Clean Air Module

IDFB Pressure outlet port Digital flow switch With differential pressure indicator IDH ON/OFF valve Regulator Restrictor ID Filter IDG PB PA IDK AMG AFF AM Variations AMD Flow switch P Regulator R Regulator + Pressure outlet port R1 ON/OFF valve V (V1/V2) Restrictor S Filter F (F1) Weight (kg) AMH AME LLB3 LLB4 AMF 0.36 0.84 ZFC 0.52 1.18 0.47 1.10 SF 0.41 1.09 0.52 1.35 SFD 0.63 1.44 0.57

HRX-OM-W060

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

6 r t !3 w q e !5 !0 !1 !

Air Slide Table Series MXQ

Unit mm/s kg kg kg kg Va W Wa We Wmax K 8

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

R.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

R.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 707 Series ARP20/30/40 Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 765 ARP20/30/40 Series Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27 40 20 6.6 11 1/8 38 30 104 44 118 86 106 40 13 21.5 9 M10 x 1.5 9 32 32 46 22 8.6 14 1/4 47 40 130 60 146 110 130

Air Cylinder NCJP Series Pin Cylinder

Mounting Position Circuit Diagram T r u n n i o n . , . . . . . . . . 9 Accessories. . 10 How To Order N CTJP ffi-ffi 1 L_10 ft. tead wire I $.rihh Suffix With two switches S-With one switch + x1,4" Stroke: S type only sribh Type 90D-90( 1.5 ft. tead wire) Wr|h Auto $Yitch Ca (built in rnagnet) goaD-90A 97D-97 93AD!

PSxx-OMM0002CN

-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -17No.PS-OMM0002CN-F -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -A NPN2 Max.28 V80 mA 1 V -B PNP2 Max.80 mA 1 V -18No.PS-OMM0002CN-F ONOFF () ON OFF ON5OFF 20 P 1 H_1 [Pa] ON OFF [s] -19No.PS-OMM0002CN-F <> (19)

VVX31/32/33

G <& C D, T G, C S L, Z S L, Z 8 8 8 8 8 8 8 8 8 8 8 8 T 9 '01 !" % % :"; % %%& !" % % :; S Note) 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) How to Order Manifold Arrangement of solenoid 9= Write both the base part number and the solenoid valve to be mounted or blanking plate part number. !"

EX500-GPR1A.eng

OUT IN BUS COM A COM B COM C COM D F R P B U S O I R DIA BF SOL RUN GATEWAY UNIT EX500 SERIES 18 19 Switch setting Open the station number switch protective cover and set the switches with a sharp-pointed watchmakers screwdriver etc. NOTE 1. Be sure to turn off the power before setting the switches. 2. Be sure to set these switches before use.

VXP21/22/23

Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

R.

Compact Cylinder with Solenoid Valve/

50 to 300 mm/s Piston speed 1.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !

Clean Rodless Cylinder Series CYP

Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

3 Way Direct Acting NVKF 300 Series

1 3 0 s.sll as6 I +s (84) (103) (122) 7.05 I 7.8 8.54 (17e) (198) (217)s.zg lro-oa 1o:g (236) (255) 1274) 1 1 . 5 4 r 1 2 . 2 8 (141) (160) Body Ported (Top Ported) /Type 21 Manifold NVV3KF3-21 -Stations-007 inch (mm) Lr Dimensions n: Stations 20 1 r v L-'-Ll I 1 0 1 1 10.79 11.54 12.28 (274) (2s3) (312) 4.8 5.55 (122J \141) (179) (198) 15.28 {388) t2 0ilnffision$ $mim llUlff 300 Base Mounted

ZSE1/ISE1

1/8 M5 x 0.8 depth 5 Piping port M5 x 0.8 depth 5 Piping port 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 16-6-5