TABLE OF CONTENTS

Holes #10-32 UNF THD x .25 (6.4) DEEP .

17

ZZ(MY1BG) (Hexagon socket head taper plug) VV MY1BG MY1BG MY2C Standard piping/Centralized piping (mm) MY2 H/HT A B C G GB H K J LD L LL LW M MM N NC Model E 2 JJ M5 x 0.8 KK 9 NH NW 53 NE NF MY1B25 MY1B32 MY1B40 110 9 5.5 16 24.5 54 M6 x 1 9.5 5.6 18 40.2 39 110 40.5 55 42 9 M5 x 0.8 30 MY3A MY3B 140 11 6.6 19 M8 x 1.25 2 28.5 68 M5 x 0.8 16 10 6.8 22 50.2 49 64 140 70 52 50 12 M6 x 1 37

XM, XY

10-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x

Slider Type Ball Screw Drive/11-LEFS Series

M4 x 0.7 thread depth 6.4 24 28 3.5 39.4 ( ) +0.025 0 3H9 depth 3 L Cable length 250 (37) A (Table traveling distance) Note 2) (110) 37 40 (41) [39] 39 [(41)] Stroke (2.4) 7 65 [Origin] Note 4) Origin Note 3) 27 4 [2] 2 [4] 9.2 Motor cable (2 x 5) 46 6 20 33 40 Vacuum port M5 x 0.8 x 5 6.5 5.5 M4 x 0.7 thread depth 7 (F.G. terminal) Motor option: With lock Step motor Servo motor Cable length

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

Transfer

1 M8 x 1.25 LA 11 12 14 MB M6 x 1 M8 x 1.25 M10 x 1.5 LB 9.5 16 15 MC M5 x 0.8 M6 x 1 M8 x 1.25 LC 9.5 12 12 MD 9 11 14 LD 5.5 6.5 8.5 ND 5.6 6.8 8.6 PA Rc 1/8 Rc 1/8 Rc 1/4 PB Rc 1/16 Rc 1/16 Rc 1/8 Model ML2B25 ML2B32 ML2B40 716 Stroke Reading Rodless Cylinder with Brake ML2B Series With stroke sensor: With brake: ML2B Bore size S Stroke ML2B Bore size B Stroke CEP1 N K M 9 N K M O H 1

VQ4000

Load factor:((Load weight x 9.8)/Theoretical force) x 100% Grommet type IP65 compatible Enclosure System Components Speed controller Silencer SPG (Steel pipe) dia. x Length AS420-03 AN300-03 10A x 1 m 2-5-1 Base Mounted 2 Series VQ4000 Precautions 1 Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 2-9-2.

ML2B

x 0.8 M6 x 1 M8 x 1.25 NN 22 26 37.5 LC 9.5 12 12 LB 9.5 16 15 LD 5.5 6.5 8.5 MC M5 x 0.8 M6 x 1 M8 x 1.25 PA Rc 1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 ND 5.6 6.8 8.6 MB M6 x 1 M8 x 1.25 M10 x 1.5 LL 28 30.5 37.5 PB Rc 1/16 Rc 1/16 Rc 1/8 OO 9 10 23 PP 56 62.5 77 QQ 34.5 42 51 RR 37.5 45 54 LA 11 12 14 Model ML2B25 ML2B32 ML2B40 10-13-14 12 Stroke Reading Rodless Cylinder with Brake

ML2B

x 0.8 M6 x 1 M8 x 1.25 NN 22 26 37.5 LC 9.5 12 12 LB 9.5 16 15 LD 5.5 6.5 8.5 MC M5 x 0.8 M6 x 1 M8 x 1.25 PA Rc 1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 MB M6 x 1 M8 x 1.25 M10 x 1.5 ND 5.6 6.8 8.6 LL 28 30.5 37.5 PB Rc 1/16 Rc 1/16 Rc 1/8 OO 9 10 23 PP 56 62.5 77 QQ 34.5 42 51 RR 37.5 45 54 LA 11 12 14 Model ML2B25 ML2B32 ML2B40 10-13-14 12 Stroke Reading Rodless Cylinder with Brake

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

thread depth 3.5 Vacuum suction port 35 Note) 11-, 22-: Vacuum suction port 12-, 21-: Relief port ST 61+ST 15 49.5+ST 3.5 8 13 1 M5 x 0.8 x 4 L 4 16 14+ST 4.5 4.5 (Hexagon socket set screw) M8 x 1.25 x 8 L (Bolt holder) 1 40 45 45 3 3 330.2 330.2 330.2 42 20 8 8 6.5 counterbore depth 5.5 (Same on the opposite side) 3.4 through 2 x M3 x 0.5 through 3 3 6.5 45 45 M4 x 0.7 x 14.5 L (Hexagon

Air Cylinder

A AL B B1 C D E F G H H1 J K KA M MM N P S ZZ 32 Up to 300 22 19.5 42 17 31 10 24 8 9 38 6 M5 x 0.8 5.5 8 8 M10 x 1.25 18 1/8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to

EXxx-OMY0006CN

Table 12-1 EX245-DY1 (W x L x H) mm 54 x 120 x 61 280 g , PBT 24 V DC 1.6 V 50 mA 4 x M125 A code 2 / , US2 30 V /1 0.5A /1 2 A 1 1 8 PNP 76 No.EX##-OMY0006CN 12.3. /SI IP65M12 M12,5 , Table 12-2 EX245-DY1 (TOP View) 1 N.C.() 2 2 DO ( n+1) 3 5 1 3 0 V (/) 4 DO ( n) 4 5 FE/ 12.4.

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Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 M5 U10/32 01 02 03 04 M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Throttle valve (Without check valve) -X214 Throttle valve (Without check valve) Note) M5 size: S (with seal) is not necessary. 611 A AS Series Construction AS1201-M5 AS2201/3201/4201 AS3201-02 o !1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.

CXT

23 55 53 28 M8 x 1.25 10 86 6.9 9.5 16 PA Bore size (mm) M MM (N) (NA) NN PB PW Q QW RB RW S T U W X Y Z 12 M4 x 0.7 M8 x 1.0 6 8 27 30 60 80 85 26 RB0806 17.5 96 13 1 77 22 7.5 5 16 M5 x 0.8 M8 x 1.0 8 8 27 45 70 95 90 40 RB0806 15 103 13 2 92 22 7.5 5 20 M6 x 1 M10 x 1.0 10 10 29 60 100 120 105 46 RB1007 26 122 17 2 117 29.5 9 5.5 25 M6 x 1 M14 x 1.5 10 12 50 60 100 130 105 50 RB1411

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

Series: 25A-ZSE20, Rated Pressure Range: B (0 to -101 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specifications: M (SI Unit Only), Piping Specifications: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Series: 25A-ZSE20, Rated Pressure Range: B (0 to -101 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specifications: M (SI Unit Only), Piping Specifications: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B (Panel Mount Adapter)