Multistage Ejector Series ZL112/212 1 Body r Vacuum sensor unit t Nozzle y Diffuser u P397110 Other than vacuum switch Detent plug i P397176 Vacuum switch specifications Lead wire cover With valve Front cover B !2 With valve Valve plate !3 With valve Needle !4 SYJ514 With valve Supply valve (N.C.) !5 SYJ514 With valve Release valve (N.C.) !
ZF ZP ZCU How to Order Ejector Manifold AMJ ZZMA 06 06 R Misc. Number of stations Port and silencer location R L B 01 1 station Right side Left side Both sides 10 10 stations (max.) Note) Right and left side are viewed from the front side of VAC port.
Foot MounVOlevis Mount . 8 5 Auto Switch Mounting Position Circuit Diagram T r u n n i o n . . . . . . .
(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.
[Clamp Cylinder Body Dimensions] Right type Center type Left type 24H7 through 26.5 through CKZ 25 42 * 781EL R Model Arm position Weight kg CKZ25-42A781EL-R Center 0.23Kg CKZ25-42B781EL-R Right 0.23Kg CKZ25-42C781EL-R Left 0.23Kg !
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T (mm) (mm) Rod end male thread Applicable bore size V W X U R S T Q Part no.
Large effective area Low power consumption 1/4 67 111 31 55 40 64 (Max. 73) AVL2000-*02 Manual/Manual solenoid lock out Modular design 1/4 67 20.5 111 31 55 34 40 64 (Max. 73) AVL2000-*02-*DZM 3/8 76 118 36 57 48 64 (Max. 73) AVL3000-*03 How to Order 3/8 76 12.5 118 36 57 34 48 64 (Max. 73) AVL3000-*03-*DZM 1/2 98 133 47 61 52 64 (Max. 73) AVL4000-*04 G 20 00 F DZM R 5 02 AVL 1/2 98
Refer to gauge guide (P.94). r w q w q Sample Order Number Port 2P 4PL 01 S BP10 e r t 0 4 4 4 4 1 MPA e 2P 4PL qIN wOUT erGauge port (Inlet) Specifications BP1030 15 to 300 psig (0.1 to 2.1 MPa) BP1001 0.5 to 10 psig (0.0034 to 0.07 MPa) BP1002 1 to 30 psig (0.007 to 0.2 MPa) BP1006 2 to 60 psig (0.014 to 0.4 MPa) BP1010 5 to 100 psig (0.034 to 0.7 MPa) BP1020 15 to 200 psig (0.1 to 1.4
3 e r !2 !1 u t w y CHK CHN CHM CHM CHS CH2 o !
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.
Bore size 12 to 25 Without auto switch, With auto switch CD hole H10 0.4 0.2 CX CL 4 x CN R M CT A + Stroke CW CZ Applicable Cylinders/Double Clevis Pivot Bracket Part No. (mm) Hexagon socket A CN part no.
0 e e u u r i !1 r t !1 !0 Port 1 Port 2 Port 1 Port 2 Valve element A t q q o o w Valve element B y w Port 3 3 Port valve 2 Port valve Working Principle When the pilot operated solenoid valve !2 is not energized, the valve element A t connected to the piston u is closed by the return spring i. Then valve element B y connected to the valve element A t is open.
Leakage voltage Particularly when using a resistor in parallel with a switching element and when using a C-R element (surge voltage suppressor) to protect the switching element, take note that leakage current will flow through the resistor, C-R element, etc., which may prevent the valve from turning off. 2.
Keep rotating the initial air supply adjustment nut r to the right, and the minimum possible initial air supply flow is the point at which the name plate and adjustment nut mark align closest to where torque is felt. (The initial air supply adjustment nut r is set at the minimum flow rate position at factory shipment.