Clean Regulator/Fluororesin Type

1.2 Weight (kg) 0.10 0.28 1.3 Particulate Generation Characteristics Flow-through Characteristics Particle concentration (particles/mL) Particle diameter: 0.1 m or larger 400 1000 350 Value of specific resistance to that of supplied DI water Resistivity (km) 300 100 250 200 150 10 100 50 0 1 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Time of water flow (min) Measuring time (min) Test method

Angle Seat Valve /

used with heated water Can be used with heated water Orifice diameter [mm] Port size Valve type Orifice diameter [mm] Port size Valve type Orifice diameter [mm] Port size Valve type N.C. 1/4 to 1 10, 15, 20, 25 10, 15, 20, 25, 35, 40, 50 N.C.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 6kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) 200 100 50 10 1 Positioning distance (mm) 100 200 50 10 1 10 20.1 10.1 5.1 1.1 0.2 10 10.1 20.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 10.1 5.1 2.6 0.6 0.1 20 5.1 10.1 2.6 0.6 0.1 30 6.7 3.4 1.7 0.4 0.1 30 3.4 6.7 1.7 0.4

Series LQ3 High Purity Fluororesin Fitting

W M L H E W M 10 14 18 22 30 36 14 20 25 29 37 49 46.5 57 79 88 103 122 11 16 21 24 32 41 10 17 22.5 24.5 27 30 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3U1A LQ3U2A LQ3U3A LQ3U4A LQ3U5A LQ3U6A 1/4 (E) (E) L

IDX-OM-Z004

, 2m) ) 4 (10 4x ( 20 4x 25 2m) (10, 0.7m) (10,0.7m) 107 267 460 R2 735 64 75 7001 1120 R2 (17) 17) 40 127 479 51 1276 1418) (14~18) 1375 1,3 -W4 -W4 (-W4) (-W4) Y1/2 Y 1/2 () () R1/2 R1/2 (50) 20 (143) 335 7122 752 670 1,3 (-W5) -W5 -W5 (-W5) R1/2 R1/2 IDF100F150F-W 6 3 IDX-OM-Z004 6 IDF125F-30-W () K16K (10, 2m) (10 ) ( 4 4x JIS 65A 10K (K16K) 2m) 20 JIS 65A 10K

MGC

107 45 170 110 80 M12 X 1.75Depth21 22 M10 X 1.5Depth20 17Depth12 37 10.5 194 42 19 23 142 Bore (mm) WH W V U T S R Q J O I N Z P M Y L X K Wq 20 25 32 40 50 23 36 40 86 12 26 12 21 44 M6 X 1 25 25 140 M5 X 0.8 38 80 80 30 60 30 25 44 47 98 13 31 12 21 52 M6 X 1 30 32 153 M5 X 0.8 46 80 95 37 70 30 50 53 112 16 28.5 38 12 21 60 M6 X 1 35 32 161 Rc(PT)1/8 50 82 105 37 80 25 60 63 132 20 47

Fluoropolymer Piping Equipment

Page 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA LQHB LQHB TL TIL TL TIL TL Metric Size TLM TILM TLM TILM P.948 TD TID TD TID TIL Inch Size TH TIH TH TIH Material: PFA 2, 3, 4, 6, 8, 10, 12, 16, 19, 25 TLM Metric Size From page 949 1/8", 3/16", 1/4", 3/8", 1/2", 3/4" 1", 1 1/4" TILM Inch Size 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 3/4"

Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Ejector Valve Unit Series ZYY/ZYX 1

10 20 20 20 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) ZY -10S

ZP3

3 Pad diameter Buffer specifications 78.5 3 6 10 15 20 46 6 6 109.5 Rotating, Non-rotating Rotating Rotating, With bushing Non-rotating 56 10 10 1.5, 2, 3.5 114.5 59 15 15 4, 6, 8 10, 13, 16 66.5 20 20 124.5 25 25 Wide selection of piping For 2 piping!

3 Port Solenoid Valve Rubber Seal Series SY100 1

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Refrigerated Air dryer Series IDU/IDF

(C) 15 10 5 15 10 5 15 10 5 15 10 5 15 10 5 1.01 0.72 0.43 1.18 0.84 0.50 1.39 1.00 0.60 1.68 1.20 0.72 2.10 1.50 0.90 25 0.90 0.64 0.39 1.05 0.75 0.45 1.24 0.89 0.53 1.50 1.07 0.64 1.87 1.34 0.80 30 0.84 0.60 0.36 0.98 0.70 0.42 1.16 0.83 0.50 1.40 1.00 0.60 1.75 1.25 0.75 32 0.76 0.54 0.32 0.88 0.63 0.38 1.05 0.75 0.45 1.26 0.90 0.54 1.58 1.13 0.68 35 0.51 0.36 0.21 0.59 0.42 0.25 0.69

Air Cylinder MGQ Series Compact Guide Cylinder

, 20, 30, 40, 50 20, 30, 40, 50, 75, 100 MGOL /tO, 50, 63, 80, 1OO 25, 50, 75, 100 As to inremedrale slroke (5, 10, 15,20,30 35.. .. ), spacer ol5, 10, 15 20mm wdth wllbe used (EEmple) MGQM5o lO s produced by instaling 15mn spacer in MGQ'!

EXxx-OMY0006CN

X PROFINET FW 24 H watch dog FW EX##-OMY0004 1 No.EX##-OMY0006CN . 1 . 2 2. . 10 2.1. . 10 2.2. . 11 2.3. . 12 2.4. . 12 2.5. . 13 2.6. . 13 3. . 14 3.1. . 14 3.2. . 15 3.3. ()UT1/UT2 . 16 3.4. . 20 4. . 21 5. . 22 5.1. . 22 5.2. . 23 6. . 24 7. . 25 7.1. . 25 7.2. . 27 8. . 33 8.1. . 33 8.2. . 36 9. . 44 9.1. IO . 44 9.2. . 48 10.

Air Catch Sensor

10 Rc1/8 SUP.

EX600-DX_DY_DM_eng

1 FE - 3 2 1 0 3 2 1 1 0 25 24 23 22 21 20 19 18 17 16 15 14 25 24 23 22 21 20 19 18 17 16 15 14 Digital I/O unit Digital output unit EX600-DM E EX600-DM F EX600-DY E EX600-DY B EX600-DY F Configuration Configuration Configuration Configuration Configuration 3 4 1 2 5 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 2 1 3 5 4 7 6 9 8 11 10 13 12 2 1 3 5 4 7 6 9 8 11 10

T

Polyurethane Coil Tubing: Series 10-TCU For details, refer to Pneumatic Clean Series catalog. Specifications 10-TCU 10-TCU 10-TCU 10-TCU 0425B-1 0425B-2 0425B-3 0604B-1 0604B-2 0604B-3 0805B-1 10-TCU 10-TCU 10-TCU Model Tubing O.D. (mm) No. of cores 2 cores 3 cores 1 core 2 cores 3 cores 1 core 1 core 4 6 4 8 5 Tubing I.D.

Refrigerated Air Dryer

, IDF6E-10 IDF8E-10, IDF11E-10 Type 100 V 10 A IDU3E-10, IDU4E-10 IDU6E-10 30 mA IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.

CG1x-OM0006N

M4x0.7x22L 20 NBA-088S 25 NBA-106S (mm) 32 BGS1-032S 40 BAF-04S 50 BAF-05S 63 BAF-06S 80 BAF-08S 100 BAF-10S D-G5BA mm 20 25 32 40 50 63 80 100 D-G5BA 5 5 5.5 6 7 7.5 7.5 8 30% 1 2 2 mm mm D-G5BA A B Hs 20 25 31.5 31.5 24 26 24 25 28 36 36 46 80 28.5 32 40 50 63 32.5 33 37 36.5 45.5 45.5 42 48.5 57.5 56 100 57 46 68 (mm) 10 20 75 15 3. 3-1. 1 2 3 4 5 6 7 8 9 10 1 2 3 416