Symbol: FG (2-Position), Solenoid: D (Double), Voltage: 1 (100V AC), Option: None, Port Size: A06 (Side Piping 3/4), Thread: T (NPTF)

Symbol: FG (2-Position), Solenoid: D (Double), Voltage: 3 (24V DC), Option: M (Direct Manual Override), Port Size: A06 (Side Piping 3/4)

Symbol: FG (2-Position), Solenoid: D (Double), Voltage: 4 (12V DC), Option: Z (Indicator Light w/Surge Voltage Suppressor), Port Size: A04 (Side Piping 1/2)

Symbol: FG (2-Position), Solenoid: D (Double), Voltage: 3 (24V DC), Option: None, Port Size: A06 (Side Piping 3/4)

Symbol: FG (2-Position), Solenoid: D (Double), Voltage: 3 (24V DC), Option: M (Direct Manual Override), Port Size: A06 (Side Piping 3/4), Thread: T (NPTF)

Symbol: FG (2-Position), Solenoid: D (Double), Voltage: 4 (12V DC), Option: N (Indicator Light)

Symbol: FG (2-Position), Solenoid: D (Double), Voltage: 4 (12V DC), Option: None, Port Size: A03 (Side Piping 3/8), Thread: T (NPTF)

Symbol: FG (2-Position), Solenoid: D (Double), Voltage: 4 (12V DC)

Passage: FG (2-Position), Solenoid: D (Double), Voltage: 3 (24V DC), Option: V (Individual Pilot Exhaust), Seal: Metal Seal, Subplate: A02 (Side Ported 1/4), Thread: Rc, Connector: SC (Pre-wired Connector)

Gun Type Ionizer

Twists or crushing of connected tubes d. Hardness and deterioration of connected tubes e. Air leakage 192

Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.

AMD

service indicator Nil B 3 4 650 1 850 11 2 N.C. auto-drain C N.O. auto-drain D Refer to the table below for accessory/option combinations.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Terminal q DC (+) w N.C e DC () r IN (1 to 5 V) e w q Power supply/Output connection cable (Accessory) Power supply/Output connector (8P) Pin no. 7 Green 8 Yellow 6 Red 5 Gray 4 White 3 Black 2 Blue 1 Brown i u y t r e w q Pin no.

IC

D-IN/READ button Used to select mode and turn on or off power supply to electro-pneumatic regulator. P-ON/STOP button Used to turn on or off main power supply, escape from mode, or change to stand-by state. DOWN button Used to change mode and set value. Pressure display Displays measured value, settings, and error code. No. q !0 q CONTROLLER PRESSURE OUT w e w r RUN 4 3 2 1 F.R.L.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Basic type Front ported D-F9 Side ported With external stopper D-M9 11-6-3 4 Series CRJ Precautions Be sure to read before handling.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Basic type Front ported D-F9 Side ported With external stopper D-M9 11-6-3 4 Series CRJ Precautions Be sure to read before handling.

VHS

0 q ! !2 o u i !8 !6 !5 SlA Installation !3 !1 VlA 1(P) 2(A) 1(P) 2(A) Warning 1 When exhaust piping is connected to 3(R) port,effective area should be larger than the specified value mentioned in the table below. If it is smaller, air leakage will occur due to back pressure. y q w !4 SlA !7 !4 3(R) VlA !

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

D-M9B, D-F8B D-M9N, D-F8N 2-wire 3-wire 24 VDC relay, PLC 24 VDC relay, PLC Solid state auto switch Yes 24 VDC (10 to 28 VDC) 24 VDC (4.5 to 28 VDC) Yes 2.5 to 40 mA 40 mA or less Refer to page 920 for the applicable auto switch list. 909 Rotary Table MSQ 1122Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Size 1 2 3 7 10 20 30 50 Fluid Air (Non-lube) Size Suction

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

Through-hole/CQ2YB, CDQ2YB Both ends tapped/CQ2YA, CDQ2YA Both ends tapped (mm) Bore size (mm) 63 O1 R O1 thread R R 18 M10 x 1.5 80 22 M12 x 1.75 100 22 M12 x 1.75 H thread effective depth C 4-N through 8-O counter bore U Q F 2-P (Port size) (Rc, NPT, G) I 22 M E D Z 11 Lead wire min. bending radius 10 Auto switch D-A7, A8 K M E S J L B + Stroke A + Stroke Rod end male thread H1 Rod end

Drain Separator for Vacuum Series AMJ 1

ZCU OUT IN AMJ Misc. 2port size Q B Maintenance space 20 Rc 1/8 Drain (mm) A B Note) C D With drain guide R Note) Bracket mounting dimensions Model Port size Q E F G H J K L M 158 (160) 2.3 53 8 6.5 23 40 41 16 53 14 169 (171) 53 1/4, 3/8 AMJ3000 194 (195) 2.3 70 10.5 8.5 26 54 50 17 70 18 205 (206) 70 3/8, 1/2 AMJ4000 273 (274) 3.2 90 13 11 35 66 70 23 90 24 284 (285) 90 3/4, 1 AMJ5000 Note