SMC Corporation of America
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Air operated, External pilot valve 2 port Cylinder operated by external pilot air Plating 17-4-21 VNC Single unit N.C./N.O. 17-4-37 Single unit VND N.C.

Parianopoulus S.A. 9, Konstantinoupoleos Street, GR-11855 Athens Phone: 01-3426076, Fax: 01-3455578 Norway SMC Pneumatics Norway AS Vollsveien 13 C, Granfoss Nringspark N-1324 Lysaker Tel: (47) 67 12 90 20, Fax: (47) 67 12 90 21 Poland Semac Co., Ltd. PL-05-075 Wesola k/Warszaway, ul. Wspolna 1A Phone: 022-6131847, Fax: 022-613-3028 Czech SMC Czech.s.r.o.

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 40 285.5 21 273 No.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc. 13-3-21 21 Series ZR Ejector exhaust Ejector System Complete Unit Ejector + Valve + Vacuum Switch + Filter Vacuum pad connection V port Pilot exhaust PE port Spacer A Vacuum release air supply PD port Pilot valve

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSE1-14, -15 Hook SET ZL Brown DC (+) + 21\r Main circuit of switch HYS Indicator light Pin Slot Housing OUT Black + 12 to 24 VDC Load 30 V, 80 mA ZY Blue DC () ZQ 2.

(17) MBxl 25 a.2a (;) 0.43 ( 1 1 ) M18x1.5 t . l 8 (30) 3 5 4 (s0) 2 2 8 t58) 6.26 (1s9) 205 (52) ( 1 1 2 ) 2 6 0 (66) 6.57 t167) 1.34 (35) 3 3 5 (85) 2.52 (64) {20) 1 5 7 (40) 0 3 9 o0) 0 6 7 o7) Ml0x1 25 o 2 a (7) 0.55 M 1 A x 1 5 't.22 ( 3 1 ) 3 8 6 (93) 2 2 8 153) s T o 6 6 9 (r 70) 2 0 5 (52) 1112) 264 (66) 1173) 1 5 7 (40) 4.02 l102) 3.07 (78) 0.98 (25) 205 (52) 0 5 5 (14) 0 8 3 (21

(301 0.s9 t22.61 0.67 (17) 0.53 0.04 (1) o.22 o.24 (6) 0.83 (21) 0.61 (15.41 3.17 2.41 0.31 (8) 0.55 13.9 Millimeters in Parentheses DIRECTIONAL AIR VALVE MANIFOLD ASSEMBLY SERIES NVF 110 Manifold gaskets: W100-3-t (2-sta.)

B H 10 Y-J010B 15.2 8 21 M4 x 0.7 CP95 SNJ-006B 16 Y-J016B 6 NTJ-006A 16.6 11 21 M5 x 0.8 9.2 8 M6 x 1.0 4 6 5.5 6.4 M3 x 0.5 2.4 SNJ-010B 10 NTJ-010A 12.7 11 M8 x 1.0 4 10 7 8.1 M4 x 0.7 3.2 NDd9 NDH10 R1 NX U1 Part no.

Weight 7.4 7.4 Body ported SS0752 SS0700-10A-2 28 g Base mounted SS0755 SS0700-10A-5 21 g Body Ported (SS0752) Base Mounted (SS0755) Body Ported Base Mounted External pilot [-R] This can be used when the air pressure is lower than the minimum operating pressure (0.2 MPa) of the solenoid valves or used for vacuum specification.

Model d T1 T2 H1 H2 D1 D2 L1 L2 L3 L4 A * M ASP330F-01-06S-X369 R1/8 M5X0.8 12 8 14.2 20.4 27.5 13.6 38.6 35.2 13.5 6 11.6 ASP430F-02-06S-X369 25.2 34.4 18.3 16.8 R1/4 17 18.5 48.7 42.4 ASP430F-02-08S-X369 27.2 36.4 18.4 18.5 Rc1/8 12 8 15.2 ASP530F-03-08S-X369 29.7 41.2 18.7 R3/8 19 23 21 56.2 50 ASP530F-03-10S-X369 31.6 43.1 20.8 10 18.5 ASP630F-04-10S-X369 33.6 47.9 25.6 20.8 R1/2 Rc1/

pressure: 600 psig (4.1 MPa) 1.5 (38.1) 80 0.55 0.48 70 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 0.41 60 0.34 50 0.27 40 0.69 (17.5) 0.21 30 0.14 20 2.5 (63.5) 0.07 10 A 0.00 0 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AZ1402TA Inlet pressure: 2 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg) -21

steel Aluminum alloy Hard chrome plated Head cover Hexagon socket head cap screw 3 17 Stainless steel Aluminum alloy Hard anodized Piston A Hexagon nut 4 18 Chromated Carbon steel Aluminum alloy Hard anodized Piston B Spring washer 5 19 Chromated Steel wire Aluminum alloy Hard anodized Piston rod Spring washer 6 20 Chromated Steel wire Carbon steel Hard chrome plated Tie-rod Hexagon nut 7 21

NN I.~ 6 7 12 13.9 6 12.5 19.5 26.5 85 9 3.5 M3XO.5 Ml0X 1.Q 9 18.5 25.5 32.5 3 27.5 34.5 41 .5 3 10 ' h-~o 19 22 6" 14\5 21 28 12 12 3.5 I M4 XO.7 I MI5 X 1.5 1.1 ~ 2075 27 34 4 32.5 39 ~46 5 Series CJP How To Order Pin cylinder e-' '-. Rod end thread J Nil-With thread BWithout thread Mountin9 ~ BPanel mount type ..

4Small round flat washer 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 50 CKZ3N-S050T Note 1) 63 CKZ3N-S063T Note 1) eSwitch holder uProximity switch (P&F) iHelical torsion spring oHexagon nut type 3 !0Switch holder gasket !1Hexagon socket head cover cap screw qDetection plate !2Hexagon socket head cover cap screw !3Hexagon socket head cap screw !

9 from the chart above CXSM32-PS CXSL15APS CXSL20APS CXSL25APS CXSL32APS 8-28-21 21 Series CXSJ Construction: Axial Piping CXSJ6P, CXSJ10P e q t w r u y i o Component Parts No.

Front matter 21 Symbol/Type Compact Pad U: Flat UM: Flat with groove B: Bellows Pad diameter 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16 How to Order ZP3 015 U N Pad unit Pad diameter Symbol Pad material Material Symbol NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber Pad diameter 015 02 035 04 06 08 10 13 16 N S U F GN GS 1.5 2 3.5 4 6 8 10 13 16 Pad typePad diameter

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

7.15 x 3.75 x 1.7 P-5 SO-015-16 P-7 SO-010-16 Nickel plated REC CX M2L040-07B82108 SO-010-24 M2L032-07B82107 SO-010-21 M2L025-07B82106 SO-010-20 CY 28 x 30 x 1 22.2 x 24 x 0.9 17.6 x 19.4 x 0.9 Since there is a possibility of improper operation, please contact SMC regarding the replacement of seals.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX General Purpose Type P. 8-30-10 Band, Rail, Tie-rod, Direct Mounting 2-color Indication Type P. 8-30-18 Band, Rail, Tie-rod Mounting D-X 20Data P. 8-30-20 Solid State Switches General Purpose Type P. 8-30-21 Band, Rail, Tie-rod, Direct Mounting

9 from the chart above CXSM32-PS CXSL15APS CXSL20APS CXSL25APS CXSL32APS 8-28-21 21 Series CXSJ Construction: Axial Piping CXSJ6P, CXSJ10P e q t w r Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u y i o Component Parts No.