Air Suction Filter

ZFA100 Port size Symbol Model A B 18 20 28 ZFA200 1 8 1 4 Manifold Pitch (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 ZFA200 1 8 1 4 Number of manifold stations Symbol Single unit Note) Model 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244 256 9 182 194 272 284 10

Precision Regulator

Thread type (Thread on the manifold base) SRH Nil N F Rc NPT G SRP Body size SRF 10 20 IR1000 series IR2000 series ITV Manifold type regulator IC Specifications Stations 2 to 8 stations ITVH IR1000 series: 1/4, IR2000 series: 1/2 IR1000 series: 1/8, IR2000 series: 1/4 Common SUP Individual OUT Individual EXH (From IR body) Port ITVX Set pressure Accessory (Pressure gauge) 0.2 MPa, 0.4 MPa

A_HEC-OM-J017

01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set at 25.0 deg.C 38 Offset setting (with writing EEPROM) F 01 3F 02 38 30 31 35 30 03 33 3F 0D 06 3F 0D Set at +1.50 deg.C HEC 6-1

Series 10-MGF Guide table ø40, ø63, ø100

M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) 170 140 10 10 38 38 36.5 E B F KC GB D A 11 11 8.7 120 X T V M6 M6 M5 18.5 KA KB 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C 1/4 1/4 1/8 40 P 100 63 30, 50,75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 7.5 200 160 20 20 11.5 11.5 9.5 96 Guide table10-MGF Air cylinder Rotary actuator Air

Floating Joint/Stainless Steel Type Series JS

125 14-150 18-150 1 Series JS Construction 10, 16 20 to 63 Parts list Parts list No.

ARJ1020F

Description ARJM10-4, -6, -10 Manifold base ARJ1020F-M5-06 ARJ1020F-M5-04 How to Order M5 ARJ 20 10 F 04 1 Option 1 0.2 MPa setting Miniature regulator Note 1) Compared with standard specifications, its adjusting spring has only been changed. It is not the product which does not allow the pressure more than 0.2 MPa. Adjusting spring is not replaceable.

1

Vacuum L = Effective area H = Fixed hysteresis (2% F .S.)

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

46 16 20 25 32 36 46 17 20 20 12 12 17 17 20 20 27 27 12 12 17 17 20 20 22 22 22 22 30 30 56 65 73 36 40 48 56 65 73 92 103 36 40 48 56 65 73 36 40 48 56 65 73 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 0 50 342 87 435 255 100 56 4.6 106 150 4 x M10 x 1.5 23 40 (1 1/2B) 50 (2B) 0 60 450 94 545 356 120 70 6.4 120 155 4 x M12 x 1.75 28 0 219 62 285 157 60 45 4.5 80 100 2 x M8 x 1.25

AC Servo Motor Driver (Pulse input type/Positioning type)

/Program No. selection 1 5 DI0 19 20 LZR LZ Encoder Z -phase pulse 23 DI1 Point table No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(Conforming to DIN) Clip Without indicator light AXT100-20-1 Rated voltage With indicator light 16.8 Voltage symbol Part no. AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 13.8 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V 1. It is able to change the cylinder port between side ported and top ported.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Clip Circuit with light PR plate qChanging the piping direction from in-line to perpendicular (port on the valve) is possible on the VQZ100 series. Follow the steps below to change piping direction: Remove the fitting clips that hold the fitting and port plug in place.

Fieldbus system Ethernet POWERLINK compatible SI unit

Parameter Definition Item Content Default setting 0: -10..10 V 1: -5..5 V 2: -20..20 mA 3: 0..10 V 5 Analog Range Set the analog input range per channel. Selects the analog input range. 0..10 V 4: 0..5 V 5: 1..5 V 6: 0..20 mA 7: 4..20 mA 0: None None 6 Analog Filter Sets analog input filtering time per channel.

EXxx-OMN0037CN

0F3D 3901 10 5 20 0800 2048 3 12 0800 2048 5.25 2.625 10.5 00E4 228 1 4 0 0 0 0 0 0 0 0.75 3 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -20No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5

JXCx-OMT0001CN

1100 1200 1000 1100 1200 mm/s 500 500 410 340 250 200 170 [mm/s] () 30 20 10 [mm/s] () 49 33 17 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 mm/s 400 200 400 200 400 200 [mm/s] () 20 10 20 10 20 10 [mm/s] () 25 13 27 14 30 15 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 mm/s 300 250 150 350 250 200 [mm/s] () 20 10 20 10 [mm/s] () 25 13 27 14 -109No.JXC-OMT0001CN-C

3-Position Rotary Table

No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 Description Body Cover Plate Seal Piston Pinion Gasket (for cover) Table Bearing retainer End cover A End cover B Cylinder tube A Cylinder tube B Tube cover A Tube cover B Sub piston R Sub piston F Adjustment bolt R Adjustment bolt F Magnet Wear ring Bearing Material Aluminum alloy Aluminum alloy Aluminum alloy NBR Stainless steel

AC Servo Motor Driver (SSCNET Type)

10 5 2.86 20 10 5 Parameter *1,*2 Para.

Special Specifications:

-9 Mist Separator 14-20-16 Micro Mist Separator 14-20-22 Odor Removal Filter 14-20-42 Note: Some models have different heights depending on the port size.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

1 station V100 With bracket (Not mounted) F Bracket VK300-43-1A 20 20 stations SY 1(P) port: Rc 1/8 3(R) port: Rc 1/8 SYJ VK Common SUP/Individual EXH VZ Type 21: Body ported (A port top ported) How to Order Applicable solenoid valve VKF333--M5 VKF333--01 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area:

Ejector Valve Unit Series ZYY/ZYX 1

20 40 40 40 40 Suction flow rate Suction flow rate 10 10 20 20 20 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply