Series 10-SV ® EX500 Decentralized Serial Wiring

Note 1) Note 2) A, B port size (Metric) A, B port size (Inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch

ASP

MPa Inlet pressure : 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) 20 10 11,12,13 12 1000 10,11 08,09 10 15 8 500 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 548

Clean Regulator/Fluororesin Type SRF Series

Metric size Inch size Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Applicable tubing size Applicable tubing size Symbol Symbol 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 04 06 08 10 12 19 03 05 07 11 13 19 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" : Basic size : With reducer : Basic size : With reducer Note) Tubing size is interchangeable

PEAPP Series

8 Black Blue Green Natural Red Yellow Color B BU G N R Y Applicable SMC Fitting Series: KQ2, KQG2, KQB2, KG, KB, KS, KX, DMK, KDM Note: Fittings are not FDA/NSF compliant Metric Sizes General Specifications 04 06 08 10 12 4mm (5/32) 6mm 8mm (5/16) 10mm 12mm Operating Fluid Air, Water, Compatible chemicals -50 to +140F (-45 to +60C) Linear Low density polyethylene Operating Temperature Material

LVQ

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVQ How to Order LVQ 2 0 07 S Option (2) Applicable option Symbol Note 8 v v v 9 v v v 7 v v v 1 v v v v 24 v v v 2 v v v 6 v v v v 3 v v v 4 v v v 5 v v v v Body class Nil J K N Symbol 2 3 4 5 6 Body class 2 3 4 5 6 Orifice dia. 4 8 10 16 22 For high temperature Pilot port thread type Buffer material FFKM Nil M R N LQ1

EX500 Gateway System Serial Transmission System Series SV ® How to Order Manifold Mounting Direct mounting Nil D DIN rail mounting (With DIN rail) Series D0 DIN rail mounting (Without DIN rail) 1 SV1000 D3 When a longer DIN rail is For 3 stations

fitting for 5/32" One-touch fitting for 6 One-touch fitting for 1/4" One-touch fitting for 4 One-touch fitting for 5/32" One-touch fitting for 3/8" SI unit part no.

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

(a Slect a unit with a capacity exceding the air coBumption, dtemined in (1). 8 Constructim Dimensions Construction Dimenskrns th.rdd Drah Porf Garr|ab) ThGdd Dftin Porf (Fdndc) Baclt IlEadd dnin pon ltumale) lrodel fort size (NPr B 9C D{mm) fmz0 194 (1ml 3.46 (88) 2.20 (56) t sd.5 Dep$-8 0.87 \22) 1.57 110) 0.09 0.59 (15) l12l 2.87 (731', nmf0 5.53 4.74 rm.5) 295 o5) M3f.5 DAri-8 09{ (241

Clean Room Regulator/Fluoro Resin Type Series SRF30

(inch size) 11 3/8 SRF30T 11 Tubing SRF30S 07 Integral fittings Pilot port thread type Applicable tube size Inch size (Tubing size regulator port) Metric size (Tubing size regulator port) Nil N Rc1/8 NPT1/8 07 11 1/4 x 5/32 (with plug-in reducer) 3/8 x 1/4 (standard size) 6 x 4 (with plug-in reducer) 8 x 6 (with plug-in reducer) 10 x 8 (standard size) 06 08 10 Note)The reducer method allows

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

L1 D L2 L3 L4 L5 L6 L8 Model Port size AS2000E-01 10 4.5 17 16 5 57 30 61.5 40 15.5 1/8 AS2000E-02 12 4.5 23 20 5 59 30 63.5 40 17 1/4 AS3000E-02, 03 5.5 25 26 5.25 69 45.5 76 56 20.6 13.25 1/4, 3/8 Note 1) Reference dimensions AS4000E 2 x 1/4 to 1/2 72 (Max. 80) (1) Effective thread depth 6 2 x M4 x 0.7 664

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 M5 U10/32 01 02 03 04 M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

Series VQ1000 10- Base Mounted 21- Plug-in Unit

U3 U0 U1 U2 U3 S0 S1 S2 S3 Note 2) 2 to 16 stations Note 2) Note 2) Note 2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins

Series VQ1000 10- Base Mounted 21- Plug-in Unit

U3 U0 U1 U2 U3 S0 S1 S2 S3 Note 2) 2 to 16 stations Note 2) Note 2) Note 2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins

Actuation options include 5 port single solenoid, 5 port double solenoid, and dual 3/2 ported.  Manifold variations for the SQ plug-in series include EX510 Gateway-type serial transmission system, D-sub connector, flat ribbon cable connector, PC wiring system compatible flat ribbon cable, terminal block box, or a lead wire kit. 

AS-FM

Note) Metric size Inch size Control type KE 0 1 Meter-out Meter-in 3.2 01 03 05 07 09 11 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 23 04 06 08 10 4 AS-FG 6 8 With One-touch fitting AS-FP 10 AS-FM AS-FM For low speed control Note) For applicable tubing O.D. selection, refer to the Model on page 716. Use 1/8" tube.

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil None LVD 1 With flow rate adjustment Body class Orifice dia. Symbol 2 With bypass ø4 2 2 Valve type LQ2

Symbol Symbol Nil 2 3 4 6 5 Application Ports A & B same size N PPS PFA Ammonium hydroxide compatible Metric sizes 03 04 06 08 10 12 19 25 3 4 6 8 10 12 19 25 Pilot port thread type Refer to the applicable tubing table to the left. Different diameter tubings can be selected within the same body class.

Integral Fitting Type (Hyper Fittings) Series LVD How to Order LVC LVA LVD 1 0 03 S LVH Body class Option LVD Orifice dia. Body class Nil None Symbol 1 Valve type 1 1 ø2 With flow rate adjustment LVQ 2 2 2 ø4 With bypass 0 N.C. 3 3 With flow rate adjus

LVN Material Body Diaphragm Note Actuator section End plate Symbol TL/TIL Applicable tubing size PFA PPS PTFE Nil Body class LQ3 Connecting tubing outside diameter Symbol Ammonium hydroxide compatible 2 1 3 4 5 PFA PPS PTFE N Metric sizes 03 04 06 08 10 12 19 3 4 6 8 10 12 19 Pilot port thread type Symbol Body class 1 2, 3, 4, 5 1, 2, 3, 4, 5 Thread type 4 One-touch fitting 6 One-touch fitting

M-E06-4-LQ3

Note 1) Nut size Symbol Nil 1 2 3 4 5 6 Size (Set of 1 to 6) 1 2 3 4 5 6 GPS insert pin holder (single) AXT1075-30-2 GB insert pin Holder assembly LQ3 GPB Nut size Pin type Nil N Metric size Inch size GB insert pin (single) LQ3 GPB 03 Tubing size symbol (Refer to Table 1.) 03 (3, 1/8"), 04 (4), 06 (6), 07 (1/4") only GB holder (single) LQ3 GHB 03 Tubing size symbol (Refer to Table 1.

AS-FS

Note 1) Inch size Note 3) 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Metric size 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Indicator window direction Elbow Universal Nil 0 Indicator window Note 1) For selecting applicable tubing O.D., refer to the Model on page 4. Note 2) Use 1/8" tubing.

VM100F

Refer to page 15 for details. 5 5-port (Twist selector 3-position only) Z With miniature indicator Applicable only to bottom ported Piping direction and the height of plunger 0 Side ported Long (Basic model only) 1 Short 2 Bottom ported Long (Basic model only) 3 Short With One-touch tting Actuator type1 00 Basic model 01 Roller lever 02 One way roller lever 05 Straight plunger 06 Roller

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