Modular Type Air Filters Series AF B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S M5 x 0.8 1/8 1/4 Barb fitting Applicable tubing: T0604 10 one-touch fitting Width across flats 17 Width across flats 14 Model Standard specifications Optional specifications Bracket mount With auto drain P A B C D E G J M N Q R S T U V B AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 M5 x 0.8 25 67 7 12.5 25 12.5 85 AC 1/8, 1/4 40 97 10 20
(mm) Fitting size D 3.2 4 Weight g A B C E F Model M-32R-2 M-04R-2 36 36.5 31 .5 32 0.9 0.7 0.8 2 x 1 .2 20.5 4 Component Parts Note Electroless nickel plated Electroless nickel plated Material Brass Brass PP No. 1 2 3 Description Sleeve Studded body Stem Applicable fitting size D Applicable tubing 3 2 1 C F D E B A 15-6-29 6 Miniature Tubing and Miniature Fittings Specific Product Precautions
B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 one-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 AC Model Standard specifications Optional specifications Square type pressure gauge Digital pressure switch Round type pressure gauge P1 P2 A B Note) C D E G J M5 x 0.8 1/8, 1/4 1/4, 3/8 Round type pressure gauge
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
B Z + Stroke DB DX DD 90 B 4DT A DS DH 4DR DB DU DO DO DC DE DU DL Rotation (mm) No.
L3 Item Load factors n Note (1) Max. movable load W B L2 Examine W.
of ZK2A, Please refer to the operation manual (ZK2-OM01301) 32 No.JSY1000V-OMW0002-B 33 No.JSY1000V-OMW0002-B 34 No.JSY1000V-OMW0002-B 35 No.JSY1000V-OMW0002-B 36 No.JSY1000V-OMW0002-B 37 No.JSY1000V-OMW0002-B 38 No.JSY1000V-OMW0002-B 39 No.JSY1000V-OMW0002-B TROUBLE SHOOTING Trouble Possible cause Countermeasures 1) Operation failure or sticking of the Replace the valve.
M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C
M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C
Compretied (lbr.) 0ttt.tftt(8) .24 0.28 l2-t30 50 0,000 2t5 0,5 0 I 0ffil.t 5tjl(B) 0.38 r 2. r30 l0 168,000 200 0.8 1.7 80 2 0tlt.25(B) 0.38 t2-130 50 178.000 200 0.8 1.7 8r 2 tR0EI[.25(B] .25 0.38 3 5 0 50 r78.000 200 0.8 1.7 100 2 0tfl.35(Bl .28 0.50 t2-r30 r50 300,000 450 1.0 2.2 t20 3 r.R0r .35(B) ,n 0.50 3-50 150 300.000 450 1.0 2.2 200 3 0 r . 5 ( B ) .44 0_50 t2-180 250 284.000 775
113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1 2 2-Rc 3 4 2-Rc1 Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88
152.9 ZP 13 C 152.9 ZP 16 C 153.4 ZP 20 C 154.9 ZP 25 C 154.9 ZP 32 C 155.4 ZP 10 B 156.9 ZP 13 B 159.4 ZP 16 B 160.9 ZP 20 B 164.4 ZP 25 B 164.9 ZP 32 B 169.9 ZP 20 UT 150.9 ZP 16 J 164.9 ZP B25 J 183.4 ZP B30 J 189.9 ZP3P 20 JT2 SF 169.1 ZP3P 20 JT2 SF M 169.1 ZP3P 32 JT2 SF 180.5 ZP3P 32 JT2 SF M 180.5 ZP3P 20 JT5 SF 182.6 ZP3P 25 JT5 SF 186.4 ZP3P 32 JT5 SF 200.9 0 0 Note
VH*-OMQ0023-C PRODUCT NAME Pressure Relief 3 Port Valve With Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~02A,B(-B,S)(-K,R,Z) VHS30-(F,N)02~03A,B(-B,S)(-K,R,Z) VHS40-(F,N)02~04A,B(-B,S)(-K,R,Z) VHS40-(F,N)06A,B(-B,S)(-K,R,Z) VHS50-(F,N)06~10A,B(-B,S)(-K,R,Z) VHS2510-(F,N)01~02A,B(-B,S)(-K,R,Z) VHS3510-(F,N)02~03A,B(-B,S)(-K,R,Z) VHS4510-(F,N)02~04A,B(-B,S)(-K,R,Z) VHS4510-(
locking) Section B-B Section B-B Section A-A *Above figure show the unlocked state.
) 4 x 2 x 18 mounting hole SGC SGH B A VNC G F VNH VND A VCC Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model TQ VNB5-32F VNB6-40F VNB7-50F 1 8 1 4 1 4 130 150 180 210.5 226 250 135 140 155 134 146 162.5 20 24 24 100 105 120 36 42 54 12 12 14 251.1 266.6 290.6 292.5 308 332 32 40 50 573 A VNB Series Specific Product Precautions Be sure to read this before handling
8 Product image For PROFIBUS DP (Plug, B-coded) Socket Plug Plug Socket Number of functional poles M12: 2 pins M12: 3 pins M12: 4 pins Key type B-coded (Reverse key) 3 4 4 3 5 1: VP 4: B Line 5 1: 2: A Line (Green) 3: 4: B Line (Red) 5: 390 1 2 2 1 Pin assignment 220 2: A Line 3: DGND Plug, B-coded Plug, B-coded (Viewed from the plug/socket side) 390 Fixed cable length 5 m Cable O.D
SFOD-OMT0009) e) Download f) 34 No.SFOD-OMT0011CN-A (2) (2-1) a) Save b) Save c) (2-2) a) Load b) .datj Open c) 35 No.SFOD-OMT0011CN-A 4.4 4.1 (1-1-2) View (V) 4.2 (2) 4.5 ABS LIN-A 3 3 1) JOG 2) 3) [] a) Remote mode ON(SVRE ON) b) View (V) 4.1 (1-1-2) View (V) c) Return to Origin All axes Return to Origin d) JOG () 3 36 No.SFOD-OMT0011CN-A d-1) JOG