire: D (DIN Terminal), Surge Suppressor: Z (with Light/Surge Voltage Suppressor)

Function: 3 (3 Position Closed Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 3 (110 to 120 VAC, 50/60 Hz), Lead Wire: D (DIN Terminal)

Function: 3 (3 Position Closed Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 1 (100 VAC, 50/60 Hz), Lead Wire: D (DIN Terminal), Surge Suppressor: Z (with Light/Surge Voltage Suppressor)

Function: 3 (3 Position Closed Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 3 (110 to 120 VAC, 50/60 Hz), Lead Wire: E (Grommet Terminal)

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Model 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Metric size Tubing O.D. 1/8" 5/32" 3/16", 1/4" 3/16" 1/4" 1/4" 5/16" 3/16" Inch size 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Flow rate (l/min(ANR) 290 460 230 100 130 420 660 920 1050 1390 Controlled flow (Free flow) 4.5 7 3.5 1.5 2 6.5 10 14 16 21 Effective area (mm2) Note) Flow rate values

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Nil S n 10 11 Relief type Vacuum suction type D 12 5 D M9B 10 C Q S B 21 C Q S B D 12 5 D M9B Auto switch (With auto switch) Nil With auto switch No D With auto switch (Built-in magnet) Without auto switch (Built-in magnet cylinder) Nil For auto switch part numbers, refer to the next page.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Model 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Metric size Tubing O.D. 1/8" 5/32" 3/16", 1/4" 3/16" 1/4" 1/4" 5/16" 3/16" Inch size 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Flow rate (l/min(ANR) 290 460 230 100 130 420 660 920 1050 1390 Controlled flow (Free flow) 4.5 7 3.5 1.5 2 6.5 10 14 16 21 Effective area (mm2) Note) Flow rate values

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !

PC Wiring System

Input q Insert the electric cables into the cover. w Press with pliers. Input/output 10 seconds for 4 cables. 10 seconds for 4 cables. Output Elimination of branch unit The function of a branch unit is built-in a 16 point unit, allowing reduction of the number of units.

Related Products: Heavy Duty Auto Drain Series ADH4000

0 Repair kit for main valve Kit includes parts from 10-1 to 10-5. !0 10-3 !1 G85(B) O-ring Material: NBR Note) When changing parts, follow the instruction manual. Do not disassemble other parts. 10-4 10-5 OUT Precautions Be sure to read before handling.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

During disassembly and assembly, confirm that there are no scratches or damage, etc, on the O-ring. 13-10-10

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

VVXA21/22

10 stations Symbol VVXA31 VVXA32 VXA31 5-00 Applicable valve TI/ TIL Port size (Individual port) 1 2 Rc Rc VXA32 5-00 1 8 1 4 PA All common ports are Rc 1/4.

Title not found

Bore size(mfn) Standard stroke(mm) MGOftl Slide bearing MGor12, rc 10, 20, 30, 40, 50 MGOr2o,2s 20, 30, 40, 50, 75, 100 25, 50, 75, 100 MGOL Ball bush bearing MGOr32,40, 50, 63, 80,1OO . intermediate stroke As to intermediate stroke (5, 10, 15, 20, 30, 35 )' spacer of 5, 10' 15,20mm width will be used (Example) MGOM50-10 is produced by installing 1smm spacel in MGQM50'25 Consult factory when

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Min. operating pressure 5 to 60C (No freezing) 10 turns 10 turns 8 turns Ambient and fluid temperature Number of needle rotation Hexagonal lock nut With seal, Hexagonal lock nut, Nickel plated Option 181 106 64 29 10 6 3 Weight (g) 20 0.3 1700 26 920 14 460 7 230 3.5 105 1.6 Flow rate /min (ANR) Controlled flow (Free flow) Effective area (mm2) Note 1) Flow rate values are measured at 0.5

MGJ

Table q Standard Strokes Table w Intermediate Stroke (by the 1 mm stroke) Bore size (mm) Applicable stroke (mm) 1 to 15 (Spacer type) 1 to 20 (Spacer type) Bore size (mm) Standard stroke (mm) 5, 10, 15 5, 10, 15, 20 6 10 6 10 Model no.: MGJ6-9 Installing a 1 mm width spacer for MGJ6-10 External size: same as MGJ6-10 Example The minimum auto switch mounting stroke with 2 auto switches is 4

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

Lube Unit Mounting thread M12 Float switch mounting position J (Bracket mounting dimensions) Panel (Option) Bracket (Option) A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 43 10 57 51 16 67 77 85 90 100 283 296 424 424 476 4 3 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1 1 2 615 615 682 419.2 209 4 1 250 125 33.2 33.2